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  • Offer Profile

  • TOXIC GAS SENSORS
    FOR YOUR GAS DETECTORS

    Sensorix GmbH is a global manufacturer and supplier of electrochemical gas sensors for detecting toxic gases such as NH3, Cl2, ClO2, COCl2, TEOS, TBM, THT, O3, F2, H2, HCN, AsH3, PH3, H2S, and CO.

    The sensors made by Sensorix are designed to be used especially in safety critical applications. They outperform our competitors with class leading stability and a fast response.

    Sensorix offers its gas sensor types in the following formats – 4S, 7S, Mini, Classic, Smart, and Satellix – and in customised mechanical adaptations.

Product Portfolio

  • New: Satellix Hydride Long-Time Sensors With Ionic Liquids

  • Satellix Hydride Long-Time Sensors With Ionic Liquids

    Sensorix is launching its Long Time (LT) gas sensors with ionic liquids, the Satellix Hydride LT sensors. In this blog post, you will find key information about ionic liquids and the benefits of using them in gas sensors in contrast to an organic gel electrolyte.

    Sensors with a gel electrolyte

    Until now, Sensorix could only offer Satellix hydride sensors with an organic gel electrolyte. These sensors are perfectly suited to selectively detect low concentrations of hydrides with a fast T90. However, their electrolyte contains a high-boiling organic solvent that evaporates very slowly and irreversibly from the sensor.

    In most environments, the gel sensors will reach 18 months of operating life as stated in the datasheet. However, evaporation accelerates with increasing temperatures and wind speed. There are environments where organic gel hydrides may not reach their full life. This may be the case if the sensors are installed in ducts or exhausts which are widely used in the semiconductor industry.

    Sensors with Ionic Liquids

    An ionic liquid (IL) is an organic salt that is in its liquid state within a wide range of temperatures, at or below room temperature. Due to their very low vapour pressure and high thermostability, ionic liquids are suitable for use as electrolytes in gas sensors such as Satellix.

    At Sensorix, you can currently find the following long-time stable Satellix hydride sensors:

      • STANDARD GAS SENSORS

      • WHAT GASES CAN STANDARD GAS SENSORS DETECT?

        Sensorix offers a broad range of electrochemical sensors for the detection of toxic and hazardous gases. Please select the target gas below to view the sensor types available from Sensorix.

        As an Original Equipment Manufacturer (OEM), Sensorix offers a wide range of electrochemical (EC) sensors for gas detector manufacturers. All Sensorix standard gas sensors are available in 5 different formats - 4S, 7S, Mini, Classic and Smart.

        GAS SENSORS WITH EPROM

        In response to the global demand for high-quality gas sensors, Sensorix is addressing customers' wishes and needs by offering customised solutions and mechanical adaptations for their gas detectors.

        We are therefore pleased to present our highly customised gas sensors with EPROM and/or temperature sensor: Sensorix Smart 8p and Sensorix Satellix . Both sensor customisations are available in Sensorix' complete and extensive range of competitive electrochemical sensors for the international B2B gas detection market. Based on many years of experience in the field of gas sensors technology, the Sensorix team ensures consistent sensor quality "made in Germany" by Sensorix for all product lines.

          • Electrochemical Gas Sensor for Arsine

          • Sensorix AsH3 1 zero H2
            • 3-electrode sensor for industrial safety applications in the presence of H2.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix AsH3 1
            • Sensorix AsH3 1 0F

          • Electrochemical Gas Sensor for Diborane

          • Sensorix B2H6 1
            • 3-electrode sensor for industrial safety applications including semiconductor.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix Format

          • Electrochemical Gas Sensor for Chlorine

          • Sensorix Cl2 50
            • 3-electrode sensor industrial safety and disinfection.
            • Class leading stability | Highly selective | Fast response | Very low baseline
            • 5 available formats

          • Electrochemical Gas Sensor for Chlorine Dioxide

          • Sensorix ClO2 1
            • 3-electrode sensor for industrial safety and disinfection.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

          • Electrochemical Gas Sensor for Carbon Monoxide

          • Sensorix CO 500
            • 3-electrode sensor for industrial safety applications.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

          • Electrochemical Gas Sensor for Phosgene

          • Sensorix COCl2 1
            • 3-electrode sensor for industrial safety applications.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix Satellix COCI2 Sensor

          • Electrochemical Gas Sensor for Fluorine

          • Sensorix F2 1
            • 3-electrode standard sensor for 1 ppm measurement range.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats
            Sensorix F2 5
            • 3-electrode sensor for measurement range 5 ppm, linear up to 10 ppm, increased stability in high flow applications like ducts and pumped instruments.
            • Class leading stability | Highly selective | Fast response | Very low baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix Satellix F2 Sensor

          • Electrochemical Gas Sensor for Germane

          • Sensorix GeH4 5
            • 3-electrode sensor for industrial safety applications including semiconductor.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix Satellix GeH4 Sensor

          • Electrochemical Gas Sensor for Hydrogen Chloride

          • Sensorix HCl 30
            • 3-electrode sensor for industrial safety applications including refrigeration
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format
            Sensorix HCl 20
            • 3-electrode sensor for industrial safety applications
            • This is a bias-free HCl sensor, designed to detect acid gases
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

          • Electrochemical Gas Sensor for Hydrogen Cyanide

          • Sensorix HCN 50
            • 3-electrode sensor for industrial safety applications.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats

          • Electrochemical Gas Sensor for Hydrogen Fluoride

          • Sensorix HF 10
            • 3-electrode sensor reliably detects the hydrogen fluoride gas and other volatile acids in semiconductor and other industries.
            • The Sensorix HF 10 sensor operates from -20 to +40°C and tolerates short periods up to 50°C.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

          • Electrochemical Gas Sensor for Hydrogen

          • Sensorix H2
            • 1% 3-electrode standard sensor for 1% measurement range.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format
            Sensorix H2 4%
            • 3-electrode standard sensor for 4% measurement range.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix Satellix H2 Sensor

          • Electrochemical Gas Sensor for Hydrogen Sulfide

          • Sensorix H2S 100
            • 3-electrode standard sensor for industrial safety with 0.3 ppm baseline.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format
            Sensorix H2S 2000
            • 3-electrode sensor developed for biogas application, tolerates several 100,000 ppm hours of H2S.
            • Class leading stability | Highly selective | High Range
            • 5 available formats
            Sensorix H2S
            • 30 low ppb 3-electrode sensor for industrial safety and environmental monitoring applications.
            • Due to its stable baseline, that is hardly affected by humidity transients, this sensor can be used to detect ppb levels of H2S.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats

            See also:

            • Sensorix Satellix H2S Sensor

          • Electrochemical Gas Sensor for Ammonia

          • Sensorix NH3 100
            • 3-electrode standard sensor with highest sensitivity and lowest detection limit.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats

            See also:

            • Sensorix NH3 100
            • Sensorix NH3 500
            • Sensorix NH3 1000
            • Sensorix NH3 5000
            • Sensorix NH3 100 -40°C
            • Sensorix NH3 1000 -40°C

          • Electrochemical Gas Sensor for Hydrazine

          • Sensorix N2H4 1
            • 3-electrode sensor for industrial safety applications
            • Class leading stability | Highly selective | Fast response | Stable baseline
            • 5 available formats

          • Electrochemical Gas Sensor for Ozone

          • Sensorix O3 1
            • 3-electrode standard sensor with highest sensitivity and lowest detection limit.
            • The Sensorix O3 1 sensor is for TLV and environmental monitoring.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix O3 1 F
            • Sensorix 09 5 D
            • Sensorix Satellix O3 Sensor

          • Electrochemical Gas Sensor for Phosphine

          • Sensorix PH3 1 zero H2
            • 3-electrode sensor for industrial safety applications in the presence of H2.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix PH3 1
            • Sensorix PH3 1
            • Sensorix Satellix PH3 Sensor

          • Electrochemical Gas Sensor for Hydrogen Selenide

          • Sensorix SeH2 5
            • 3-electrode sensor for industrial safety applications including semiconductor.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix Satellix SeH2 Sensor

          • Electrochemical Gas Sensor for Silane

          • Sensorix SiH4 50
            • 3-electrode sensor for industrial safety applications including semiconductor.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats + Satellix format
            Sensorix SiH4 2
            • 3-electrode sensor for industrial safety applications including semiconductor.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats

            See also:

            • Sensorix Satellix SiH4 Sensor

          • Electrochemical Gas Sensor for tert-Butyl Mercaptan

          • Sensorix TBM 50
            • 3-electrode sensor for industrial safety applications e.g. gas odorization.
            • Class leading stability | Highly selective | Fast response | Very stable baseline
            • 5 available formats

          • Electrochemical Gas Sensor for Tetraethyl Orthosilicate

          • Sensorix TEOS 100
            • 3-electrode sensor designed for the semiconductor industry.
            • The Sensorix TEOS 100 sensor detects alcohols and other organic and inorganic gases, too.
            • Class leading stability | Fast response | Very stable baseline
            • 5 available formats + Satellix format

            See also:

            • Sensorix Satellix TEOS Sensor

          • Electrochemical Gas Sensor for Tetrahydrothiophene

          • Sensorix THT 100
            • 3-electrode standard sensor for THT detection without H2S cross interference and 150 mV bias.
            • Class leading stability | Fast response | Very stable baseline
            • 5 available formats

            See also:

            • Sensorix THT 100 low H2

        • Sensorix Satellix

        • Sensorix Satellix: Gas Sensors For the Semiconductor Industry

          Our new product line of Satellix gas sensors is a plug-and-play sensor solution for owners of Satellite XT transmitter, which is widely used in the semiconductor industry. Satellix sensors feature electrochemical sensors and pellistors for LEL monitoring. They contain a special socket, a programmed EPROM and a temperature sensor. Satellix sensors can be used for detection of the hydride gases: AsH3, PH3, SiH4, B2H6, and SeH2, as well as for HF, HCl, HBr, Cl2, NH3, and H2. Also worth mentioning are Br2, CH3F, ClF3, SF6, SO2, NF3, NO, NO2, and O2.

          What special is about the Satellix sensor?

          • Highly customised mechanical sensor adaptation
          • Compatible with the Satellite XT transmitter
          • Features EC gas sensors and pellistors for LEL monitoring
          • Detects over 30 gases used in the semiconductor processes

          What type of gas detectors is the Sensorix Satellix suitable for?

          The Sensorix Satellix is a special mechanical adaptation of gas sensors for measuring toxic, corrosive and combustible gases. This is a ready-to-use sensor solution for owners of Satellite XT transmitter with class-leading stability, reliability, and high selectivity.

          Key information about the Satellix format

          1. Sensorix offers Satellix sensors in three product dimensions according to the listed gas types. There are electrochemical sensors: Satellix Standard for most gases and Satellix 4S for SO2, NO, NO2, O2, as well as pellistor sensors: Satellix LEL.

          2. All these Satellix sensor formats have a dedicated socket and a programmed EPROM. Thus, owners of Satellite XT devices have a plug-and-play sensor solution.

          3. With Satellix, Sensorix is offering a broad range of sensors for detecting the hydride gases, such as AsH3, PH3, SiH4, B2H6, and SeH2, as well as for HF, HCl, HBr, Cl2, NH3, and H2, e.g., which are commonly used in semiconductor processes.

            • Electrochemical Gas Sensors for Bromine

              • Compatible with Satellite XT, replaces 9602-6800
              • 3-electrode sensor with EPROM for industrial safety applications
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Methyl Fluoride

            • Sensorix CH3F 0.5% Satellix

              PN: AN137S11

              • Compatible with Satellite XT, replaces 9602-9720
              • 3-electrode sensor with EPROM for industrial safety applications
              • Only with Pyrolyzer Unit
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Chlorine Trifluoride

            • Sensorix ClF3 1 Satellix

              PN: AN215S11

              • Compatible with Satellite XT, replaces 9602-7410
              • 3-electrode sensor with EPROM for industrial safety applications
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for 1,2 trans Dichlorethylene

            • Sensorix 1,2-trans-DCE Satellix

              PN: AN123S11

              • Compatible with Satellite XT, replaces 9602-9600
              • 3-electrode sensor with EPROM for industrial safety applications
              • Only with Pyrolyzer unit
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Octafluorocyclopentene

            • Sensorix C5F8 20 Satellix

              PN: AN133S11

              • Compatible with Satellite XT, replaces 9602-9730
              • 3-electrode sensor with EPROM for industrial safety applications
              • Only with Pyrolyzer Unit
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Trimethyl Borate

            • Sensorix TMB 500 Satellix

              PN: AN044S11

              • Compatible with Satellite XT, replaces 9602-7510
              • 2-electrode sensor with EPROM for industrial safety applications including semiconductor
              • Class leading stability | Fast response | Very stable baseline

            • Satellix Gas Sensors for C6H19NSi2

            • Sensorix 1,2-trans-DCE Satellix

              PN: AN123S11

              • Compatible with Satellite XT, replaces 9602-9600
              • 3-electrode sensor with EPROM for industrial safety applications
              • Only with Pyrolyzer unit
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Hydrogen Bromide

            • PN: AN122S11

              • Compatible with Satellite XT, replaces 9602-7000
              • 3-electrode sensor with EPROM for industrial safety applications including semiconductor
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Nitrogen Trifluoride

            • Sensorix NF3 50 Satellix

              PN: AN134S11

              • Compatible with Satellite XT, replaces 9602-9700
              • 3-electrode sensor with EPROM for industrial safety applications
              • Only with Pyrolyzer Unit
              • Class leading stability | Highly selective | Fast response | Very stable baseline

            • Satellix Gas Sensors for Nitric Oxide

            • Sensorix NO 250 Satellix

              PN:  AN152S11

              • Compatible with Satellite XT, replaces 9602-7200
              • 3-electrode sensor with EPROM for industrial safety applications
              • High stability | Fast response

            • Satellix Gas Sensors for Nitrogen Dioxide

            • Sensorix NO2 25 Satellix

              PN: AN161S11

              • Compatible with Satellite XT, replaces 9602-7300
              • 3-electrode sensor with EPROM for industrial safety applications
              • High stability | Fast response

            • Satellix Gas Sensors for Oxygen

            • Sensorix O2 25% Satellix

              PN: AN271S11

              • Compatible with Satellite XT, replaces 9602-5501
              • 3-electrode sensor with EPROM for industrial safety applications
              • High stability | Fast response 

            • Satellix Gas Sensors for Lower Explosive Limit

            • Catalytic Gas Sensor for Methane and Flammable Gases

              Sensorix LEL Satellix

              PN: AN281S11

              • Compatible with Satellite XT, replaces 9602-9900
              • Pellistor with EPROM for industrial safety applications including semiconductor
              • Class leading stability | Fast response | Stable baseline

              Sensorix LEL Satellix

              PN: AN281S18

              • Compatible with Satellite XT, replaces 9602-9902
              • Pellistor with EPROM for industrial safety applications including semiconductor
              • Class leading stability | Fast response | Stable baseline

            • Satellix Gas Sensors for Sulfur Dioxide

            • Sensorix SO2 25 Satellix

              PN: AN262S11

              • Compatible with Satellite XT, replaces 9602-5900
              • 3-electrode sensor with EPROM for industrial safety applications
              • High stability | Fast response