Vacuum Sensors

Vacuum Sensors - HVS Series

The HVS Series is our vacuum sensing series. These miniature pirani-type vacuum sensors allow measurements in a pressure range from 1000 mbar (atmospheric pressure) down to 10 -3 mbar (HVS 04), and 10 mbar down to 10 -5 mbar (HVS 03k). They come in a small and robust TO-39 or TO-8 metal housing. Assembling the HVS 04 and HVS 03k in a TO-8 housing allows coverage of the full pressure range.

Features and Benefits

MEMS type Pirani vacuum sensors in TO-39 housing

 

  • Pirani measurement principle
  • Very large pressure range 1000 mbar to 10 -5 mbar
  • Small form factor TO-39 or TO-8
  • Robust metal housing
  • High sensitivity

 

Specifications

HVS 03k HVS 04 HVS 03k + 04 (dual)
Housing TO-39 TO-39 TO-8 Unit
Chip size 4.0² 1.0² 4.0² + 1.0² mm²
Max. signal voltage 400 410 400 + 410 mV
Resistance sensor chip 9 1 9 + 1 kOhm
On chip ref. resistor 9 1 9 + 1 kOhm
Supply voltage 2 2 2 V
Operating temperature -20 .. 120 -20 .. 120 -20 .. 120 °C
Storage temperature -40 .. 120 -40 .. 120 -40 .. 120 °C

Typical Characteristics

HVS 04

HVS 03k

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