Translation Stages, Rotation Stages, Elevation Stages, Hexapods, Micro Stage, Nano Pusher from PI miCos

Controllers - Piezo

MMC-series MMC-100 / 110

Integrated controller / driver
for PI miCos stick-slip piezo

Compact, modular design

Configurable as a standalone unit or stackable up to 99

Open-loop / closed-loop operation

Open-loop resolution of less than 1 nm

Closed-loop resolution dependent on the encoder.

A quad B differential encoder feedback

PiCo 33

Special design
for piezo driven step motor

Manual control by keypads or RS-232

works with batteries or external power supply

operates up to 3 axes

Customized designs

USB-interface optionally (without keypads)

USB closed-loop controller (optionally)

PiCo 33 USB

Special design
for piezo driven step motor

operates up to 3 axes

Customized designs

USB-interface (without keypads)

USB closed-loop controller

PMA-100 Piezo Motor Amplifier

Single axis piezo motor
(inertial or stick-slip) driver

Interfaces directly with a stepper motor controller

Standard pulse and direction interface

Typical open loop step resolution
of 1.5 nm

Typical maximum velocity of 3 mm/s

No setup or adjustments required

Universal power supply included

VACUUM & CRYO VACUUM & CRYO applications are becoming more essential due to technologies that can only be applied in vacuum and cryogenic. For over 14 years, PI miCos has applied its extensive vacuum and cryogenic experience to the motion technology field. We supply components and systems for vacuum levels from 10-3 mbar to 10-9 mbar. Most of our standard products are designed with vacuum applications in mind allowing us to easily convert our broad range of stages to be vacuum compatible. We also apply our vacuum expertise to complete turnkey system solutions. Vacuum: For specifying the necessary vacuum level it is important to analyze the application. Coating of optics, epitaxy or cristallography are different in the necessary vacuum level as well as mass spectroscopy or others. Not the general vacuum level of 10-6 or 10-9 mbar is often important but the partial pressure of hydrocarbons. As a result of using a wrong grease with higher vapor pressure or use of plastics these hydrocarbons can be a source of contamination of surfaces. Especially laser applications in the UV range are critical because the hydrocarbons can be split into fragments and these fragments can be deposed on optics. The choice of materials and handling processes are at the end the most important points to get the right vacuum stage

Low Vacuum Preparation category standard motor standard measuring system, if measuring system required standard wiring standard connector for plug connection standard limit switch all Al parts are anodized stainless steel screws all guidance and driving elements are equipped with vacuum grease Outgassing temperature max. +50°C	High Vacuum Preparation category special vacuum motor measuring system modified for the use in vacuum motor and limit switches equipped with teflon braids 1m length wired to a test plug standard limit switches with plastic part all Al parts left un-anodized stainless steel screws all guidance and driving elements are equipped with vacuum grease no use of CuZn alloys all holes are vented	Ultra High Vacuum Preparation category special vacuum motor measuring system modified for the use in vacuum motor and limit switches equipped with teflon braids 1m length wired to a test plug no limit switches, but can be offered with special UHV limit switches all Al parts left un-anodized stainless steel screws are Ag coated with degass drilling (apart from M3 thread) bearing and driving elements made of hardened stainless steel and equipped with vacuum grease no use of CuZn alloys no use of plastics, unless so desired after consultation with the customer all holes are vented (if possible)

Cryo Preparation category cryogenic special vacuum motor measuring system modified for the use in vacuum motor and limit switches equipped with teflon braids 1m length wired to a test plug no limit switches, but can be offered with special UHV limit switches all Al parts left un-anodized stainless steel screws are Ag coated with degass drilling (apart from M3 thread) bearing and driving elements made of hardened stainless steel and equipped with vacuum grease no use of CuZn alloys no use plastics, unless so desired after consultation with the customer all holes are vented (if possible)	Space Application Preparation category Stages for operation in space High shock and vibration loads Vacuum up to 10-11 mbar Temperature ranges depend on the application Radiation resistance up to 10-6 J/kg Outgassing holes to avoid pockets of trapped gas	Extreme Environment Categories Non magnetic Climate application Clean Room application Outdoor application powered by batteries High humidity application Working in high magnetic field

MOTION CONTROL For your better guidance on our website, we splitted the main group MOTION CONTROL in the following subgroups. Engineered Systems, Controllers, Robotics, Linear Stages, Rotation Stages, Piezo Stages, Manual Stages, Accessories & Appendix

Engineered Systems - Cryo, UHV Vacuum

CRYO / ABSOLUTE 77 K OEM application for UHV Precision Rotation Stage PRS-110 PP-30, 3 axes Special xyz PP-30 stage for applications at Kelvin.	VACUUM & CLEAN ROOM Depending on the application, parts are not anodized. For vacuum levels below 10-7 mbar, all cavities are vented to eliminate outgassing and components are assembled using special, clean-room compatible screws (Class 100). All stages can be equipped with vacuum compatible encoders and limit switches.	UHV VACUUM / CLOSED LOOP Linear stage LS-1 0 equipped with a Heidenhain linear scale for vacuum in 10-10 mbar. The guides and ball screw are made from stainless steel, with dry lubricant applied.

LOW VACUUM 5-axis system using 3 VT-80 linear stages and a motorized AMA-45 mirror mount for use in 10 -3 mbar vacuum.	HEXAPOD FOR VACUUM This system consists of a HEXAPOD, a linear stage, and an additional tilting platform. This special arrangement was chosen to achieve a maximum of travel range within the limited space of the high vacuum chamber. The application is an angle-dependant characterization of super-conducting high frequency detectors (far infrared, FIR) for astronomy.	HEXAPOD FOR HV This HEXAPOD was developed for inspection of mirrors used in vacuum of 10 -9 mbar. This HEXAPOD was equipped with linear encoders which enabled the user to achieve ultra-precise positioning.

Engineered Systems - Fiberalingment

SpaceFAB SF-3000 PS (Piezo) part. I SpaceFAB SF-3000 PS is designed for applications in vacuum environments where probes have to be aligned in all six degrees of freedom. We have minimized the overall dimensions. SpaceFAB SF-3000 PS is based on LPS-30 stages which allow the highest resolution with the piezo inertia drive and a closed loop scale system.	SpaceFAB SF-3000 PS (Piezo) part. II Maximum travel ranges in XY are 12.7 mm with a vertical displacement of only 2 mm; central load of up to 0,5 kg is possible. The pivot point, i.e. the center of the probe, can be set by the customer which is very important for several applications. The system is based on the PI miCos Motion Server which includes all the ...	SpaceFAB HV Customized SpaceFAB for vacuum 10-7 mbar and temperature range of - 0°C to +80°C. 6 degrees of freedom. With the SpaceFAB SF-3000 BS (vacuum) all six degrees of freedom can be moved without additional positioning elements. The low weight of the moving platform allows highly dynamic positioning. Using no pre-load, the design...

HIGH RESOLUTION X-RAY / SPECTROMETER A 5 m long spectrometer for soft x-rays used in a synchrotron radiation beamline for resonant x-ray emission spectroscopy and resonant inelastic x-ray scattering in the 00–1600 eV energy range. 5 axes advanced x-ray emission spectrometer is mounted on a rotating platform allowing the scattering angle.	SpaceFAB HV FOR SYNCHROTRON This 7 axes positioning system consists of a LS-110 and a custom designed Sp ceFA which is used for dynamic measurements. To achieve the required precision, high stiffness and repeatability was required. The pivot point can be set by software - in this case important for adjusting an X-Ray single-reflection lens at BESSY II in Berlin.	FIBER ALIGNMENT The fiber alignment system shown in the picture is an example of our customized systems. It was designed to connect two fiber arrays to a central waveguide component. Alignment of the components is realized in several steps.

Engineered Systems Air Bearing

MICROFILM SCANNER As a project partner of the Millenium project, which is organized by the Fraunhofer Institute for physical measuring technique IPM, PI miCos got the task of developing a very fast and constant translation stage. The target of this project is to develop a functional imagesetter for storing analog and digital data on a monochrome film.	AIR BEARING Test and Calibration Systems. Air Bearing linear axis with a travel range of 600 mm. Used for the measurement of high precision linear scales, this system requires a positioning stage with optimized accuracies (minimal pitch, yaw and roll angle). The system consists of a precision lapped granite plate and an aluminum carrier.	LONG TERM STABILITY - TIP TILT Tip-Tilt Elevation System with NPE-200. This 3 axes system is used for the manufacturing of optical parts which require the highest long-term stability.

NANO ROBOTICS PI miCos is a leading provider of positioning systems used for nano-technology applications. Our components and systems are specifically engineered for demanding uses such as laser technology, medical applications, space exploration, precision sensors and many other challenging application areas.	HEXAPOD With a HEXAPOD system motions in all six degrees of freedom can be achieved. Due to the parallel kinematic design principle of HEXAPODS, a much higher system stiffness is achieved than with conventional stacked stages. The low weight of the moving platform allows highly dynamic positioning processes.	ANALYSING OF THIN FILMS High-precision axes system for quality control of thin films. Using a linear UPM-160 stage, this application achieved a straightness of 0.5 µm/100 mm with a repeatability of less than 25 nm for both axes.

Engineered Systems Wafer Inspection

ELECTRONIC INSPECTION Turnkey system using MT-65 linear stages and a SMC controller including a vision system to measure printed circuit boards.	MULTIAXES STANDARD / COMBINATION DT-80 stack with a common center of rotation for realising a motorized gimbal mount. Iris diaphragm with DT-80	SENSOR CALIBRATION LEFT: Two axes rotary system mounted on a DT-120 rotary stage with harmonic drive. RIGHT: XYZ-positioning system with 4 degrees of freedom using a PLS- 5 and DT-50.

MULTIAXEX STANDARD / COMBINATION LEFT: Elevation stage HT-90, two goniometers WT-100 and WT- 5 plus a ARS-65 rotary stage with a common center of rotation. RIGHT: Manual VT- 0 stage with linear scale.	BALL SCANNING LUCIA BalScan is a ballistic identification system, which can be used for routine bullet and cartridge case scanning and comparison work. It can also be used for building up central databases and for networking ballistic laboratories.	INSPECTION SENSOR MEASURMENT 3 Axes Inspection System. This 3 axes positioning system was custom developed for inspection of small optical parts and is well suited for tasks of reflected and transmitted light microscopy. XY adjustment is made using a MS-8 scan stage with 8” travel range. A MT- 5 linear stage mounted on a granite bracket allows adjustment of focus of CCD...

Engineered Systems Climate, UV Application

POSITIONING IN ANTARCTICA Rotation Stage ADT-65 is suited for vertical and horizontal use. With little effort it can be configured together with other PI miCos components in systems.	POSITIONING IN CLIMATE CHAMBER Climate chamber 6 axes system for measuring sensors from -50°C to 80°C in the automotive industry. The test units are positioned using a 6 axes system. The travel range in XYZ is 50 mm, rotation is 360° or 10°. The linear axes provide a resolution of less than 0.1 µm, the rotary axes less than 0.0015°. For this task, only standard positioning ...	WAFER INSPECTION 3 axes positioning system with UPS-150 linear motor stages for XY and PLS- 5 for sensor positioning. The system uses an SMC-Pegasus controller.

PRECISION OPTICS PRODUCTION XYZ-system consisting of LMS-1 0 stages using linear motors and a DMC-series controller. We also design systems with up to 50 motorized axes including lasers, sensors and software.	STAGE FOR AUTOFOCUSING Focusing axis for medical engineering	XY-STAGE FOR UV-LASER / APPLICATION OEM Application for UV-Lasers. The miniature Micro Stage MTS-70 was developed for vacuum applications with a limited space requirement. The drive consists of a special micro-stepped gearless stepper motor. If high positioning accuracy and repeatability (0.1 µm) is needed, the MTS-70.

Controllers

For your better guidance on our website, we splitted the group Controllers in the following subgroups.
Controllers 2011, Microstep, Linear/ Torque, Servo, Piezo & Amplifier

Controllers - Controllers 2011


		MMC-series MMC-100 / 110 Integrated controller / driver for PI miCos stick-slip piezo Compact, modular design Configurable as a standalone unit or stackable up to 99 Open-loop / closed-loop operation Open-loop resolution of less than 1 nm Closed-loop resolution dependent on the encoder.. A quad B differenntial encoder feedback				DeltaTau-series Geobrick/Clipper 4 or 8 axes of simultaneous control (0.1 ms update t.) 80 MHz CPU optional 240 MHz Ethernet TCP/IP, USB and RS-232 communication interf. Multitasking of up to 256 motion and 64 asynchronous.. Easy-to-use, high-level programming language Linear, circular, rapid, B-spline, Hermite-spline interp. True S-curve accel/decel for jerk-limited profiles

Controllers - Microstep

SMC Technical Info Kyfeatures description SMC family Open Loop Figures resolution 100nm, 25nm & 10nm Closed Loop Figures resolution 100nm, 25nm & 10nm Open Loop, positioning error Open Loop; positioning corrected	SMC-series SMC corvus 2 or 3 Axes Microstep-Controller System High-Resolution-Microstep 48Vbus-voltage 133 MHz RISC Processor, with Flash-Memory Velocity-range <0.1µm/s ...45rev/s (200stepmotor) Closed-loop for quadrature encoders (RS-422) and sin-cos encoders (1Vpp)	SMC-series SMC corvus eco 2 or 3 Axes Microstep-Controller System High-Resolution-Microstep 24 V bus-voltage 133 MHz RISC Processor, with Flash-Memory Velocity-range < 0.1 µm/s... 15 rev/s (standard) 25 rev/s (with speed upgrade) (200 step motor) Closed-loop for (RS-422) and (1Vpp)	SMC-series SMC coruvs pci 12 V PC PCI plug-in board with onboard microstepping p.amp. Motor power 12 V (PC power), or opt. ext. 24 V COM via PCI-Com-bridge, assures software Compatibility to SMC corvus and SMC corvus eco	SMC-series SMC pollux Single-axis Microstep-Controller System Stand-alone-system, or with integ. 2Ph. stepper m.. High-Resolution-Microstep Up to 16 SMC pollux can be combined... DSP Controller Type Serial Interface RS-232 19200 Baud NEW Closed-Loop 1 Vpp interface, ...

SMC-series SMC hydra CM 2 Axes Microstep-Controller System High-Resolution-Microstep 24 V bus-voltage Closed-loop with absolute encoder (multiturn) Closed-loop with incremtal encoder 1Vpp Serial Interface RS-232 460 KBaud Ethernet 10/100 MBit	SMC-series SMC hydra TT 2 Axes Microstep-Controller System High-Resolution-Microstep 24 V bus-voltage Closed-loop with absolute encoder (multiturn) Closed-loop with incremtal encoder 1Vpp Serial Interface RS-232 460 KBaud Ethernet 10/100 MBit	SMC-series SMC taurus Analog joystick-port Manual hand-wheel port SPS in/outputs Limit-switch-inputs Enable-input Potential-free emergency contacts Closed-loop (RS-422) and (1Vpp)	SMC-series SMC pegasus Analog joystick-port Manual hand-wheel port SPS in/outputs Limit-switch-inputs Enable-input Potential-free emergency contacts Closed-loop (RS-422) and (1Vpp)	SM-series SM 32 3 Axes Microstep Controller System Microsteps down to 1/64 (software configuration) PCI plug-in board with onboard microstepping p.amp. ast PCI-slot communication 36 W max. power, 1.8 A per axis 32 bit step counter Point to point, trapezoidal and 3 axis contouring

DMC-series DMC Ethernet/RS-232 Form-Factor: PCI-PC Slot & external 19" Rack Availabe in DMC PCI-eco & Accelera Availabe in DMC Ethernet/RS232 Number of Axes 1 ... 8 Closed Loop Linear interpolation Circular interpolation Contouring Independent	DeltaTau-series Geobrick / Clipper 4 or 8 axes of simultaneous control (0.1 ms update t.) 80 MHz CPU optional 240 MHz Ethernet TCP/IP, USB and RS-232 communication interf. Multitasking of up to 256 motion and 64 asynchronous.. Easy-to-use, high-level programming language Linear, circular, rapid, B-spline, Hermite-spline interp. True S-curve accel/decel for jerk-limited profiles	FlexMotion-series 734x Stepper / servo 4-axis controller (NI) Real-time CPU, onboard multitasking real-time... Closed loop control... 62 µs PID loop update rate... Quadrature encoder or analog feedback 32 digital I/O lines, 4 analog inputs / outputs High-speed position capture inputs

Controllers - Linear/Torque

SMC-series SMC hydra CM 2 Axes Microstep-Controller System High-Resolution-Microstep 24 V bus-voltage Closed-loop with absolute encoder (multiturn) Closed-loop with incremtal encoder 1Vpp Serial Interface RS-232 460 KBaud Ethernet 10/100 MBit	SMC-series SMC hydra TT 2 Axes Microstep-Controller System High-Resolution-Microstep 24 V bus-voltage Closed-loop with absolute encoder (multiturn) Closed-loop with incremtal encoder 1Vpp Serial Interface RS-232 460 KBaud Ethernet 10/100 MBit	SMC-series SMC taurus Analog joystick-port Manual hand-wheel port SPS in/outputs Limit-switch-inputs Enable-input Potential-free emergency contacts Closed-loop (RS-422) and (1Vpp)	SMC-series SMC pegasus Analog joystick-port Manual hand-wheel port SPS in/outputs Limit-switch-inputs Enable-input Potential-free emergency contacts Closed-loop (RS-422) and (1Vpp)	LMC-series LMC-100 Single axis servo control for 2 Phase brush motors 2 & 3 Phase brushless motors, linear and torque m. RS-232 interf. for 1 axis, CANopen for multi axes SimpllQ programming language onboard programming Single axis point to point RS-232 and 1Vpp feedback

DeltaTau-series Geobrick / Clipper 4 or 8 axes of simultaneous control (0.1 ms update t.) 80 MHz CPU optional 240 MHz Ethernet TCP/IP, USB and RS-232 communication interf. Multitasking of up to 256 motion and 64 asynchronous.. Easy-to-use, high-level programming language Linear, circular, rapid, B-spline, Hermite-spline interp. True S-curve accel/decel for jerk-limited profiles

Controllers - Servo

LMC-series LMC-100 Single axis servo control for 2 Phase brush motors 2 & 3 Phase brushless motors, linear and torque m. RS-232 interf. for 1 axis, CANopen for multi axes SimpllQ programming language onboard programming Single axis point to point RS-232 and 1Vpp feedback	MoCo-series MoCo DC Single-axis DC-controller system Cost effective, stand alone controller Up to 16 MoCo DC can be combined LM629 servo controller for simultaneous Position compare output (≤1 kHz) With PID filtering LabVIEWTM VIs	DMC-series DMC Ethernet/RS-232 Form-Factor: PCI-PC Slot & external 19" Rack Availabe in DMC PCI-eco & Accelera Availabe in DMC Ethernet/RS232 Number of Axes 1 ... 8 Closed Loop Linear interpolation Circular interpolation Contouring Independent	DeltaTau-series Geobrick / Clipper 4 or 8 axes of simultaneous control (0.1 ms update t.) 80 MHz CPU optional 240 MHz Ethernet TCP/IP, USB and RS-232 communication interf. Multitasking of up to 256 motion and 64 asynchronous. Easy-to-use, high-level programming language Linear, circular, rapid, B-spline, Hermite-spline interp. True S-curve accel/decel for jerk-limited profiles	FlexMotion-series 734x Stepper / servo 4-axis controller (NI) Real-time CPU, onboard multitasking real-time... Closed loop control... 62 µs PID loop update rate... Quadrature encoder or analog feedback 32 digital I/O lines, 4 analog inputs / outputs High-speed position capture inputs

Controllers - Amplifiers

		MPA Power Amplifiers DC-brush 2 A DC-brush 5 A 2SM microstep 24 V 2 A 3-Phase brushless 24 V 5 A DC brush 12 V 1 A 3-Phase linear/torque motor Piezo-Motor Driver (PMA-100)

Robotics For your better guidance on our website, we splitted the group Robotics in the following subgroups: Vacuum, Robotic 2011, SpaceFAB & Hexapod

Robotics - Vacuum

SpaceFAB SF-3000 BS HV Six axes micro robot system Compact, low profile system, ballscrew Travel ranges linear 50 x 12.7 x 100 mm Travel ranges rotation Rx, Ry, Rz 10° Load capacity 3 kg center mounted Pivot point can be set by the customer Including software, controller and amplifiers	SpaceFAB SF-3000 BS UHV Six axes micro robot system Compact, low profile system, ballscrew Travel ranges linear 50 x 12.7 x 100 mm Travel ranges rotation Rx, Ry, Rz 10° Load capacity 3 kg center mounted Pivot point can be set by the customer Including software, controller and amplifiers	Hexapod PAROS HV Six axes Parallel Robot Operating System Travel ranges linear 200 x 200 x 80 mm Travel ranges rotation Rx, Ry 30°, Rz 60° Maximum speed 30 mm/sec (leg speed) Repeatability in space ±30 µm High stiffness Including software, controller and amplifiers

Robotics - Robotic 2011

Hexapod HP-550 Six axes Parallel Kinematic System Travel ranges linear ( XYZ ) 100x100x100 mm Travel ranges rotation Rx, Ry 40°, Rz 60° Maximum speed 1 mm/sec High stiffness Random Definition of the Pivot Point Load capacity central ( vertical / Fz ) 50 kg	Hexapod HP-140 Six axes Parallel Kinematic System Travel ranges linear 32 x 32 x 12 mm Travel ranges rotation Rx, Ry 12°, Rz 20° Maximum speed 1 mm/sec Pivot Point can be set by the customer User friendly software Load capacity central ( Fx; Fy ) 2kg / ( Fz ) 5 kg

Robotics - SpaceFAB

SpaceFAB SF-3000 BS Six axes micro robot system Compact, low profile system, ballscrew Travel ranges linear 50 x 12.7 x 100 mm Travel ranges rotation Rx, Ry, Rz 10° Load capacity 3 kg center mounted Pivot point can be set by the customer Including software, controller and amplifiers	SpaceFAB SF-3000 LS Six axes micro robot system Compact, low profile system, ballscrew Travel ranges linear 50 x 12.7 x 50 mm Travel ranges rotation Rx, Ry, Rz 10° Load capacity 1 kg center mounted Pivot point can be set by the customer Including software, controller and amplifiers	SpaceFAB SF-2500 LS SpaceFAB System with controller and software Adj. Range: 5x5x3.5mm, +/- 5° each Calculated Resolution: 0.5µm and 10µm Load 0.3kg Option: vacuum, other dimensions will be available in 10-2009

Robotics - Hexapod

Hexapod PAROS Six axes Parallel Robot Operating System Travel ranges linear 200 x 200 x 80 mm Travel ranges rotation Rx, Ry 30°, Rz 60° Maximum speed 30 mm/sec (leg speed) Repeatability in space ±30 µm High stiffness Including software, controller and amplifiers	Hexapod HP-550 Six axes Parallel Kinematic System Travel ranges linear ( XYZ ) 100x100x100 mm Travel ranges rotation Rx, Ry 40°, Rz 60° Maximum speed 1 mm/sec High stiffness Random Definition of the Pivot Point Load capacity central ( vertical / Fz ) 50 kg	Hexapod HP-430 Six axes Parallel Robot Operating System Travel ranges linear 50x50x30 mm Travel ranges rotation Rx, Ry 20°, Rz 40° Maximum speed 30 mm/sec (legspeed) Repeatability inspace ±5 µm High stiffness High dynamic

Hexapod HP-300 Hexapod system with controller and software Adj. Range: 30x30x15mm, 20° each Calculated Resolutuion: 1µm and 10µm Load 5kg Option: vacuum, cleanroom	Hexapod HP-140 Six axes Parallel Kinematic System Travel ranges linear 32 x 32 x 12 mm Travel ranges rotation Rx, Ry 12°, Rz 20° Maximum speed 1 mm/sec Pivot Point can be set by the customer User friendly software Load capacity central ( Fx; Fy ) 2kg / ( Fz ) 5 kg

Linear Stages For your better guidance on our website, we splitted the group Linear Stages in the following subgroups. Vacuum, Ultra, Direct, Precision, Eco, Micro, Lift, Pusher, Scan
Linear Stages - Vacuum

		UHV Reference Model PLS-85 Travel range up to 155 mm (6") Uni-directional repeatability down to ± 0.05 µm Maximum speed 8 [15] mm/sec Maximum speed 4 mm/sec [UHV - no lubrication] Load capacity up to 6 [7] kg Limit & Reference switches in ceramic-gold [UHV] Limit & Reference switches in platic [HV] Optionally Optical Linear Encoder vacuum type Accessories D-type Connectors & Feedthroughs

Linear Stages - Lift

Nano Precision Elevation Stage NPE-200 Travel range 13 mm (1/2") Uni-directional repeatability down to ± 0.025 µm Maximum speed 0.2 mm/sec Load capacity up to 30 kg Integrated limit switches Integrated linear scale (center mounted)	Ultra Precision Lifting Stage UPL-160 Travel range 26 mm (1") Uni-directional repeatability down to ± 0.02 µm Maximum speed 30 mm/se Load capacity up to 30 kg Integrated limit switches Integrated linear scale (center mounted)	Ultra Precision Elevation Stage UPL-120 Travel range 13 mm (1/2") Uni-directional repeatability down to 0.05 µm Maximum speed 6 mm/sec Load capacity up to 15 kg Integrated optical limit switches Option: linear scale (center mounted)	Elevation Stage ES-100 Travel range up to 26 mm (1") Uni-directional repeatability down to ± 0.05 µm Maximum speed 20 mm/sec Load capacity up to 5.5 kg Integrated limit switches Optionally: linear scale (center mounted) Higher load on request	Elevation Stage ES-82 Travel range 13 mm (1/2") Uni-directional repeatability down to ± 0.05 µm Maximum speed 0.1 mm/sec Load capacity up to 2 kg Integrated limit switches Optionally: linear scale

Elevation Stage ES-70 Travel range 6.25 mm (1/4") Bi-directional repeatability down to ± 1 µm Maximum speed 0.1 mm/sec Load capacity up to 2 kg Integrated limit switches	Elevation Stage ES-65 Travel range 26 mm (1") Uni-directional repeatability down to ± 2 µm Maximum speed 20 mm/sec Load capacity up to 2 kg Integrated limit switches Ball bearings	Elevation Stage ES-50 Travel range 10 mm Uni-directional repeatability down to 0.1 µm Maximum speed 5 mm/sec Load capacity up to 1 kg Integrated limit switches Optionally: linear scale Other resolutions and accuracies avail. up. request	Elevation Piezo Stage EPS-30 Travel range up to 13 mm (1/2") Uni-directional repeatability down to ± 0.05 µm Maximum speed 1 mm/sec Load capacity up to 0.15 kg Integrated linear scale(center mounted) Piezo inertia drive Encoder resolution up to 5 nm Holding force 1.5 N

Linear Stages - Pusher

Micro Actuator MA-35 Travel range 52 mm (2") Uni-directional repeatability down to ± 0.5 µm Maximum speed 100 mm/sec Force max. 200 N Integrated limit switches High resolution	Micro Pusher MP-20 B Travel range up to 76 mm (3") Uni directional repeatability down to 0.3 µm Max. speed 10 mm/sec Force 125 N Integrated limit switches (hall)	Micro Pusher MP-20 Micro puscher with 2phase stepper- or dc motor Travel range: 13, 26, 52 or 76mm Resolution 100nm and speed max. 15mm/s Force: max. 120 N Integrated limit switches High resolution Options: vacuum up to 10-9mbar and other materials	Micro Pusher MP-20 L Travel range up to 75 mm Uni-directional repeatability down to ± 0.5 µm Maximum speed 3.5 mm/sec Force max. 125 N Integrated limit switches High resolution Including both inserts MP-B & MP-F	Micro Pusher MP-20 S Travel range 12.5 mm Uni-directional repeatability down to ± 1 µm Maximum speed 3 mm/sec Force max. 20 N Integrated limit switches High resolution

Micro Pusher MP-21 Travel range up to 25 mm Uni-directional repeatability down to ± 0.2 µm Force max. 40 N Integrated limit switch Other resolutions and travel lengths available upon request	Micro Pusher MP-15 Travel range up to 12.7 mm Uni-directional repeatability down to ± 2 µm Maximum speed 0.16 mm/sec Force max. 10 N Integrated limit switches a choice of different interfaces like M6

Linear Stages - Scan

Cross Stage CS-430 Travel range 350x300 mm Uni-directional repeatability down to ± 0.1 µm Maximum speed 100 mm/sec Load capacity up to 30 kg Integrated limit switches Optionally: linear scale (center mounted)	Scan Table MS-8 Travel range 205 mm (8") x 205 mm (8") Uni-directional repeatability down to ± 0.25 µm Maximum speed 60 mm/sec Load capacity up to 4 kg Integrated limit switches Optionally: linear scale Clear aperture 205 x 205 mm	Scan Table MS-4 Travel range 102 mm (4") x 76 mm (3") Uni-directional repeatability down to ± 0.25 µm Maximum speed 90 mm/sec Load capacity up to 3 kg Integrated limit switches Optionally: linear scale Clear aperture 100 mm	Scan Table KT-120 Travel range 26 mm (1") x 26 mm (1") Uni-directional repeatability down to ± 2 µm Maximum speed 3.5 mm/sec Load capacity up to 5 kg Integrated limit switches Clear aperture 45 mm	Microscope Stage MS-bio Absolute Positioning in XY with linear motor Travel range: 80x55 mm Resolution < 50 nm with repeatability <1 µm Sped max. up to 1000 mm/s with 10 m/s2 Ultracompact design incl. absolute scale & controller The following is included: MS-bio, Controller, Manual and Software

Rotation Stages

Ultra Precision Rotation Stage UPR-270 AIR Torque Motor Uni-directional repeatability down to 0.00003 ° Maximum speed 360 °/sec Load capacity up to 40 kg Integrated reference switches Integrated angular scale High precision air bearings Free center hole 35 mm diameter Eccentricity ± 0.07 µm Wobble ± 1.25 µrad Option: Clean room	Ultra Precision Rotation Stage UPR-270 Torque Motor Uni-directional repeatability down to 0.00007 ° Maximum speed 360 °/sec Load capacity up to 40 kg Integrated reference switches Integrated angular scale High-precision ball bearings Free center hole 60 mm diameter	Ultra Precision Rotation Stage UPR-160 AIR Torque Motor Uni-directional repeatability down to 0.00005 ° Maximum speed 360 °/sec Load capacity up to 20 kg Integrated reference switches Integrated angular scale High precision air bearings Free center hole 35 mm diameter Flatness & eccentricity ± 0.1µm Wobble ± 1.25 µrad Option: Clean room	Ultra Precision Rotation Stage UPR-160 Torque Motor Uni-directional repeatability down to 0.00008 ° Maximum speed 360 °/sec Load capacity up to 20 kg Integrated reference switches Integrated angular scale Free center hole 35 mm High-precision ball bearings	Ultra Precision Rotation St. UPR-120 AIR High-precision air bearings Torque motor Uni-directional repeatability down to 0.00005 ° Flatness & eccentricity ± 0.1μm Wobble ± 1.25 μrad Maximum speed 360 °/sec Load capacity up to 20 kg (center mounted, on top) Integrated optical reference switch Free center hole 35 mm diameter Integrated angular scale

Ultra Precision Rotation Stage UPR-120 High-precision bearings Torque motor Uni-directional repeatability down to 0.00008 ° Flatness & eccentricity ± 3 μm Wobble ± 25 μrad Maximum speed 360 °/sec Load capacity up to 20 kg (center mounted, on top) Integrated optical reference switch Free center hole 35 mm diameter Integrated angular scale	Ultra Precision Rotation Stage UPR-100 AIR Torque Motor Uni-directional repeatability down to 0.00005 ° Maximum speed 360 °/sec Load capacity up to 1.5 kg Integrated reference switches Integrated angular scale High precision air bearings Free center hole 8 mm diameter Flatness & eccentricity ± 0.2 µm Wobble ± 5 µrad Option: Clean room	Ultra Precision Rotation Stage UPR-100 Torque Motor Uni-directional repeatability down to 0.00008 ° Maximum speed 360 °/sec Load capacity up to 2 kg Integrated reference switches Integrated angular scale Free center hole 20 mm diameter	Torque Rotation Stage TRS-65 Torque Motor Travel range 45° Uni-directional repeatability down to 0.00025 ° Maximum speed 360 °/sec Load capacity up to 0.5 kg Integrated limit switches Integrated angular scale	Precision Rotation Stage PRS-200 Uni-directional repeatability down to ± 7.627E-5° Maximum speed 150 °/sec Load capacity up to 50 kg Integrated reference switches Optionally: angular scale Clear aperture 120 mm Preloaded worm drive for zero backlash

Precision Rotation Stage PRS-110 Uni-directional repeatability down to ± 0.0002° Maximum speed 200 °/sec Load capacity up to 10 kg Integrated reference switches Optionally: angular scale Clear aperture 35 mm Preloaded worm drive for zero backlash	Rotation Stage DT-65 N Uni-directional repeatability down to ± 0.002° Maximum speed 60 °/sec Load capacity up to 3 kg Integrated reference switch Clear aperture 25 mm Preloaded worm drive for zero backlash	Rotation Stage RS-40 Uni-directional repeatability down to ± 0.005° Maximum speed 7°/sec Load capacity up to 2 kg Integrated reference switch Clear aperture 20 mm Worm gear drive Precise, smooth continuous 360° motion	Rotation Stage DT-80 Uni-directional repeatability down to ± 0.01° Maximum speed 45°/sec Load capacity up to 2 kg Integrated reference switch Clear aperture 40 mm Travel range 360°, endless	Rotation Stage DT-80 R Uni-directional repeatability down to ± 0.01° Maximum speed 1100 °/sec Load capacity up to 2 kg Integrated reference switches Clear aperture 40 mm Travel range 360°, endless

Rotation Stage DT-50 Uni-directional repeatability down to ± 0.015° Maximum speed 4000 °/sec Load capacity up to 1 kg Integrated reference switch Clear aperture 20 mm Travel Range 360°, endless	Rotation Stage DT-34 Maximum speed 24 °/sec load capacity up to 0.4 kg Integrated reference switch Clear aperture 12.7 mm Rotation Range 360°, endless With thread mount 1/2 inch UNC Compact design	Rotation Stage Pollux RSP-200 Uni-directional repeatability down to ± 0.05° Maximum speed 1440°/sec Load capacity up to 2 kg Integrated reference switches Single-axis microst. motor & controller combination Stand-alone system with integ. 2-phase stepper m. Serial Interface RS-232 19200 Baud 24 VDC power supply and RS-232 cable included	Goniometer WT-120 Uni-directional repeatability down to ± 0.0002174° Maximum speed 60°/sec Load capacity up to 20 kg Integrated limit switches Optionally: angular scale Hardened worm gear drive Precise, smooth continuous 90° motion	Goniometer WT-90 Uni-directional repeatability down to ± 0.0005° Maximum speed 30 °/sec Load capacity up to 8 kg Integrated limit switches Optionally: angular scale Hardened worm gear drive Precise, smooth continuous 90° motion Together with WT-120 one centre of rotation

Goniometer WT-100 Uni-directional repeatability down to ± 8.72E-5° Maximum speed 15 °/sec Load capacity up to 2 kg Integrated limit switches Optionally: angular scale Clear aperture 60 x 25 mm Precise, smooth continuous 10° motion	Goniometer WT-85 Uni-directional repeatability down to ± 0.0001208° Maximum speed 15 °/sec Load capacity up to 2 kg Integrated limit switches Optionally: angular scale Clear aperture 30 mm Precise, smooth continuous 10° motion Together with WT-100 one centre of rotation	Tip-Tilt Stage TT-65 tow axis tilt stages clear aperture flywheels supported without backlash Integrated limit switches	Filter Wheel AFW-65 Maximum speed 360°/sec. Integrated reference switches up to 6 filters Clear aperture 25 mm

Piezo Stages

Linear Piezo Stage LPS-65 Piezo driven inertia motor Travel range up to 52 mm (2") Uni-directional repeatability down to 0.025 µm Maximum speed 10 mm/sec Load capacity up to 1 kg Encoder resolution 5 nm Integrated linear scale	Linear Piezo Stage LPS-35 Travel range up to 38 mm (1 1/2") Uni-directional repeatability down to ± 0.05 µm Maximum speed 2 mm/sec Load capacity up to 0.8 kg Optionally: linear scale Piezo driven inertia motor Encoder resolution 5 nm Holding force 4 N	Piezo Positioners PP-30 Travel range up to 30 mm Uni-directional repeatability down to ± 0.05 µm Maximum speed 2 mm/sec Load capacity up to 1 kg Optionally: linear scale Piezo driven step motor, no hysteresis Holding force 4 N	Piezo Positioner PP-20 Travel range of up to 11 mm Load capacity up to 1 kg 1 nm resolution Steel ball bearing Low profile, 7 mm stage height Vacuum versions available	Piezo Positioner PP-22 Travel range of up to 12 mm Load capacity up to 1 kg Low profile, 10 mm stage height Two steel ball bearings Available with a linear encoder down to 5 nm resolution (1.2 nm upon request) Vacuum versions available

Piezo Positioner Cross Stage PPX-32 Travel range of 18 mm x 18 mm Load capacity up to 1 kg Low profile, 14 mm stage height Steel ball bearings Available with linear encoders down to 5 nm resolution Vacuum versions available	Precision Piezo Stage PPS-20 Travel range of up to 51 mm 1 nm resolution Load capacity up to 2 kg Steel cross-roller bearing Low profile, 13 mm stage height Vacuum, cryo and non-magnetic versions available	Precision Piezo Stage PPS-28 Travel range of up to 102 mm 1 nm resolution Load capacity up to 5 kg Steel cross-roller bearing Low profile, 15 mm stage height Vacuum, cryo and non-magnetic versions available	Piezo Rotation Stage PR-32 Continuous 360° motion Load capacity up to 1kg Steel ball bearings Vacuum versions available	Linear Piezo Stage LPS-30 Travel range up to 13 mm (1/2") Uni-directional repeatability down to ± 0.05 µm Maximum speed 2 mm/sec Load capacity up to 0.8 kg Integrated linear scale Piezo driven inertia motor Encoder resolution 5 nm Holding force 4 N

Rotation Stage DT-50 Travel range up to 13 mm (1/2") Uni-directional repeatability down to ± 0.05 µm Load capacity up to 0.15 kg Integrated linear scale (center mounted) Piezo inertia drive Encoder resolution up to 5 nm Holding force 1.5 N

Manual Stages

Linear Stage APT-65 Travel range 25 mm Load capacity 30 kg Dove tail slide Module combination	Linear Stage AVT-65 Travel range 5 mm 30 mm clear aperture Dove tail slide Module combination	Cross Stage AKT-65 Travel Range 5 mm XY Load capacity 4 kg Dove tail slide 30 mm clear aperture Module combination	Linear Stage APT-38 Travel range 5 mm Clear aperture 30 mm Center load capacity 5 kg Dove tail slide Module combination	Cross Stage AKT-120 Travel Range 25 mm XY Load capacity 4 kg Cross-roller-bearings 45 mm clear aperture Micrometer screw

Elevation Stage AHT-65 Travel Range 25 mm 25 mm clear aperture Load capacity 3 kg Linear ball-bearings Module combination	Linear Stage AMT-120 Travel range up to 50 mm Clear aperture 56 mm Center load capacity 20 kg Crossed-roller bearings Special, tempered Aluminium	Linear Stage AMT-65 C Travel range 25 mm Load capacity 16 kg Crossed-roller bearings Module combination	Linear Stage AMT-65 S Travel range 25 mm Load capacity 16 kg Crossed-roller bearings Module combination	Linear Stage AVT-54 Travel range 25 mm Load capacity 1 kg Ball guided system Micrometer pitch, 0.5 mm Module combination

Rotation Stage ADT-65 Clear aperture 25 mm Preloaded worm drive for zero-backlash High precision four point-bearings Precise, smooth continuous 360° motion, endless Load up to 3 kg Module combination	Rotation Stage ADT-80 EcoLine in lightweight construction Clear aperture 40 mm Travel range 360°, endless Double row ball bearings Load up to 1 kg Module combination

MAC PhotonX

Albatros® Up to now the use of optomechanical construction systems for optics and laser technology is necessary in the labs of scientists and engineers for research and development. The Albatros® system with an optical height of 65 mm is designed to support and simplify the layout of optical systems and laser systems in scientific labs and industry. The precise and handy components of this system are established in many labs around the world since 1991. The easy use and the adaptability of the Albatros® components even to other systems explains the constant success in the market.	Moskito® The industry is forced to shrinkt heir products to dimensions where conventional equipment reaches its limits. Consequently PI miCos decided to offer a miniaturized optomechanical system with all necessary components to support the scientists and engineers in their work. The optical height of 1" (25.4 mm) and useful high precision components make small system layouts in short time schedules and affordable prices possible.	Campus® The use of lasers in a variety of research fields, industry, medicine and finally in many products of daily life demands a qualified education and training of students in laser technology from uni versitie s, technical high schools and vocational schools. These institutions are addressed by PI miCos, the series of educational laser kits from PI miCos developed to support and improve practical laser training. Within this product line 7 laser training systems of the topics optics fundament als, laser basics , laser metrology, fiber optics and telecommunications, laser material processing, and laser applications are presented. Besides these products PI miCos offers support for elaboration of suited curriculums for laser courses, design of the laboratories and advice in equipment selection with concepts for complete laser training facilities. Last but not least, training courses for all experimental systems are held at ’ place as well as at your site.

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