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Germany |
PI Physik Instrumente |
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Offer Profile
PI delivers
micropositioning and nanopositioning solutions for many high-tech markets.
The following products highlight a few PI products that find applications in
different technology fields from semiconductors to biotechnology and
telecommunications.
40 Years of Experience
Micro- and Nanopositioning, NanoAutomation® Leading-Edge Solutions for
Science and Industry
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Product Line Up
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Actuators & Motors
• Piezo Actuators & Components
• Ceramic, High Force Actuators
• Ceramic, High Speed Actuators
• Classical Screw-Type Actuators
Piezo Linear Actuators / Motors
Ultrasonic PILine® ceramic motors are also referred to as resonant
motors, and NEXACT® / NEXLINE® PiezoWalk® motors are also referred
to as piezo step motors (not related to inertial motors). Both can,
in principle, attain unlimited travel, yet they are very different
in their design, specifications and performance. These long-travel
devices are different in nature to the classical (shorter-travel)
piezo stack, bender and flexure actuators
PILine® resonant motors are characterized by a simple design
and high speed to 800 mm/s.
NEXLINE® & NEXACT® stepping piezo motor actuators are more
complex and can achieve much higher resolution, forces and dynamic
performance (analog mode).
A great advantage of piezo motors is their intrinsic steady-state
auto-locking capability. It does away with servo dither and the
accompanying heat generation, an undesirable feature of
electromagnetic linear motors. Stepping and resonant (continuous)
piezo motors are in principle nonmagnetic and vacuum-compatible, a
requirement for many applications in the semiconductor optics and
medical industry.
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NEXLINE® / NEXACT® High-Force Actuators
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NEXLINE® Piezo Hexapod
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Piezo Motor Controllers for High Force Actuators
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PILine® Linear Motor Actuators
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PILine® Translation Stages
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PILine® Micro Motors
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Motorized Linear Actuators
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Cost Effective Stepper Actuators
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Vacuum Actuators
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Piezo Flexure Stages & Lever Amplified Actuators
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Piezo Bender Actuators
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Piezo Stack Actuators
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Piezo Systems/ Steering Mirrors
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Piezo Flexure Stages Multi & Single-Axis
• Fast Steering Mirrors Single /
Multiaxis
• Nanopositioning Actuators / Motors
• Piezo Controllers, Drivers &
Amplifiers
Piezostage / Nanopositioning & Scanning Stages Introduction
PI is the global leader in piezo nanopositioning and scanning
systems. PI offers the greatest variety of standard piezostage
systems as well as custom tailored solutions.
PI piezo stage positioners & scanners with frictionless flexure
guidance are decidedly superior to positioners with conventional
guiding systems in terms of resolution, reproducibility,
straightness and flatness.
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Nanofocusing/Scanning Drives
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Parallel-Metrology Multiaxis Stages
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Z-Stages / Actuators
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Compact X / XY / XYZ Systems
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Single Axis Stages
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Stages with Aperture
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6-Axis Stages
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Piezo Tip/Tilt Mirrors
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Piezo Actuators
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Nanopositioning Linear Motors
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Nanomeasuring / Capacitance Sensors
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Piezo Controllers
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Piezoelectrics
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Piezo Ceramics / Engineered Assemblies
• Piezo Motors: Stepping and Ultrasonic
• Piezo Actuators / Components
• Piezo Systems: Stages, Steering Mirrors...
• Piezo Drivers, Controllers, Amplifiers
Piezo Actuator Introduction
A Piezoelectric translator (linear actuator) is a solid-state ceramic
actuator which converts electrical energy directly into linear motion
(mechanical energy) with virtually unlimited resolution.
PI piezo actuators are designed to combine ultra-high performance with long
lifetime in industrial and scientific applications. PI's piezo ceramic
design and manufacturing division-PI Ceramic-provides the capability and
flexibility to offer highly engineered custom sub-assemblies at a very
attractive price.
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Multilayer Chips and Stacks
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High Force Stacks
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Preloaded Stacks
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Benders, Bimorphs & Piezo-Composite Transducers
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Piezoceramic Tubes
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Shear Actuators
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Piezo Mike Actuators
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NEXLINE® / NEXACT®
High-Force Motors
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PILine® Linear
Motor-Actuator
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Flexure Actuators / Stages
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Piezo Tip/Tilt Mirrors
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Piezo Controllers
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Nanometrology / Position Sensors
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Capacitive Sensors
• Sensor Electronics
• Nanometrology Fundamentals
• Piezo Sensors
Capacitive Metrology Sensors Introduction
PI capacitive (capacitance) sensors are the metrology system of
choice for the most demanding nanopositioning applications. They are
absolute-measuring, high-dynamics devices. PI capacitive sensors /
control electronics use a high-frequency AC excitation signal for
enhanced bandwidth and drift-free measurement stability (subnanometer
stability over several hours, see Fig. 6, on Link).
They enable direct measurement of the moving platform and are
especially well-suited for multi-axis measurements in parallel
metrology configurations. Parallel metrology means that the
controller monitors all controlled degrees of freedom relative to
"ground", a prerequisite for active trajectory control.
Capacitive sensors also offer the highest linearity (accuracy).
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Two Electrode Sensors
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PISeca™ Single-Probe Sensors
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PISeca™ Electronics
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Hexapods, Tripods / Parallel Kinematics
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Hexapods, Tripods / Parallel Kinematics
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Piezo Flexure Parallel-Kinematic Systems
Hexapods or Parallel Kinematics Positioning Systems Introduction
PI is the leading manufacturer of Hexapod high-performance micro-
and nanopositioning systems. These parallel-kinematics devices,in a
number of different forms, are suitable for diverse applications,
ranging from handling systems in electronics fabrication and tool
control in precision machining, through medical technology, to
optical systems like those found in space telescopes and satellite
receiving antennas. Various models of the powerful parallel
kinematic machines (PKM) can move masses of 50, 200 or even 1000
kilograms with micron accuracy as required in the irrespective
applications.
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High-Load Hexapods
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Miniature Hexapod
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Vacuum Compatible Hexapods
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Precise 6-Axis Micro Alignment System
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Weatherproof Hexapods
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Tripods
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Hexapods in Astronomy
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Multi-Axis Stages
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Parallel-Kinematics Piezo Flexure Designs
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Controllers for Hexapods
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Ultra-High Load Hexapod
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Hexapods for Extreme Environments
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Motorized and Manual Stages & Actuators
 • Slides,
Stages, Actuators
• Rotary & Tilt Stages
• Multi Axis Stages
• Hexapods / Parallel Kinematics
Precision Micropositioning Stages & Actuators Introduction
PI is the leading manufacturer of Hexapod 6-axis micro- and
nanopositioning systems. In addition to these parallel kinematics
devices, PI offers a wide selection of innovative precision
positioning systems such as miniature linear slides, precision
rotary stages, hybrid ultra-precision positioning systems for
science and industry.
PI's products range from ceramic linear motors to motorized
actuators, translation stages, rotation stages and include systems
with integrated controllers.
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Hexapod 6-Axis Stages
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Micro Motorized Stage Series
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DC/Stepper Translation Stages
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Hybrid Stages: Piezo+Servo
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Precision Linear Actuators
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Rotary Stages
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Vertical Stages (Z-Stages)
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Voice Coil Scanning Stages
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Piezo Linear Motor /Stages
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Piezo Actuators
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Motion Controllers / Piezo Controllers
 • Servo &
Stepper Motor Controllers
• Piezo Motor Controllers
• Piezo Drivers, Nano-positioning Controllers
• Controllers for Position Sensors
Motion Control Systems Introduction
PI offers a large variety of innovative motion control solutions for
precision micropositioning devices from linear motors to fast
voice-coil-driven scanners and complex Hexapod 6-degree-of-freedom
robots.
Included standard products range from compact, single-axis
controllers for DC servomotors, ultrasonic linear motors and voice
coil drives, to sophisticated control systems for parallel kinematic
machines. Standard automation controllers handle up to 18 axes.
Custom systems have been built capable of coordinating up to 273
axes.
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Compact Servo Controllers
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PCI Board Controllers with Amps
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Rack-Mount Controller
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Piezo Motor Controller
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Stepper Motor Controller
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Automation Controller
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Hybrid DC/Piezo Controller
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Piezo Controllers/Amplifiers
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Hexapod Controllers
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Photonics Alignment Solutions
 • Product
Information
• Background Information
Photonics Introduction
PI provides a great variety of innovative solutions for photonics packaging
and alignment automation. Products range from 6D micromotion robots for
industrial automation, through high-speed power meters, ultra-fast
piezoelectric scanning modules to modular devices with manual control for
laboratory test setups.
Applications include automated angular alignment of collimated fibers or
arrays, thin-film WDM add/drops, MEMS switches, planar MEMS cross-connects
and multi-channel waveguides. Additional PI products are available for
applications such as writing fiber Bragg gratings (FBGs), fiber stretching,
coarse alignment, beam switching, etc.
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6-Axis Alignment System
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XYZ Fiber Alignment System
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Miniature Translation Stages
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Piezo Alignment Add-On
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Automation Platform
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Piezo Stacks and Chips
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Steering Mirrors
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Piezoceramic Benders & Tubes
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