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| Hexapod PAROS |
- Six axes Parallel Robot Operating System
- Travel ranges linear 350 x 350 x 80 mm
- Travel ranges rotation Rx, Ry 40°, Rz, 100°
- Maximum speed 30 mm/sec (leg speed)
- Repeatability in space +/- 5µm
- High stiffness
- High dynamic |
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| SF-3000 LS |
- Six axes micro robot system
- Compact, low profile system
- Travel ranges linear 50x12.7x100 mm
- Travel ranges rotary Rx, Ry, Rz 10°
- Load capacity 1 kg center mounted
- Automaic alignment
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| NanoPod |
- Increased repeatability over stacked stage serial
kinematic structures
- Simplified programming with tool center point (TCP)
- Ability to rotate (TCP) repeatability about about a virtual point in space
- Coordinated 6 axis of motion at TSP
- Virtual elimination of stacked stage cosine and sine errors |
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| Linear Stage LS-180 |
| Special characteristic of the Linear Stage LS-180 is its
tough structural shape. All important parts are fabricated from a high rigid,
tempered AI-alloy. Linear stages of the structural series LS-180 are mainly
suited for industrial laser treatment. |
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| Elevation Stage |
Special characteristic of the Elevation Stage
ES-100 is its very compact structural shape. The Elevation stage is driven by a
precision ground recirculating ball screw with 1mm pitch. |
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| Precision Linear Stage PLS-85 |
| Special characteristic of the Precision Linear Stage
PLS-85 is its compact structural shape. Typical applications for this linear
stage are inspections and micro-mounting systems for laser diodes and other
high-sensible construction parts. |
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| Rotation Stages DT-80 |
| The Rotation Stages DT-80 of the structural series 80 are
a low cost alternative to the MICOS High-Precision-Rotation Stages. They are
mainly employed for simple positioning and enlarge the offer of our low cost
translation stages. |
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| PRS 110 |
| The Precision Rotation Stages PRS-110 are mainly applied
in the range of industrial measuring technique, vision control, micro-laser
application, automation systems, robotic and for semiconductor technology. The
body is fabricated from a special, high-rigidity, tempered Al-alloy. |
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| Rotation Stage Pollux |
| The Rotation Stages Pollux RSP-200 are mainly applied in
the range of simply industrial measuring, vision control and inspection systems. |
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| Linear Piezo Stages LPS-30 |
Linear Piezo Stages LPS-30 are suited for precise
positioning of small construction parts. They are ideal for a variety of
applications, such as Micro,-Nanotechnology, Bio Technology, Microscopy, Quality
control and R&D. LPS-30 stages are working in open or closed loop mode.
Resolution up to 50 nm are available. |
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| Micro Stage |
| The Micro Stage MTS-65 was developed for industrial
application with limited space conditions. Typically used for the positioning of
laser diodes and optical construction parts. The drive is made by a 2-phase
micro stepper motor without gear. |
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| Micro Pusher |
| With the Micro-Pusher MP-15 manual drives can be replaced
by motor drives. The Micro-Pusher MP-15 are ideal devices for motorizing mounts
in optical or mechanical systems. Furthermore it is an ideal component for
limited space conditions. |
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| Linear Stage LS-180 |
| Special characteristic of the Linear Stage LS-180 is its
tough structural shape. All important parts are fabricated from a high rigid,
tempered AI-alloy. Linear stages of the structural series LS-180 are mainly
suited for industrial laser treatment. |
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| UPS_150 |
| The Ultra Precision Stage UPS-150 of the structural series
150 is especially employed for the Wafer Sub Surface Inspection, Fiber
Alignments, High Precision Robotic and for all tasks where a maximum of
positioning accuracy and reliability is absolutely necessary. |
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| Linear Motor Stage LMS-300 |
| Linear Stages of the structural series LMS-300 and LMS-180
are mainly employed for modern electronic production and laser application.
Combined with direct-driven Rotation Stages UPR of MICOS, high dynamic precise
positioning systems can be configured resulting in an efficient production.
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| SMC_pci |
| 3 Axis Microstep-Controller System |
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| SMC_pollux |
| Single-axis Microstep-Controller System |
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