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Sensirion is a leading sensor manufacturer, providing relative humidity sensors and flow sensor solutions with unique performance. Together with our capacitive humidity sensor, the product range includes liquid flow sensors, mass flow meters, mass flow controllers and differential pressure sensors. Using our microsensor solutions, OEM customers benefit from the proven CMOSens® Tech- nology and excellent technical support. Among a large variety of applications, the flow and humidity sensors are successfully used in the automotive and medical industry.
 
Product Line Up
Digital Humidity Sensors (RH&T)
First digital humidity sensor for precise, reliable and cost-effective humidity measurement and humidity control in a wide variety of OEM applications such as consumer goods, automotive and HVAC applications. 

SHT10
Digital Humidity Sensor (RH&T)
Economic relative humidity sensor for low cost applications.
SHT10 digital humidity and temperature sensor is the low cost version of the reflow solderable humidity sensor series. The accuracies have been opened to a level that guarantees a very competitive price. The capacitive humidity sensor is available up to high volumes and as every other sensor type of the SHTxx family, it is fully calibrated and provides a digital output.
SHT11
Digital Humidity Sensor (RH&T)
All-round relative humidity sensor for any application.
SHT11 digital humidity and temperature sensor is the all-round version of the reflow solderable humidity sensor series that combines decent accuracy at a competitive price. The capacitive humidity sensor is available up to high volumes and as every other sensor type of the SHTxx family, it is fully calibrated and provides a digital output.
SHT15
Digital Humidity Sensor (RH&T)
High-quality relative humidity sensor for demanding measurements.
SHT15 digital humidity and temperature sensor is the high-end version of the reflow solderable humidity sensor series with a cutting edge measurement accuracy. As every other sensor type of the SHTxx family, the capacitive humidity sensor is fully calibrated and provides a digital output. Every sensor is individually tested upon quality and accuracy compliance.
SHT21
Digital Humidity Sensor (RH&T)
Smallest relative humidity sensor for a multitude of applications: "size that inspires"!
The extremely small SHT21 digital humidity and temperature sensor integrates sensors, calibration memory and digital interface on 3 x 3 mm footprint. Additionally the humidity sensor provides electronic read-out of tracking information. The complete over-moulding of the sensor chip – with the exception of the humidity sensor area – protects the fully calibrated and reflow solderable humidity and temperature sensor against external impact and leads to an excellent stability against aging, shock and volatile chemicals.
 
NEW SHT25
Digital Humidity Sensor (RH&T)
High-precision version of the world’s smallest digital humidity sensor. 
The new SHT25 is the high-end model of Sensirion’s new generation of digital humidity and temperature sensors. Compared to the standard version, an even higher level of precision (1.8% RH and 0.2°C typical values) can be guaranteed. The fully calibrated and reflow solderable SHT25 is characterized by the same unique features than the humidity sensor SHT21. It does contain the same newly designed sensor chip that is encapsulated in a DFN 3-0 package of 3 x 3 x 1.1 mm. The complete overmolding – with the exception of the humidity sensor area – protects the capacitive humidity sensor against external impact and facilitates excellent long-term stability.  
SHT71
Digital Humidity Sensor (RH&T)
Easy replaceable relative humidity sensor for any application.
SHT71 digital humidity and temperature sensor is the all-round version of the pin-type humidity sensor series that combines decent accuracy at a competitive price. The internal calibration allows for simple and easy replacement in demanding environments. As every other sensor type of the SHTxx family, the capacitive humidity sensor SHT71 is fully calibrated and provides a digital output.
SHT75
Digital Humidity Sensor (RH&T)
Easy replaceable relative humidity sensor for high-precision measurements.
SHT75 digital humidity and temperature sensor is the high-quality version of the pin-type humidity sensor series with cutting edge accuracy. As every other sensor type of the SHTxx family, the capacitive humidity sensor SHT75 is fully calibrated and provides a digital output. Every humidity sensor is tested upon quality and accuracy compliance. Certficate of conformance on batch level is available on request.
Evaluation Kit EK-H2 for Humidity Sensors SHTxx
For simultaneous measurement with humidity & temperature sensors SHTxx.
The evaluation kit EK-H4 combines an easy-to-use plug-and-play system for sensor evaluation with a data logging equipment for simultaneous recording of humidity and temperature. EK-H4 allows for applying 4 SHTxx humidity and temperature sensors, no matter what generation, simultaneously and reading out relative humidity, temperature, calculated dew point and energy consumption at the same time. EK-H4 is working with SHT1x, SHT7x as well as with SHT2x sensors and interfaces to the computer via USB. The data-logging software is able to integrate signals from various EK-H4 multiplexers such that only the USB channels of the computer are limiting the number of read out sensors.
 
Liquid Flow Sensors & Liquid Flow Meters
High precision liquid flow sensors and liquid flow meters with measurement ranges down to nanoliters per minute. Designed for medical devices, HPLC, biotech and laboratory applications.

 
OEM Liquid Flow Sensor LG16/LG216
Maximum flow rate: 5 ml/min and 20 ml/min. Based on the leadingCMOSens® Technology, Sensirion produces small sized micro flow sensor elements on request. 

Sensirion manufactures CMOSens® microsensors in high volumes. Liquid flow sensing solutions for flow rates below 80 ml/min down to the microfluidic sector and sub nano litre resolutions are Sensirion’s unique strength.
Customized OEM Solutions
In partnership with you Sensirion develops and manufactures tailored liquid flow sensor solutions for medical devices, life science, bio-tech, semiconductor industry and analytical instruments.
Flow Meter SLQ-HC60 for Hydrocarbons
For flow rates below 100 ml/min for hydrocarbons (alcohols, diesel, oils, gasonline, etc.) and other non-aqueous liquids. Measure even lowest flow rates with highest speed and sensitivity. For industrial applications.
 
NEW Photoresist Flow Meter SLQ-QT105
For flow rates below 120 ml/min of hydrocarbon based liquids like photoresists. Features fast response time and highest sensitivity. Tailored to high-purity fluid handling applications in the semiconductor industry. 
NEW Flow- & Bubble Detector LG01
Micro Flow Switch for ultra-low liquid flow rates, bubble detection enabled, designed for integration into bio-medical applications and general process control solutions.
Liquid Flow LabKit
Start immediately with measurements using a ready-to-use Liquid Flow LabKit! Includes Nano Flow Sensor, Windows software, interface cable for RS232 port, power supply etc.
Your benefits: first of all, you will quickly and very easily obtain precise and reliable measurement results. Secondly, you can conveniently archive these data and you can easily use them in other programs (e.g. Microsoft Excel) due to the export function integrated in the viewer software. 
 
Nano Flow Meter SLG1430 for Liquids
aximum liquid flow rate: 40 µl/min. The unique standard nano flow meter for liquid chromatography, LC/MS and lab-on-a-chip applications!
Resolutions down to 0.5 nano liter/min.
Liquid Flow Meter ASL1600
Maximum liquid flow rate: 4 ml/min. Media isolated flow sensor with resolutions down to 100 nl/min. Wetted materials PEEK & glass, ultra fast response time (down to 30 ms). 
 
 
Gas Flow Sensors: Mass Flow Meters & Mass Flow Controllers
The outstanding performance of Sensirion's mass flow meters and mass flow controllers is based on patented CMOSens® Technology; consisting of a calorimetric microsensor (MEMS) integrated with signal conditioning electronics on a single chip.
 
Mass Flow Meter EM1 for Gases
At an unbeaten price/performance ratio the mass flow meter EM1 covers a very wide flow range (1:100) with an accuracy of 3% of measured value. The sensor enables fast (5 ms), accurate and reliable flow measurement for a wide range of standard and OEM applications.
Mass Flow Sensor ASF1400/ASF1430 for Air
ASF1400/1430 mass flow sensors measure air flows with highest accuracy (1% m.v.). They cover an unique and wide dynamic range from 0.03 - 400 sccm. The fully calibrated & temperature compensated sensors have a digital interface (RS232 or SPI) and are CE certified.
Mass Flow Meter SFM4100 for Medical Gases
Designed for anaesthesia devices, the fully calibrated SFM4100 features a digital I2C interface, excellent stability, and an impressively wide dynamic measuring range. Thanks to its 'Multigas' function, the sensor can be set up and calibrated for several different gases in parallel.
 
Mass Flow Controller SFC3000
The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
Mass Flow Controller SFC4000
The mass flow controller SFC4000 is an extremely fast, precise and accurate analog mass flow controller. It offers an analog interface (0-5 V) in standard mechanical dimensions. Required power supply is unipolar 14 to 24 Vdc.
OEM Solutions for Gas Flow Measurement & Control
Based on our leading CMOSens® Technology, Sensirion delevops customized sensor modules & complete devices for process control & mass flow controllers, metering, medical instruments, building control, HVAC and many other applications.
 
 
Differential Pressure Sensor for Gases
Differential pressure sensors for gases. Measures accurately and offset free down to very low rates of differential pressure. Designed for demanding medical and HVAC applications. 
 
 
SDP600 Series - Differential Pressure Sensors
First digital, dynamic differential pressure sensor. Accuracy < 0.2% FS near zero. Highest long-term stability, no zero-point drift. Excellent repeatability. Low cost. Digital I2C output. Measurement range: ±500 Pa
SDP1000 Series - Differential Pressure Sensors
Reliable, long-term stable differential pressure sensor. Measures even miniscule pressure differences (< 0.25 Pa). Analog voltage output. Available for several measurement ranges from ±62 Pa to 0-3500 Pa.
SDP1108 - Differential Pressure Sensor
Reliable, long-term stable differential pressure sensor. Optimized for medical applications. Highest resolution (0.05 Pa). Fast response time. Analog voltage output. Measurement range: 0 to 500 Pa.
ASP1400 - Differential Pressure Sensor
Differential pressures sensor for ultra-low pressure differences down to 0.002 Pa. Unsurpassed precision and sensitivity. Digital RS-232 output. Measurement range: ±100 Pa.
Customized OEM Solutions
Customized differential pressure sensors for high-volume applications. No drift. Highest precision and sensitivity. Individualized output characteristics, measurement ranges, and packaging.
         

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