OEM application for UHV Precision Rotation Stage PRS-110

ABSOLUTE 77 K
PP-30, 3 axes Special xyz PP-30 stage for applications at Kelvin.

Depending on the application, parts are not anodized. For vacuum levels below
10-7 mbar, all cavities are vented to eliminate outgassing and components are assembled using special, clean-room
compatible screws (Class 100). All stages can be equipped with vacuum compatible encoders and limit switches.

Linear stage LS-1 0 equipped with a
CLOSED LOOP

Heidenhain linear scale for vacuum in
10-10 mbar. The guides and ball screw are made from stainless steel, with dry lubricant applied.
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 5-axis system using 3 VT-80 linear stages and a motorized AMA-45 mirror mount for use in 10 -3 mbar vacuum.
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This system consists of a HEXAPOD, a linear stage, and an additional tilting platform. This special arrangement was chosen to achieve a maximum of travel range within the limited space of the high vacuum chamber. The application is an angl e-dependant characteri zation of super-conducting high frequency detectors (far infrared, FIR) for astronomy.

This HEXAPOD was developed for inspection of mirrors used in vacuum of 10 -9 mbar. This HEXAPOD was equipped with linear encoders which enabled the user to achieve ultra-precise positioning.

SpaceFAB SF-3000 PS is designed for applications in vacuum environments where probes have to be aligned in all six degrees of freedom. We have minimized the overall dimensions. SpaceFAB SF-3000 PS is based on LPS-30 stages which allow the highest resolution with the piezo inertia drive and a closed loop scale system.

Maximum travel ranges in XY are 12.7 mm with a vertical displacement of only 2 mm; central load of up to 0,5 kg is possible. The pivot point, i.e. the center of the probe, can be set by the customer which is very important for several applications. The system is based on the miCos Motion Server which includes all the ...

Customized SpaceFAB for vacuum 10-7 mbar and temperature range of - 0°C to +80°C. 6 degrees of freedom. With the SpaceFAB SF-3000 BS (vacuum) all six degrees of freedom can be moved withoutadditional positioning elements. The low weight of the moving platform allows highly dynamic positioning. Using no pre-load, the design...

A 5 m long spectrometer for soft x-rays used in a synchrotron radiation beamline for resonant x-ray emission spectroscopy and resonant inelastic x-ray scattering in the 00–1600 eV energy range. 5 axes advanced x-ray emission spectrometer is mounted on a rotating platform allowing the scattering angle...

This 7 axes positioning system consists of a LS-110 and a custom designed Sp ceFA which is used for dynamic measurements. To achieve the required precision, high stiffness and repeatability was required. The pivot point can be set by software - in this case important for adjusting an X-Ray single-reflection lens at BESSY II in Berlin.

The fiber alignment system shown in the picture is an example of our customized systems. It was designed to connect two fiber arrays to a central waveguide component. Alignment of the components is realized in several steps. The coarse alignment is done using image...

As a project partner of the Millenium project, which is organized by the Fraunhofer Institute for physical measuring technique IPM, miCos got the task of developing a very fast and constant
translation stage. The target of this project is to develop a functional imagesetter for storing analog and digital data on a monochrome film.

Test and Calibration Systems. Air bearing linear axis with a travel range of 600 mm. Used for the measurement of high precision linear scales, this system requires a positioning stage with optimized accuracies (minimal pitch, yaw and roll angle). The system consists of a precision lapped granite plate and an aluminum carrier. ...

Tip-Tilt Elevation System with NPE-200.
This 3 axes systemis used for the manufacturing of optical parts which require the highest long-term stability.

miCos is a leading provider of positioning
systems used for nano-technology applications. Our components and systems are specifically engineered for demanding uses such as laser technology, medical applications, space
exploration, precision sensors and many other challenging application areas.

With a HEXAPOD system motions in all six degrees of freedom can be achieved. Due to the parallel kinematic design principle of HEXAPODS, a much higher system stiffness is achieved than with conventional stacked stages. The low weight of the moving platform allows highly dynamic positioning processes. HEXAPODS are ...

High-precision axes system for quality control of thin films. Using a linear UPM-160 stage, this application achieved a straightness of 0.5 µm/100 mm with a repeatability of less than 25 nm for both axes.

Turnkey system using MT-65 linear stages and a SMC controller including a vision system to measure printed circuit boards.

DT-80 stack with a common center of rotation for realising a motorized gimbal mount. Iris diaphragm with DT-80

LEFT: Two axes rotary system mounted on a DT-120 rotary stage with harmonic drive. RIGHT: XYZ-positioning system with 4 degrees of freedom using a PLS- 5 and DT-50.

LEFT: Elevation stage HT-90, two goniometers WT-100 and WT- 5 plus a ARS-65 rotary stage with a common center of rotation.
RIGHT: Manual VT- 0 stage with linear scale.

LUCIA BalScan is a ballistic identification system, which can be used for routine bullet and cartridge case scanning and
comparison work. It can also be used for building up central databases and for networking ballistic laboratories. Movement and scanning in 6 axes: ...

3 Axes Inspection System. This 3 axes positioning system was custom developed for inspection of small optical parts and is well suited for tasks of reflected and transmitted light microscopy.
XY adjustment is made using a MS-8 scan stage with 8” travel range. A MT- 5 linear stage mounted on a granite bracket allows adjustment of focus of CCD...

Rotation Stage ADT-65 is suited for vertical and horizontal use. With little effort it can be configured together with other miCos components in systems.

Climate chamber 6 axes system for measuring sensors from -50°C to 80°C in the automotive industry. The test units are positioned using a 6 axes system. The travel range in XYZ is 50 mm, rotation is 360° or 10°. The linear axes provide a resolution of less than 0.1 µm, the rotary axes less than 0.0015°. For this task, only standard positioning ...

3 axes positioning system with UPS-150 linear motor stages for XY and PLS- 5 for sensor positioning. The system uses an SMC-Pegasus controller.

XYZ-system consisting of LMS-1 0 stages using linear motors and a DMC-series controller. We also design systems with up to 50 motorized axes including lasers, sensors and software.

Focusing axis for medical engineering

OEM Application for UV-Lasers. The miniature Micro Stage MTS-70 was developed for vacuum applications with a limited space requirement. The drive consists of a special micro-stepped gearless stepper motor. If high positioning accuracy and repeatability (0.1 µm) is needed, the MTS-70 ...

With one SpaceFAB SF-3000 BS all six degrees of freedom can be moved without additional positioning elements. The low weight of the moving platformallows high-dynamic positioning processes.

The SpaceFAB SF-3000 LS is a low cost alternative to miCos SpaceFAB SF-3000 BS and is especially designed for precision positioning. With one SpaceFAB SF-3000 LS all six degrees of freedom can be moved without additional positioning elements.

With a Hexapod PAROS system motions in all six degrees of freedomcan be achieved. Due to the parallel kinematic design principle of HEXAPODS, a much higher system stiffness is achieved than with conventional stacked stages.

With a Hexapod HP-430 system motions in all six degrees of freedomcan be achieved. Due to the parallel kinematic design principle of HEXAPODS, a much higher system stiffness is achieved than with conventional stacked stages.

The Ultra Precision Stage UPS-150 was specifically designed for sub-surface wafer inspection, fiber alignment, high precision robotics and for all tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.

The Ultra Precision Linear Stage UPM-160 was specifically designed for wafer inspection, fiber alignment or for any other tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.

The Precision Stage HPS-170 was developed to meet high precision positioning demands. Due to its precise and smooth operation this linear stage is perfectly suited for measuring and inspection equipment.

The Linear Stage LS-270 was developed for positioning tasks with high loads. Cross-roller bearings mounted on rigid tempered aluminum-alloy guarantee very high guiding stiffness and long life-time.

Linear Stages of the structural series LMS-300 and LMS-180 were developed for modern electronic production and laser applications. When driven with direct-driven MICOS rotation stages UPR, highly-dynamic, precise positioning systems can be created resulting in an efficient production line.

The Linear Measuring Stage LMS-230 was specifically designed for dynamic film exposing, high precision robotics and for all tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.

Linear Stages of the structural series LMS-300 and LMS-180 were developed for modern electronic production and laser applications. When driven with direct-driven MICOS rotation stages UPR, highly-dynamic, precise positioning systems can be created resulting in an efficient production line.

The linear stage LS-180 was developed for industrial applications. Re-circulating ball guides mounted on rigid tempered aluminum-alloy guarantee a very high guiding stiffness and long life.

The Linear Stage LMS-120 was developed for electronic production and other applications where highest accuracy and dynamic capability are needed under limited space conditions.

The LS-120 stage was specifically designed as a vertical stage for the linear motor driven stage LMS-120. High rigidity within a compact package is achieved by using re-circulating linear ball bearings mounted within a highly rigid, tempered aluminum-alloy stage body.

Linear stages of the series LS-110 are especially suited for industrial laser treatment. Linear guides with re-circulating linear ball bearings guarantee very high guiding stiffness.

The NEW linear stage LMS-100 is designed for industrial applications with high speed and limited space conditions such as semiconductor and flat panel display manufacturing.

The NEW linear stage LMS-80 was designed for industrial applications with high speed requirements within a limited space. Linear stages LMS-80 are driven by linear motors and are equipped with a linear scale.

The NEW linear stage LMS-60 was designed for industrial applications with high speed requirements within and limited space conditions. Linear stages LMS-60 are driven by linear motors and are equipped with a linear scale.

Linear stages of the PLS-85 series are especially suited for high precision applications with limited space conditions while allowing loads of 10 kg. Cross-roller bearings guarantee very high guiding stiffness.

The NEW linear stage LS-65 features a compact, low profile construction for high strength in a lightweight package. Typical applications for this measuring stage are inspection stations and micro-manipulators for laser diodes and other highly sensitive components. A precision ground lead-screw with 1 mm pitch (optionally 0.4 mm pitch) guarantees smooth and quiet motion.

The micro stage MTS-65 was developed for industrial application with limited space conditions and is typically used for the positioning of laser diodes and optical parts.

The micro stage MTS-70 was developed for precision industrial applications with limited space conditions. The stage is driven by a 2-phase, gear-less stepper motor.

The NEW linear stage VT-75 was designed for standard industrial applications that require 6 µm repeatability and up to 600 mm travel range. Typical applications for this metrology stage are inspection and assembly systems.

The NEW linear stage VT-40 is designed for standard industrial applications with about 6 µm repeatability and miniature size requirements. Typical applications for this metrology stage are inspection systems.

The translation stage VT-80 is a popular laboratory stage with a wide range of travel lengths. A backlash-free re-circulating ball bearing along with a back-lash compensated lead screw guarantees quiet and smooth motion.

Micro stages LS-40 are suited for the precise positioning of small parts such as fibers, optical components, laser diodes and inspection equipment. The space saving modules can be assembled into XYZ-systems.

The NEW Linear Stage VT-21 L is designed for applications with very limited space conditions and about 8 µm repeatability. Typical applications for this measuring stage are inspection and systems.

The NEW Linear Stage VT-21 S is designed for applications with very limited space conditions and about 8 µm repeatability. Typical applications for this measuring stage are inspection and systems.

Micro stages MT-55 are especially suited for integration in limited space environments. The MT-55 can be used for precision high-resolution positioning of small components such as fibers, optical components and laser diodes.

The XY-Stage CS-430 was developed for industrial test- and inspection systems. The travel ranges in XY are 350 x 300 mm. The XY-stage CS-430 is equipped with re-circulating ball screws and precision cross-roller bearings.

The scan stage MS-8 with a clear aperture of 205 x 205 mm was developed for inspection systems and microscopy. Travel ranges in XY are 205 x 205 mm (8" x 8").

The scan stages MS-4 with clear aperture of 100 mm were developed for inspection and microscopy applications. Travel ranges in XY are 102 x 102 mm (4" x 4"). Due to their low profile, they are suited for tasks using reflected and/or transmitted light microscopy.

The cross stage KT-120 with clear aperture of 45 mm was developed for test and inspection systems. Travel ranges in XY are 25 x 25 mm (1" x 1"). Due to its low profile, it is suited for tasks using reflected and/or transmitted light microscopy.

The nano-precision elevation stage NPE-200 offers the highest precision in our elevation stage series. Maximum positioning accuracy and high stiffness makes this stage especially suitable for lithography, fiber alignment and wafer inspection.

The ultra-precision elevation stage UPL-160 supplements the UPM-160 stage. It was specifically designed for wafer inspection, fiber alignment and any other task where maximum positioning accuracy and reliability are absolutely mandatory.

The elevation stage ES-100 matches the family of LS-110 and PRS-110 stages. The elevation stage is driven by a precision ground re-circulating ball screw with 1 mm pitch. Newly developed cross-roller bearings guarantee a maximum rigidity and guiding quality.

The elevation stage ES-82 excels due to its minimum height and can be combined with the PLS-85, LS-65 and MTS-65 stages. The ES-82 can be equipped with a DC or a 2-phase geared stepper motor and is equipped with two hall limit switches

The elevation stage ES-70 excels due to its minimum height. The ES-70 can be combined with the PLS-85, LS-65 and MTS-65 stages. The ES-70 can be equipped with a DC or a 2-phase geared stepper motor and is equipped with two hall limit switches.

The special characteristic of the elevation stage ES-65 is its very compact shape. The unit is well suited for the precision positioning of light loads. A DC- or a 2-phase stepper motor is available as the drive.

The NEW elevation stage ES-50 is designed for applications with limited space conditions. All ES-50 linear stages are driven by a 2-phase stepper motor and are equipped with two mechanical limit switches.

The micro actuator MA-35 was designed for applications with limited space conditions or where high-precision actuators must be positioned decoupled of the drive. Compared to other pushers the standard force is very high (200 N) and can be increased.

The micro pusher MP-20 L is designed to motorize manual drives or mirror mounts and it is an ideal component for limited space conditions. Small light components such as mirrors and diodes can be directly mounted to the tip.

With the micro pusher MP-20 S manual drives can be replaced by motor drives. It is an ideal component for limited space conditions. For positioning tasks light components such as mirrors and diodes can be directly mounted to the tip.

The NEW Linear Stage MP-21 is designed for applications with very limited space conditions and about 0.5 µm repeatability. Typical applications for these pushers are inspection and systems.

With the micro pusher MP-15 manual drives or mirror mounts can be motorized later on. It is an ideal component for limited space conditions. The micro pusher MP-15 is equipped with a fine-pitch screw thread of 0.5 mm pitch resulting in a quiet and homogeneous smooth motion.

Slit and cross slits ASS 5E and ADS 5E are high quality instruments for industry and research specifically in the areas of laser applications and radiology. The slits are provided with a DC or stepper motor driven aperture with maximum opening of 5 mm.

The linear piezo stage LPS-30 is specifically designed for precise positioning of small components. They are ideal for a variety of applications, such as Micro-, Nano- technology, Bio Technology, Microscopy and R&D.

The linear piezo stage LPS-35 is specifically designed for precise positioning of small components. They are ideal for a variety of applications, such as Micro-, Nano- technology, Bio Technology, Microscopy and R&D.

Piezo positioner stages PP-30 are designed for precise adjusting of small components. They are ideal for a variety of applications, such as Micro-, Bio Technology, Microscopy, Quality control and R&D.

The elevation piezo stage EPS-30 is specifically designed for precise positioning of small components. It is ideal for a variety of applications, such as Micro-, Nano- technology, Bio Technology, Microscopy and R&D.

With best values for flatness and wobble you can reach highest accuracies due to the high precision air-bearing. All rotation stages UPR-270 AIR are directly driven by a torque motor.

Ultra precision rotation stages of the structural series UPR-270 are developed for dynamic positioning of high load applications. They are mainly utilized in the field of semiconductor technology, for positioning systems of laser treatment, robotics and synchrotron applications.

Ultra precision rotation stages of the structural series UPR-160 AIR are developed for dynamic positioning with a maximum of precision. With best values for flatness and wobble you can reach highest accuracies due to the high precision air-bearing.

Ultra precision rotation stages of the structural series UPR-160 AIR are developed for dynamic positioning with a maximum of precision. With best values for flatness and wobble you can reach highest accuracies due to the high precision air-bearing.

Ultra precision rotation stages of the structural series UPR-100 AIR are developed for dynamic positioning with a maximum precision. Due to the high precision air-bearing the stage can achieve excellent values for flatness, wobble and accuracy.

Ultra precision rotation stages of the series UPR-100 are developed for fast and accurate positioning applications. They are mainly utilized in the field of semiconductor technology, for positioning of laser treatment systems, robotics and synchrotron applications.

The Precision Rotation Stage TRS-65 was developed for fast and accurate positioning applications in a smaller travel range up to 45°, typically on top of an xy setup. It fits ideal to the linear motor driven stages LMS-60 and LMS-80.

The large clear aperture with a diameter of 120 mm is particularly significant for the rotation stages PRS-200. The body is fabricated from a special, high-rigidity, tempered aluminum alloy.

The precision rotation stages PRS-110 can be used in a wide range of industrial and scientific applications. They are a good fit with the LS-110 linear stages and ES-100 elevation stages.

The rotation stages DT-65 N are fabricated from a special, high-rigidity tempered aluminum alloy. A pre-loaded four-point double row ball bearing guarantees good wobble and flatness specifications.

The NEW rotation stage RS-40 is very compact but offers a big aperture of 20 mm (25 mm holding diameter). A precision bearing guarantees a perfectly smooth move. The RS-40 rotation stages have nearly zero backlash worm gear reduction.

The rotation stages DT-80 are a low cost alternative to the MICOS high precision rotation stages DT-65 N and PRS-110. They are mainly developed for simple positioning in the laboratory.

The NEW rotation stage DT-80 R is a low cost alternative to the MICOS DT-65 N and PRS-110 high precision rotation stages. The belt driven DT-80 R rotation stage allows a much higher speed of rotation in comparison to other stages.

The NEW DT-50 rotation stages are a low cost and lower accuracy alternative to the MICOS RS-40 stage. The belt driven DT-50 rotation stage allows a much higher speed of rotation in comparison to other stages.

The rotation stages Pollux RSP-200 are designed for simple industrial metrology applications, vision control and inspection systems. The RSP-200 is a plug & play system with an integrated SMC-Pollux controller.

The goniometer stages WT-120 and WT-90 are designed for all tasks where conventional rotation stages cannot be used due to limited space conditions. Typical uses are applications in the area of laser positioning and radiology.

The goniometer stages WT-120 and WT-90 are designed for all tasks where conventional rotation stages cannot be used due to limited space conditions. Typical uses are applications in the area of laser positioning and radiology.

The goniometer stages WT-100 and WT-85 are designed for all tasks where conventional rotation stages cannot be used due to limited space conditions or where a clear aperture is needed. Typical applications are metrology tasks in the area of laser technology and radiology.

The goniometer stages WT-100 and WT-85 are designed for all tasks where conventional rotation stages cannot be used due to limited space conditions or where a clear aperture is needed. Typical applications are metrology tasks in the area of laser technology and radiology.

Our NEW filter wheel AFW-65 was designed for rotating 6 filters with dia 25.4 mm. It can be mounted in a linear setup and fits in our Albatros optical bench as well as in the optical height of the LINOS microbench rail with carrier.

- Travel range 25 mm
- Load capacity 30 kg
- Dove tail slide
- Module combination
- Clamp device, on request

- Travel range 5 mm
- 30 mm clear aperture
- Dove tail slide
- Module combination

- Travel range 5 mm XY
- Load capacity 4 kg
- Dove tail slide
- 30 mm clear aperture
- Module combination

- Travel range 5 mm
- Clear aperture 15 mm
- Center load capacity 4 kg
- Dove tail slide
- Module combination

- Travel range 25 mm XY
- Load capacity 4 kg
- Cross-roller-bearings
- 45 mm clear aperture
- Micrometer screw

- Travel range 25 mm
- 25 mm clear aperture
- Load capacity 3 kg
- Linear ball-bearings
- Module combination

- Travel range up to 50 mm
- Clear aperture 56 mm
- Center load capacity 20 kg
- Crossed-roller bearings
- Special, tempered Aluminium

- Travel range 25 mm
- Load capacity 16 kg
- Crossed-roller bearings
- Module combination

- Travel range range 25 mm
- Load capacity 16 kg
- Crossed-roller bearings
- Module combination

- Travel range range 25 mm
- Load capacity 1 kg
- Ball guided system
- Micrometer pitch, 0.5 mm
- Module combination

- Clear aperture 25 mm
- Preloaded worm drive for zero-backlash
- High precision four point-bearings
- Precise, smooth cont. 360° motion
- Load up to 3 kg
- Module combination

- EcoLine in lightweight construction
- Clear aperture 40 mm
- Travel range 360°, endless
- Double row ball bearings
- Load up to 1 kg
- Module combination

Albatros®
Up to now the use of optomechanical construction systems for optics and laser technology is necessary in the labs of scientists and engineers for research and development. The Albatros ® system with an optical height of 65 mm is designed to support and simplify the layout of optical systems and laser systems in scientific labs and industry. The precise and handy components of this system are established in many labs around the world since 1991. The easy use and the adaptability of the Albatros® components even to other systems explains the constant success in the market.

Moskito®
The industry is forced to shrinkt heir products to dimensions where conventional equipment reaches its limits. Consequently miCos decided to offer a miniaturized optomechanical system with all necessary components to support the scientists and engineers in their work. The optical height of 1" (25.4 mm) and useful high precision components make small system layouts in short time schedules and affordable prices possible.
Campus®
The use of lasers in a variety of research fields, industry, medicine and finally in many products of daily life demands a qualified education and training of students in laser technology from uni versitie s, technical high schools and vocational schools. These institutions are addressed by miCos, the series of educational laser kits from miCos developed to support and improve practical laser training. Within this product line 7 laser training systems of the topics optics fundament als, laser basics , laser metrology, fiber optics and telecommunications, laser material processing, and laser applications are presented. Besides these products miCos offers support for elaboration of suited curriculums for laser courses, design of the laboratories and advice in equipment selection with concepts for complete laser training facilities. Last but not least, training courses for all experimental systems are held at ’ place as well as at your site.