SHL-3D5N-5 - High Load Stage

A 3DoF positioning system that can lift high payloads of up to 5 N over a range of 5 mm regardless of its mounting orientation.

The SHL-3D5N-5 is a lift stage based on a parallel kinematic design. It is designed to be able to lift 500g of weight regardless of the orientation of the stage with respect to gravity. This, in combination with position sensors for direct position feedback and closed-loop-operation, makes it ideally suited as a nanometer precision end station for a robotic arm or similar applications.

  • Step-file_SHL-3D5N-5
    Jun 26, 2019

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Degrees of Freedom 3
Travel [mm] 5
Max. Lift Force [N] 5 (in all directions)
Dimensions [mm] 100 x 140 x 40
Weight [g] 650
  Open-loop
Open-loop
Velocity [mm/s] > 5
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S), 4 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability (H)CU [nm] ± 200 (S,L)
  Options
Options
Material Options Aluminum as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)

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