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Actuators
Aerotech's linear actuators are faster than a ball
screw and more accurate than a belt drive. The LMA and LMAC series linear
actuators harness the speed, acceleration, and accuracy capability of a
linear motor for the latest in high-throughput linear actuator technology.
These linear actuators are ideal for pick-and-place machines, gantry axes,
shuttle stages, assembly machines, or as a general-purpose positioner,
wherever you might need a linear actuator.
Since the LMA and LMAC series linear actuators integrate the mechanical and
electrical components, they eliminate the guesswork involved with choosing
bearings, motors, encoders, and the other components required for a linear
motor system.
This makes the LMA and LMAC series linear actuators superior to the
traditional linear actuators on the market.
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LMA and LMAC Linear Actuators
Travel: ≤1000 mm
Resolution: 10 nm-1.0µm
Speed: 5 m/s
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Air Bearing Stages
Aerotech air bearing tables incorporate over three
decades of knowledge we have in designing high precision motion control and
positioning systems.
Driven by our brushless linear servomotors, Aerotech air bearings are
perfect in semiconductor equipment, fiberoptics, photonics, and other
critical industrial automation applications. Our air bearings incorporate an
active preload on both vertical and horizontal surfaces.
Opposing thin-film pressure maintains the bearing nominal gap tolerance.
This design, in addition to the large air bearing surface that distributes
the load over a large surface area, results in outstanding stiffness that is
ideal for heavy or offset loading. Proprietary manufacturing techniques
result in an air bearing with unsurpassed geometrical characteristics.
The air bearing has an inherent averaging effect that maximizes performance.
The thin film will fill small surface voids and other irregularities,
yielding superior pitch, roll, yaw, and straightness and flatness
specifications.
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Linear Air-Bearing Stages
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ABL1000 Air Bearing Stage
Travel: ≤150 mm
Accuracy: ±0.20 µm
Repeatability: ±0.05 µm
Straightness: ±0.25 µm
Flatness: ±0.25 µm
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ABL1500 Air Bearing Stage
Travel: ≤500 mm
Accuracy: ±0.2 µm
Repeatability: ±0.1 µm
Straightness: ±0.25 µm
Flatness: ±0.25 µm
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ABL1500WB Air Bearing Stage
Travel: ≤500 mm
Accuracy: ±0.4 µm
Repeatability: ±0.1 µm
Straightness: ±0.5 µm
Flatness: ±0.5 µm
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ABL2000 Air
Bearing Stage
Travel: ≤1200 mm
Accuracy: ±0.50 µm
Repeatability: ±0.20 µm
Straightness: ±0.25 µm
Flatness: ±0.25 µm
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ABL3600 Air Bearing Stage
Travel: ≤250 mm
Accuracy: ±1 µm
Repeatability: ±0.2 µm
Straightness: ±0.5 µm
Flatness: ±1 µm
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ABL3600 Air Bearing Stage
Travel: ≤1000 mm
Accuracy: ±0.50 µm
Repeatability: ±0.20 µm
Straightness: ±0.40µm
Flatness: ±0.40µm
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ABL9000 Air Bearing Stage
Travel: ≤1200 mm
Accuracy: ±0.5 µm
Repeatability: ±0.1 µm
Straightness: ±0.50µm
Flatness: ±0.50µm
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AHL9000 Air Bearing Stage
Travel: ≤350 mm
Accuracy: ± 1.0 µm
Repeatability: ±0.2 µm
Straightness: ±0.6 µm
Flatness: ±0.6 µm
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ABG10000 Air Bearing Gantry
Travel: ≤1000 mm
Accuracy: ± 2 µm
Repeatability: ±0.5 µm
Straightness: ±1 µm
Flatness: ±1 µm
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Rotary Air-Bearing Stages
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PlanarHD Air Bearing Stage
Travel: 500 mm
Accuracy: ±300 nm
Repeatability: ±50 nm
Resolution: 0.25 nm
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ABRS Rotary Air Bearing Stage
Tabletop Diameter:
128.1-278.1 mm
Resolution:
0.18-0.036 arc sec
Bidirectional Repeatability:
<1 arc sec
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ABRT Rotary Air Bearing Stage
Tabletop Diameter:
100-200 mm
Resolution:
0.055-0.027 arc sec
Bidirectional Repeatability:
<1 arc sec
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Vertical Lift Air-Bearing Stages
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Airlift 115 Vertical Translation Stage
Travel: 50, 100, 150 mm
Velocity: 50 mm/s
Load: 15 kg
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ABL1500Z Air Bearing, Linear Motor Vertical Lift Stage
Travel: 50, 100, 150, 200 mm
Velocity: 300 mm/s
Load: 15 kg
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Amplifiers
Aerotech manufactures drives for a wide range of
industrial automation applications.
Our drives power our own servomotors and complement Aerotech motion
controllers in applications as diverse as industrial robots, vision systems,
assembly machines, machine tools, semiconductor manufacturing equipment,
electronic manufacturing, and in a variety of other industrial control
solutions.
Aerotech drives, controllers, and linear and rotary servomotors are
perfectly matched to provide the ideal solution to your motion control
application.
Aerotech drives are available in PWM and linear output, with from 10 to 150
amps peak current.
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Automation 3200 (A3200) Amplifiers (Used Exclusively with
the Automation 3200 Motion Control Platform)
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Ndrive® HPe Digital Servo Amplifier
Continuous Current:
5-75 amps
Peak Current:
10-150 amps
Bus Voltage:
10-320 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Ndrive® CP Amplifier
Continuous Current:
5-10 amps
Peak Current:
10-30 amps
Bus Voltage:
10-320 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Ndrive® MP Digital Servo Amplifier
Continuous Current
5 amps
Peak Current
10 amps
Bus Voltage
10-80 VDC
Output
PWM
Motor Style
Brush, Brushless, Stepper
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Ndrive® HLe Digital Servo Amplifier
Continuous Current
5-10 amps
Peak Current
10-20 amps
Bus Voltage
±40 or ±80 VDC
Output
Linear
Motor Style
Brush, Brushless, Stepper, Voice Coil
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Ndrive® CL Digital Servo Amplifier
Continuous Current
5 amps
Peak Current
10 amps
Bus Voltage
±40 VDC
Output
Linear
Motor Style
Brush, Brushless, Stepper, Voice Coil
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Ndrive® ML Digital Servo Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
±40 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Ensemble Controllers/Amplifiers (Used Exclusively with
the Ensemble Motion Control Platform)
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Ensemble HPe Controller & Amplifier
Continuous Current:
5-75 amps
Peak Current:
10-150 amps
Bus Voltage:
10-320 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Ensemble CP Controller & Amplifier
Continuous Current:
5-10 amps
Peak Current:
10-30 amps
Bus Voltage:
10-320 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Ensemble MP Controller & Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
10-80 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Ensemble HLe Controller & Amplifier
Continuous Current:
5-10 amps
Peak Current:
10-20 amps
Bus Voltage:
±40 or ±80 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Ensemble CL Controller & Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
±40 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Ensemble ML Controller & Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
±40 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Soloist Controllers/Amplifiers (Used Exclusively with the
Soloist Motion Control Platform)
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Soloist HPe Controller & Amplifier
Continuous Current:
5-75 amps
Peak Current:
10-150 amps
Bus Voltage:
10-320 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Soloist CP Controller & Amplifier
Continuous Current:
5-10 amps
Peak Current:
10-30 amps
Bus Voltage:
10-320 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Soloist MP Controller & Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
10-80 VDC
Output:
PWM
Motor Style:
Brush, Brushless, Stepper
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Soloist HLe Controller & Amplifier
Continuous Current:
5-10 amps
Peak Current:
10-20 amps
Bus Voltage:
±40 or ±80 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Soloist CL Controller & Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
±40 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Soloist ML Controller & Amplifier
Continuous Current:
5 amps
Peak Current:
10 amps
Bus Voltage:
±40 VDC
Output:
Linear
Motor Style:
Brush, Brushless, Stepper, Voice Coil
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Amplifiers (for use with any motion controller)
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BA Series Amplifier
Continuous Current:
5-50 amps
Peak Current:
10-100 amps
DC Bus Voltage:
40-320
Output:
PWM
Motor Style:
Brush, Brushless
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BL Series Amplifier
Continuous Current:
5-10 amps
Peak Current:
10-20 amps
DC Bus Voltage:
±40-80
Output:
Linear
Motor Style:
Brush, Brushless
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Drive Racks
Aerotech’s family of drive rack systems can be
configured with up to 6 amplifiers in any combination of brushless, brush,
or stepper control.
All drive racks have integral circuit breaker switches for over-current
protection and convenient power disconnect.
Drive rack options include shunt regulators, brake control, and E-Stop
circuitry. Custom drive racks can be designed.
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Npaq Rack Mount Servo Amplifier
Continuous Current:
5 - 15 Amps
Peak Current:
10 - 30 Amps
DC Bus:
10 - 320 VDC
Output:
PWM, Linear
Motor Style:
Brush, Brushless, Stepper
Number of Axes: 6
Controller Capatibility:
Automation 320
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Ensemble Epaq
Continuous Current:
5 Amps
Peak Current:
10 Amps
DC Bus: 24 - 90 VDC
Output: PWM, Linear
Motor Style:
Brush, Brushless, Stepper
Number of Axes: 6
Controller Capatibility: Ensemble
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Gantry Systems
Aerotech gantry systems use our own brushless linear
servomotors to meet the needs of a variety of gantry customers, from
electronic assembly and electronic manufacturing to vision systems and
industrial automation.
These industrial robots are available in models from low-cost modular linear
actuators assembled in a gantry configuration with matching motion control
and drives, to sophisticated gantry models with the largest travel, highest
speed, and highest acceleration available.
Aerotech has over 30 years of experience in brushless linear motor design,
motion controllers, and drives that permit us to offer a complete gantry
solution that perfectly fits your gantry application.
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Cartesius Cartesian Gantry
Travel: 300 mm - 1500 mm
Velocity:
300 mm/s - 1400 mm/s
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AGS1000 Cartesian Gantry
Travel: ≤500 mm
Accuracy: ±5.0 µm (±200 µin)
Load: 15 kg (33 lb)
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AGS1500 Linear Motor Gantry
Travel: ≤500 mm
Accuracy: ±1.0 µm
Load: 15 kg
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AGS10000 Cartesian Gantry
Travel: ≤1000 mm
Accuracy: ±5.0 µm
Load: 25 kg (55.1 lb.)
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AGS15000 Linear Motor Gantry
Travel: 500 mm - 1250 mm
Accuracy: ±1.5 µm
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ABG10000 Air Bearing Gantry
Travel: ≤1000 mm
Accuracy: ± 2 µm
Load: 84 kg
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Goniometers
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ANT-20G Series Direct-Drive Goniometers
Max Travel: 20 degrees
Accuracy: ±30 µrad
Speed: 150 degrees per second
Load: 3.5 kg
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AGC Series Goniometers
Travel: ±45 degrees
Resolution: 3 arc second
Speed: 78 degrees/s
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ALAG Series Goniometers
Travel: ±5 degrees
Resolution:
0.0045 arc-second/count
Speed: 5 degrees/s
Load: 1500 lb (680 kg)
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Photonics and Fiberoptics Nanopositioners
Aerotech photonics and fiberoptics nanopositioners are
perfect for the high-volume manufacture of photonics and fiberoptics
components and systems.
Our fiberoptics positioning systems utilize Aerotech’s own brushless linear
servomotors for the maximum performance in the most compact package.
We manufacture many models of drives and motion controllers to provide a
complete fiberoptics and photonics manufacturing package
that is virtually maintenance-free and available for 24/7 operation.
Aerotech nanopositioners feature the highest closed-loop resolution
available with up to six axes of coordinated motion.
Following is a list of our fiberoptics and photonics nanopositioners.
With efficient automation in mind, our fiberoptics equipment combines
durability and the latest technology to create nanopositioners that fit
seamlessly into manufacturing systems and endure nonstop use.
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FiberMax Systems
Aerotech’s FiberMaxTM represents a significant
breakthrough in the high-volume manufacturing and testing of fiberoptics
components.
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FiberAlign 90/130 Fiberoptics Aligning System
Aerotech’s FiberAlign series is a high-performance
fiberoptics aligning system incorporating best-in-class drive and
state-of-the-art axis control technology.
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FiberAlign 130US Fiberoptics System
In addition to the performance features of the standard
FA130 fiberoptics system, the Ultra-Stable version is manufactured from low
coefficient of thermal expansion materials to provide unparalleled thermal
stability in the manufacturing and test environment.
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FiberGlide 3D Fiberoptics Positioner
The FiberGlide 3D series of fiberoptics positioners
represents the highest performance miniature three axis air-bearing stages
available.
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ABL1000 Linear Air Bearing Fiberoptics Positioner
The linear fiberoptics positioner is a fully preloaded,
noncontact design. Inherently frictionless, air bearings have proven to be
the standard in precision applications, and Aerotech has now produced a
miniature version that is well-suited for the fiberoptics industry.
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FiberCouple 130
Aerotech’s FiberCouple 130 is the first system designed
to meet the unique demands associated with fiber coupling.
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FiberGrate 2000 Fiberoptics Subsystem
FiberGrate is the world’s first complete turnkey motion
fiberoptics sub-system specifically designed for the manufacture of fiber
Bragg gratings. A flexible workspace allows the system to be optimized for
the unique needs of each manufacturer.
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ANT-4V Vertical Alignment Stage
The ANT-4V represents a significant breakthrough in
vertical alignment of high-precision components. This unique, patented
device incorporates the best high-performance features: high speed (50 mm
per second), high resolution (2 nm), superior in-position stability (4 nm),
and high accuracy (200 nm), in one compact package.
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ANT-20RA Rotary Actuator
Aerotech’s ANT-20RA is a high-performance rotary actuator
specifically designed to be attached to ANT, FiberAlign 90 and 130 series
nano-positioners.
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ANT-20G-50/-90/-110/-160
Aerotech’s ANT-20G goniometers represent a significant
fiberoptics breakthrough in the category of high-accuracy angular alignment
of optical components. The ANT-20G series provides an industry-leading
positioning speed of 150 degrees per second.
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Semiconductor Industry Tool Components
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SolarScribe
Travel: 500
- 2500 mm
Max Acceleration: 5 g
Orthogonality: 5 arc sec
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MaskAlign
Travel: 100 mm
Accuracy: 1 micron
Load: 2 kg
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WaferMax T
Diameter: 106.7 mm
Accuracy: ±5 arc sec
Load: 40 kg
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WaferMax Z
Travel: 5 mm
Velocity: 4 mm/s
Load: 15 kg
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AVL1000 Verticle Lift Stage
Travel: 2 mm
Velocity: 5 mm/s
Load: 50 kg
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ARA1000 Rotary Actuator
Diameter: 342.9 mm
Accuracy: ±2 arc sec
Load: 45 kg
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Wafer Chucks
To simplify system development and reduce costs, Aerotech
manufactures and integrates high precision, custom engineered chucks. Custom
designs include those for 200, 300, and 450 mm wafers, as well as reticles
and flat-panel displays.
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Laser and Medical Systems
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VascuLathe ACS/ASR
VascuLathe® represents a revolutionary approach to
satisfying the demanding requirements of stent manufacturing applications.
The fully integrated motion system couples automated material handling
functionality and wet cutting operation with high performance direct-drive
linear and rotary motion capability.
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LaserTurn 2 and 5
The LaserTurn® series of products are the first dedicated
motion subsystems targeted directly at cylindrical laser processing
applications. The integrated linear-rotary system combines automated
material handling functionality and wet cutting operation with high
performance direct-drive linear and rotary motion. The
pneumatically-actuated 3-jaw gripper has a clear aperture for product
feedthrough, and can be configured for O.D., I.D., or odd form gripping with
various jaw geometries, while the ER collet supports tubing diameters from
0.5 mm to 30 mm.
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LaserTurn 1
The LaserTurn® 1 cylindrical laser machining system
supports material from 0.1 mm to 7.9 mm in diameter, making it an ideal
platform for the manufacture of cardiovascular and neural stents. The system
can be configured for wet or dry cutting and includes options for material
advance and bushing alignment platforms.
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HermeSys
The HermeSys™ is a holistic design that optimizes all
aspects of the medical device hermetic seam welding process. Specialized
mechanics are used to accurately position the device during the laser
welding process, while onboard kinematics allows the programming of laser
weld geometry in part space for rapid optimization of process parameters on
the machine, with no post-processing required.
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Vertical Lift Stages
Aerotech lift stages are available with direct drive
or lead-screw-based mechanics to provide the ideal solution for your
application. These stages feature resolution to 2 nm and travels up to 25
mm, with compact footprints, and are designed for a wide range of
positioning applications.
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ANT-95-3-V Series Vertical Lift Stage
Travel: 3 mm
Velocity: 75 mm/s
Load: 1.5 kg
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ANT-130-5-V Series Vertical Lift Stage
Travel: 5 mm
Velocity: 75 mm/s
Load: 3.0 kg
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ANT-4V Vertical Lift Stage
Travel: 4 mm
Velocity: 50 mm/s
Load: 2 kg
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AVL125 Vertical Lift Stage
Travel: 25 mm
Velocity: 100 mm/s
Load: 7 kg
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AVL1000 Vertical Lift Stage
Travel: 2 mm
Velocity: 5 mm/s
Load: 50 kg
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WaferMax Z Vertical Lift Stage
Travel: 5 mm
Velocity: 4 mm/s
Load: 10 kg
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AVS1000 Vertical Lift Stage
Travel: 5 mm or 10 mm
Velocity: 20 mm/s
Load: 135 kg
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AVS100/AVSI100 Vertical Lift Stage
Travel: 6, 13, 25 mm
Velocity: 50 mm/s
Load: 25 kg
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ANT95-L-Z Linear Motor Vertical Stage
Max Travel: 50 mm
Accuracy: ±300 nm
Load: 5.0 kg
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ANT130-L-Z Linear Motor Vertical Stage
Max Travel: 60 mm
Repeatability: ±300 nm
Load: 10 kg
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ABL1500Z Air-Bearing Vertical Translation Stage
Travel: 50, 100, 150, 200 mm
Velocity: 300 mm/s
Load: 15 kg
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Airlift 115 Air-Bearing Vertical Lift Stage
Travel: 50, 100, 150 mm
Velocity: 50 mm/s
Load: 15 kg
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VTS300 Vertical Translation Stage
Travel: 50, 100, 150, 200 mm
Velocity: 5 mm/s
Load: 450 kg
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Linear Motors
Aerotech’s “U-channel” brushless linear servomotors
have proven ideal for robots, actuators, tables/stages, fiberoptics/photonics
alignment and positioning, assembly, machine tools, semiconductor equipment,
electronic manufacturing, vision systems, and in many other industrial
automation applications. Aerotech linear motors are direct drive and consist
of a noncontacting forcer coil and “U-channel” rare-earth magnet track. This
design eliminates backlash, windup, wear, and maintenance issues associated
with ball screw, belt, and rack and pinion based motion control and
positioning systems. The noncontact design of the forcer and magnet track
results in a maintenance-free system. Aerotech manufactures a complete line
of linear motors to meet the needs of your industrial automation
application.
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BLMUC Brushless Linear Servomotor
Continuous Force:
18.3 - 58 N
Peak Force:
125 - 232 N
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BLMC Brushless Linear Servomotor
Continuous Force:
66 - 161 N
Peak Force:
264 - 646 N
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BLM Brushless Linear Servomotor
Continuous Force:
173 - 398 N
Peak Force:
693 - 1590 N
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BLMH Brushless Linear Servomotor
Continuous Force:
271 - 549 N
Peak Force:
1083 - 2195 N
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BLMX Brushless Linear Servomotor
Continuous Force:
972 - 1063 N
Peak Force:
3887 - 4252 N
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BLMF Linear Motors
Continuous Force:
19 - 112 N
Peak Force:
75 - 448 N
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BLMFS5 Linear Motor
Continuous Force:
323 - 697 N
Peak Force:
699 - 1507N
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Linear Stages
Aerotech manufactures a large selection of linear
tables/slides/stages that utilize our own brushless linear direct-drive
servomotors, as well as ball screw models driven with Aerotech brush or
brushless rotary motors. Travels for our linear tables range from 25 mm to
1.5 meters. Aerotech’s tables are utilized in high-performance applications
in industrial robots, fiberoptics and photonics, vision systems, machine
tools, assembly, semiconductor equipment, medical component laser machining,
electronic manufacturing, and other industrial automation applications. We
even offer our new NANO Technology series stages that provide nanometer
resolution, accuracy, repeatability, and in-position stability in models
with travels from 25 mm to 150 mm. In addition, Aerotech manufactures drives
and motion control solutions that perfectly complement our linear tables.
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Precision Mechanical Bearings Ball-Screw-Driven Stages
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ATS50 Linear Stage
Travel: 25 or 50 mm
Accuracy: ±2.5µm/25mm
Load: 5.0 kg
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ATS100 Linear Stage
Travel: up to 200 mm
Accuracy: ±0.5 µm
Load: 25.0 kg
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ATS150 Linear Stage
Travel: up to 250
mm
Accuracy: ±1.0 µm
Load: 45 kg
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PRO115 Linear Stage
Travel: up to 600 mm
Accuracy: ±6 µm
Load: 40.0 kg
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PRO165 Linear Stage
Travel: up to 600
mm
Accuracy: ±6 µm
Load: 45 kg
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PRO225 Linear Stage
Travel: up to 1000
mm
Accuracy: ±11 µm
Load: 100 kg
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PRO280 Linear Stage
Travel: 300 mm - 1000 mm
Accuracy: ±17.5 µm
Load: 150.0 kg
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PRO560 Linear Stage
Travel: 300 mm - 1000 mm
Accuracy: ±17.5 µm
Load: 150.0 kg
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PRO115-HS (High-Speed) Linear Stage
Travel: up to 500 mm
Accuracy: ±8 µm
Loa: 40.0 kg
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PRO165-HS (High-Speed) Linear Stage
Travel: up to 500
mm
Accuracy: ±8 µm
Load: 45 kg
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PRO225-HS (High-Speed) Linear Stage
Travel: up to 1500 mm
Accuracy: ±11 µm
Load: 100 kg
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PRO280-HS (High-Speed) Linear Stage
Travel: 300 mm - 1500 mm
Accuracy: ±17.5 µm
Load: 150.0 kg
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PRO560-HS (High-Speed) Linear Stage
Travel: 300 mm - 1500 mm
Accuracy: ±17.5 µm
Load: 150.0 kg
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ATS0300 Linear Stage
Travel: 50 mm
Accuracy: ±2.5µm/25mm
Load: 25.0 kg
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ATS1000 Linear Stage
Travel: up to 600 mm
Accuracy: ±1.0 µm
Load: 50 kg
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ATS1100-H Linear Stage
Travel: up to 600
mm
Accuracy: ±1.0 µm
Load: 70 kg
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ATS1500 Linear Stage
Travel: up to 300
mm
Accuracy: 1.0 µm/25 mm
Load: 135 kg
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ATS2000 Linear Stage
Travel: up to 300 mm
Accuracy: ±1.0 µm
Load: 80.0 kg
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ATS3600 Open-Frame Linear Stage
Travel: up to 400
mm
Accuracy: ±1.0 µm
Load: 90 kg
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ATS5000 Linear Stage
Travel: up to 1000
mm
Accuracy: ±1.0 µm
Load: 135 kg
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ATS5000WB Linear Stage
Travel: up to 1000 mm
Accuracy: ±1.0 µm
Load: 135 kg
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ATS6200 Linear Stage
Travel: up to 1500 mm
Accuracy: 1.0 µm/25 mm
Load: 90 kg
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High Precision Mechanical Bearings Linear-Motor-Driven
Stages
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ANT95-L NanoTranslation, Cross-Roller Bearing Linear
Stage
Max Travel: 25 or 50 mm
Accuracy: ±250 nm
Load: 7.0 kg
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ANT95-XY NanoTranslation, Cross-Roller Bearing Linear
Stage
Max Travel:
25 x 25 or 50 x 50 mm
Accuracy: ±250 nm
Load: 6.0 kg
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ANT-130XY NanoTranslation, Two Axis, Cross-Roller
Bearing Linear Stage
Max Travel: 60, 110, 160 mm
Accuracy: ±250 nanometers
Speed: 350 mm/s
Load: 12 kg
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ANT130-L NanoTranslation, Cross-Roller Bearing Linear
Stage
Max Travel:
35, 60, 110, 160 mm
Accuracy: ±250 nm
Load: 12.0 kg
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ANT95-L-Z Linear Motor Vertical Stage
Max Travel: 50 mm
Accuracy: ±300 nm
Load: 5.0 kg
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ANT130-L-Z Linear Motor Vertical Stage
Max Travel: 60 mm
Repeatability: ±300 nm
Load: 10 kg
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ANT180-L Linear Motor Stage
Max Travel: 360 mm
Accuracy: ±150 nm
Load: 30.0 kg
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ALS130H Linear Motor Stage
Max Travel: 150 mm
Repeatability: 75 nm
Load: 12.0 kg
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ALS130 Linear Motor Stage
Max Travel: 150 mm
Accuracy: ±0.3µm
Load: 12.0 kg
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ALS135 Linear Motor Stage
Max Travel: 200 mm
Accuracy: ±0.3 µm
Load: 12 kg
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ALS1000 Linear Stage
Max Travel: 450 mm
Accuracy: ±1.0 µm
Load: 50 kg
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PRO165LM Linear Stage
Travel: 100 mm - 1000 mm
Accuracy: ±4 µm
Load: 45 kg
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PRO225LM Linear Stage
Max Travel: 1500 mm
Accuracy: ±1.5 µm
Load: 100 kg
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PRO280LM Linear Stage
Max Travel: 1500 mm
Accuracy: ±2.0 µm
Load: 150 kg
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PRO560LM Linear Stage
Max Travel: 1500 mm
Accuracy: ±2.0 µm
Load: 150 kg
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ALS2200 Linear Motor Stage
Max Travel: 150 mm
Accuracy: ±0.75 µm
Load: 30.0 kg
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ALS3600 Open Frame Linear Stage
Max Travel: 400 mm
Accuracy: ±2.0 µm
Load: 90.0 kg
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ALS5000 Linear Motor Stage
Max Travel: 1000 mm
Accuracy: ±1.0 µm
Load: 135 kg
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ALS5000WB Linear Motor Stage
Max Travel: 1000 mm
Accuracy: ±1.0 µm
Load: 135 kg
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ALS20000 Linear Stage
Max Travel: 600 mm
Accuracy: ±1.0 µm
Load: 70.0 kg
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ALS25000 Linear Motor Stage
Max Travel: 600 mm
Accuracy: ±1.0 µm
Load: 70 kg
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Laser and Medical Systems
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VascuLathe ACS/ASR
VascuLathe® represents a revolutionary approach to
satisfying the demanding requirements of stent manufacturing applications.
The fully integrated motion system couples automated material handling
functionality and wet cutting operation with high performance direct-drive
linear and rotary motion capability.
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LaserTurn 2 and 5
The LaserTurn® series of products are the first dedicated
motion subsystems targeted directly at cylindrical laser processing
applications. The integrated linear-rotary system combines automated
material handling functionality and wet cutting operation with high
performance direct-drive linear and rotary motion. The
pneumatically-actuated 3-jaw gripper has a clear aperture for product
feedthrough, and can be configured for O.D., I.D., or odd form gripping with
various jaw geometries, while the ER collet supports tubing diameters from
0.5 mm to 30 mm.
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LaserTurn 1
The LaserTurn® 1 cylindrical laser machining system
supports material from 0.1 mm to 7.9 mm in diameter, making it an ideal
platform for the manufacture of cardiovascular and neural stents. The system
can be configured for wet or dry cutting and includes options for material
advance and bushing alignment platforms.
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HermeSys
The HermeSys™ is a holistic design that optimizes all
aspects of the medical device hermetic seam welding process. Specialized
mechanics are used to accurately position the device during the laser
welding process, while onboard kinematics allows the programming of laser
weld geometry in part space for rapid optimization of process parameters on
the machine, with no post-processing required.
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Manual Positioners
In those cases where a completely automated system is
not required, or where one or more axes needs very infrequent adjustment, or
perhaps in early stage proof-of-concept laboratory experiments, Aerotech’s
manual stages can do the job. Aerotech offers a line of nanometer
resolution, large travel range, rotary and linear tables. These manual
stages, which have been used extensively by the major research laboratories
throughout the world over the past thirty years, offer excellent in-position
stability, high positioning resolution, large adjustment range, and
outstanding thermal stability.
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Precision Tilt Tables
Range: ±10 degrees
Resolution: ±0.2 arc second
MaxLoad: 4.54 kg (10 lb.)
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Rotary Stages
Range: 360 degrees
Resolution: ±0.1 arc second
MaxLoad: 11.36 kg (25 lb.)
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Linear Stages
Range: 25 mm ( 1in.)
Resolution: 25 nm
MaxLoad: 22.7 kg (50 lb.)
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NANO Technology
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ANT95-L NanoTranslation, Crossed-Roller Bearing
Linear Stage
Max Travel: 25 or 50 mm
Accuracy: ±250 nanometers
Speed: 500 mm/s
Load: 7.0 kg
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ANT95-XY NanoTranslation, Two Axis,
Crossed-Roller Bearing Linear Stage
Max Travel:
25 x 25 or 50 x 50 mm
Accuracy : ±250 nanometers
Speed: 500 mm/s
Load: 6.0 kg
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ANT130-L NanoTranslation, Crossed-Roller Bearing
Linear Stage
Max Travel:
35, 60, 110, 160 mm
Accuracy: ±250 nanometers
Speed: 350 mm/s
Load: 12.0 kg
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ANT-130XY NanoTranslation, Two Axis,
Crossed-Roller Bearing Linear Stage
Max Travel: 60, 110, 160 mm
Accuracy: ±250 nanometers
Speed: 350 mm/s
Load: 12 kg
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ANT95-R Series Direct-Drive Rotary Stage
Max Aperture: 11 mm
Accuracy: 5 arc sec
Resolution: 0.1 arc sec
Load: 2.0 kg
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ANT130-R Series Direct-Drive Rotary Stage
Max Aperture: 11 mm
Accuracy: 5 arc sec
Resolution: 0.1 arc sec
Load: 3.0 kg
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ANT95-L-Z Series Linear Motor Vertical Stage
Max Travel: 25 or 50 mm
Accuracy: ±300 nm
Speed: 200 mm/s
Load: 5.0 kg
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ANT130-L-Z Series Linear Motor Vertical Stage
Max Travel: 35 or 60 mm
Accuracy: ±300 nm
Speed: 200 mm/s
Load: 10 kg
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ANT-95-3-V Series Linear Motor Vertical Lift Stage
Max Travel: 3 mm
Accuracy: ±2 µm
Speed: 75 mm/s
Load: 1.5 kg
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ANT-130-5-V Series Linear Motor Vertical Lift Stage
Max Travel: 5 mm
Accuracy: ±200 nm
Speed: 75 mm/s
Load: 3.0 kg
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ANT-20G Series Direct-Drive Goniometers
Max Travel: 20°
Accuracy: ±30 µrad
Speed: 150 degrees per second
Load: 3.5 kg
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Optical Mounts and Gimbals
Aerotech's AOM family of optical mounts and gimbals is
designed for highly accurate pointing, scanning and target tracking of large
optics, antennae, telescopes, and cameras. These optical mounts and gimbals
are also used to test and calibrate inertial sensors, gyros and seeker
heads. The AOM family of optical mounts and gimbals comes in various sizes
and capabilities to fit many different positioning requirements. The AOM
optical mounts and gimbals provide sub arc second resolution in either
motorized or manual configurations.
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Direct Drive Optical Mounts and Gimbals
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AMG LP Series Optical Mounts and Gimbals
Resolution:
.32 µrad - 31.5 µrad
Aperture size range:
95 mm - 193.8 mm
Load:
6.8 kg - 16 kg
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AMG Series Optical Mounts and Gimbals
Resolution:
.27 µrad - 0.13 µrad
Aperture size range:
194 mm - 591 mm
Load:
20 kg - 70 kg
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AOM360D Optical Mounts and Gimbals
Resolution
0.27 µrad
Aperture size range
203.2 mm - 508.0 mm
Load
7.0 kg - 50.0 kg
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Gear Driven Optical Mounts and Gimbals
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AOM130M Optical Mounts and Gimbals
Resolution:
.04 µrad - 0.024 µrad
Aperture size range:
152.4 mm - 609.6 mm
Load:
4.5 kg - 264 kg
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AOM300 Optical Mounts and Gimbals
Resolution:
29.1 µrad - 14.6 µrad
Aperture size range:
152.4 mm - 203.2 mm
Load:
9.1 kg
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APT Pan and Tilt Mounts
Position Resolution:
7.6 arc sec
Pan Range:
Continuous
Load:
35 kg
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Manual Optical Mounts and Gimbals
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AOM110 Optical Mounts and Gimbals
Resolution:
0.29 µrad - 0.73 µrad
Aperture size range:
152.4 mm - 304.8 mm
Range:
.± 2.5° - ± 6°
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AOM130 Optical Mounts and Gimbals
Resolution:
0.13 µrad - 0.2 µrad
Aperture size range:
152.4 mm - 609.6 mm
Load:
4.5 kg - 264 kg
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Rotary Motors
Aerotech's rotary motor family addresses the needs of
both ultra-precision positioning and high-throughput industrial automation
applications. Our motors have among the highest torque to inertia ratios
available. Brushless rotary motors feature neodymium iron boron magnets for
maximum torque and acceleration in a small package.
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BM Brushless Rotary Motors
Type:
Brushless
Continuous Torque:
0.16 - 31.6 N-m
Peak Torque:
0.48 - 94.9 N-m
Rated Speed:
2400 - 4000 rpm
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BMS Brushless, Slotless Rotary Motors
Type:
Brushless
Continuous Torque:
0.33 - 2.86 N-m
Peak Torque:
1.31 - 11.43 N-m
Rated Speed:
2000 - 4000 rpm
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S Series Brushless, Frameless Torque Motors
Type:
Frameless
Continuous Torque:
0.20 - 29.09 N-m
Peak Torque:
0.82 - 116.37 N-m
Rated Speed:
200 - 8000 rpm
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1000 Series DC Servomotors
Type:
DC Brush
Continuous Torque:
0.25 - 1.48 N-m
Peak Torque:
1.84 - 7.1 N-m
Rated Speed:
3000 - 6000 rpm
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SM Series Stepper Motors
Type:
Stepper
Continuous Torque:
0.3 - 7.4 N-m
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Rotary Stages
Aerotech manufactures a large selection of rotary
tables including direct-drive models that use our own brushless rotary servo
motors, as well as worm-gear-driven models.
Stages are available with many different size apertures, table diameters,
and mounting options to provide the ideal solution for your industrial
automation application. Wobble and runout performance is outstanding.
Aerotech’s tables are used in industrial robots, fiberoptics and photonics,
vision systems, machine tools, assembly, semiconductor equipment, medical
component laser machining, electronic manufacturing, and other
high-performance industrial automation applications.
In addition, Aerotech manufactures drives and motion control solutions that
perfectly complement our rotary tables.
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Rotary Air-Bearing Stages
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ABRS Rotary Air Bearing Stage
Tabletop Diameter:
128.1-278.1 mm
Resolution:
0.18-0.036 arc sec
Bi-Directional Repeatability:
<1 arc sec
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ABRT Rotary Air Bearing Stage
Tabletop Diameter:
100-200 mm
Resolution:
0.055-0.027 arc sec
Bidirectional Repeatability:
<1 arc sec
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Direct-Drive Mechanical-Bearing Rotary Stages
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ASRT Series Direct-Drive Rotary Stage
Max Aperture: 130 mm
Accuracy: 15 arc sec
Load: 175 kg
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ANT95-R Series Direct-Drive Rotary Stage
Max Aperture: 11 mm
Accuracy: 10 arc sec
Load: 2.0 kg
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ANT130-R Series Direct-Drive Rotary Stage
Max Aperture: 11 mm
Accuracy: 10 arc sec
Load: 3.0 kg
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ADR160 Direct Drive Rotary Stage
Diameter: 160 mm
Accuracy: ±5 arc sec
Load: 25 kg
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ADRT Direct Drive Rotary Stage
Diameter: 146 - 260 mm
Accuracy: 5 arc sec
Load: 30 - 173 kg
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ADRS Rotary Stage
Diameter: 95 - 190 mm
Accuracy: 6 arc sec
Load: 16.9 - 56.2 lb
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ARMS Direct Drive Rotary Stage
Aperture: 8 mm - 25 mm
Resolution: 0.02 - 2 arc sec
Accuracy (Calibrated):
±2.5 arc sec
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ALAR Series Direct Drive Rotary Stage
Max Aperture: 325 mm
Accuracy: ±3.9 arc sec
Load: 6463 N
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ADR175/240 Direct Drive Rotary Stage
Diameter: 175 mm
Accuracy: ±5 arc sec
Load: 25 kg
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ARA1000 Rotary Actuator
Diameter: 342.9 mm
Accuracy: ±2 arc sec
Load: 45 kg
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ADR75 Direct Drive Rotary Stage
Diameter: 75 mm
Accuracy: ±5 arc sec
Load: 3 kg
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ASR1000 Direct Drive Rotary Stage
Diameter: 19 mm
Accuracy: ±15 arc sec
Load: 3.0 kg
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ASR1100 Direct Drive Rotary Stage
Max Aperture: 14 mm
Accuracy: ±15 arc sec
Load: 3 kg
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ASR1200 Direct Drive Rotary Stage
Max Aperture: 5.8 mm
Accuracy: ±15 arc sec
Load: 3 kg
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ACS Series Rotary Stage
Max Aperture: 30 mm
Accuracy: ±15 arc sec
Load: 140 kg
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ACS LP Series Rotary Stage
Max Aperture: 30 mm
Accuracy: ±6 arc sec
Load: 41 kg
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ADRH Direct Drive Rotary Stage
Diameter: 104.8 mm
Resolution: 3.6 arc sec
Max Rotary Speed: 2500 rpm
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WaferMax T
Diameter: 106.7 mm
Accuracy: ±5 arc sec
Load: 40 kg
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Gear-Driven Mechanical-Bearing Rotary Stages
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AGR Series Motorized Rotary Stage
Aperture: 50 mm - 200 mm
Accuracy: 20 arc sec
Axial Load: 90 kg - 570 kg
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ART300 Motorized Rotary Stage
Diameter: 300 mm
Accuracy: 0.5 arc min
Load: 115 kg
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ART50/100 Rotary Stages
Diameter:
50 mm
Accuracy:
0.06 degrees
Load:
5.0 kg
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Spindles |
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ASR2000 Series Direct-drive Spindle
Max rotary speed:
6000 rpm in <1 second
Max load (radial/axial): 89 N
Total error motion (radial/axial): 5 µm/2 µm
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ABS2000 Series Air Bearing Spindle
Max rotary speed: 6000 rpm
Max load (radial/axial):
66 N - 178 N
Synchronous error motion (radial/axial): <100 nm
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Options and Accessories
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ABF Air Bearing Filtration Unit
The air-bearing filtration unit (ABF) is used to clean
and condition the compressed air used to supply air-bearing mechanics. It is
compatible with both linear and rotary
air-bearing stages.
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ETM Enhanced Throughput Module
Aerotech's ETM modules help improve the positioning
performance of high-dynamic motion systems by directly measuring the
unwanted motion of the machine base and communicating it back to the
controller.
By working in concert with the Dynamic Controls Toolbox and the Aerotech
controllers, they allow the servo system to do a superior job of executing
the desired motion path.
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MXH Series Multipliers
Interpolation:
x200 - x2000
Output Signal:
Square Wave,
RS-422,TTL compatible
Power Supply:
5V ±5% (180 mA)
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Joystick
The joystick has an easy plug-in connection. JI Model is
sealed for harsh environments. Dedicated function buttons; extension cable
available.
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Terminal Block
25/37 conductor, D-shell configuration; 50 conductor,
dual row header configuration; convenient screw-terminal interface; DIN
mount: Use to interface to PSO options.
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Cables
Quickly interface to Aerotech controllers, drives,
motors, and accessories. High-density cables reduce the need for multiple
cables.
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Filters
Aerotech’s UFM noise filter module is used to reduce
conducted line noise generated by switching servo amplifiers.
The UFM is used with any BA Series amplifier to conform to CE noise
directives.
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MPGA32 Pendant
A3200 multi-axis handhweel pendant provides a user
friendly interface for the manual operation and setup of up to
6 axes.
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TM Series Transformers
The TM3 transformer module provides and distributes
isolated AC and/or DC bus supply voltages for up to four Aerotech
controllers.
It is configured at the factory to provide 28 VAC, 56 VAC, 115
VAC, 40 VDC, 80 VDC, 160 VDC, or a combination of these voltages with a
maximum transformer output power capability of 300 watts.
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TV Series Transformers
High-quality isolation and autotransformers are fully
compatible with Aerotech’s drive systems that require separate transformers.
These are conservatively rated, open-frame units with mounting brackets and
lug or screw terminals for easy installation.
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