Zygo Corporation is a global leader in the design and manufacture of advanced optical metrology systems and ultra-precise optical components and assemblies.
Our mission is to enable customer success by delivering innovative precision optical and metrology solutions that exceed expectations.
ZYGO is comprised of these groups:
Optical metrology is an extremely versatile laboratory inspection tool, and has an important role to play in the verification of quality and design intent. Today, it has become the "go to" metrology solution, benefitting from that fact that it is non-contact, non-destructive, fast, highly sensitive, and has exceptional resolution and accuracy.
The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of virtually any surface, and set the new standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers.
The base ZeGage™ Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples, with a much finer surface finish, the ZeGage™ Pro HR offers more than 20X higher precision with 0.15 nm vertical precision.
The NewView™ 9000 3D optical surface profiler provides powerful versatility in non-contact optical surface profiling. With the system, it is easy and fast to measure a wide range of surface types, including smooth, rough, flat, sloped, and stepped. All measurements are nondestructive, fast, and require no sample preparation.
At the core of the system is ZYGO's Coherence Scanning Interferometry (CSI) technology which delivers sub-nanometer precision at all magnifications, and measures a wider range of surfaces faster and more precisely than other commercially-available technologies, thus optimizing your return on investment.
Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler combines exceptional precision, advanced algorithms, application flexibility, and automation into a single package that represents ZYGO's most advanced Coherence Scanning Interferometric (CSI) profiler.
The completely non-contact technology optimizes the return on investment by delivering sub-nanometer precision at all magnifications and measuring a wider range of surfaces faster and more precisely than other comparable technologies commercially available. With applications as varied as flatness, roughness and waviness, thin films, step heights and more on virtually any surface and material, Nexview NX2 truly is the no-compromise profiler.
As the latest generation flagship, Nexview NX2 provides a wide range of differentiated features targeted at making users' metrology better, faster, and more reliable:
ZYGO's Verifire™ interferometer system provides fast high-precision measurements of plano or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Measure glass or plastic optical components – like flats, lenses, and prisms – and even precision machined metal and ceramic surfaces.
A true laser Fizeau design, the Verifire™ system expands upon ZYGO's unmatched experience in surface form metrology. The on-axis configuration combined with ZYGO's patented acquisition algorithms and full-featured Mx™ metrology software enables high-precision surface form metrology with advanced analysis capabilities.
Technology for optical metrology has advanced significantly in recent years. In the past, environmental effects needed to be carefully controlled to achieve reliable measurements. Today, ZYGO offers technologies that enable reliable measurements in harsh environments where vibration and air turbulence can be extreme.
QPSI™ Vibration Tolerant Interferometry eliminates ripple in phase data caused by small vibrations in a cavity, while maintaining a high-precision on-axis measurement configuration. ZYGO's proprietary QPSI data acquisition is enabled by a ZYGO-manufactured high-power HeNe laser source and patented software algorithms – no other vibration tolerant acquisition technique compares.
DynaPhase® Vibration Insensitive Interferometry freezes vibration and air turbulence, enabling metrology in extreme environments. Patented in-situ calibration ensures precision and confidence in metrology that can't be matched. NEW The DynaPhase® acquisition mode is now available as an option on the Verifire system, adding even more value to this workhorse interferometer.
ZYGO's Verifire™ HD interferometer system provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront measurement of optical components and assemblies. The interferometric cavity length is precisely modulated while a high-speed camera captures several fringe images, which are analyzed by the software to create a highly detailed measurement of the part being tested.
Mid-spatial frequency features can't hide any longer. The Verifire HD system boasts a hi-res camera and optimized optical design to reliably measure surface features that have been difficult to discern in the past. Plus, the Mx™ software package provides the facility to quantify mid-spatial frequency content with powerful Power Spectral Density (PSD) and diffraction simulation tool.
QPSI technology eliminates ripple and phase noise caused by common sources of vibration such as grinding and polishing equipment, motors, pumps, blowers, and personnel, which means you can use the Verifire HD system right on the production floor, without the hassle and expense of vibration isolation tables.
QPSI is enabled by a powerful new proprietary laser and a high frame rate camera. No calibration or special setup is required. A simple change of a menu option enables/disables QPSI technology.
ZYGO's new Verifire HDX interferometer is designed and built for mid-spatial frequency content characterization of extreme performance optical components and systems. The system includes all the great features of the popular Verifire HD – such as QPSI, and a long-life stabilized laser – and adds important enhancements like new best-in-class imaging and resolution for high instrument transfer function (ITF), superior characterization of mid-spatial frequency content and high-slope surface deviations, as well as ZYGO's DynaPhase® dynamic acquisition technique (optional) that eliminates problems due to vibration and enables precision metrology in nearly any environment.
The Verifire HDX system has an all-new optical design that was rigorously engineered to support pixel-limited performance for its 3.4k x 3.4k (11.6 megapixel) sensor, delivering enhanced imaging which reveals surface features that have been difficult to discern with lower resolution interferometers. This ultrahigh spatial resolution doesn't come at the expense of speed. The system operates at a frame rate of 96 Hz, at full resolution – up to 10X faster than other high resolution interferometers that can have limited capability due to noise entering the much slower measurement.
Power Spectral Density (PSD) and diffraction analysis tools round out the mid-spatial frequency characterization capability of the Verifire HDX system, and dissect and report comprehensive surface characteristics through a simple and intuitive user interface.
UltraFlat™ Transmission Flats are recommended for use with the Verifire HDX interferometer in order to realize full performance capability of the system. Ultraflat Transmission Flats are certified at λ/40 PVr or better, and are manufactured with strict control of PSD signature to minimize mid-spatial frequency content. These high-precision reference optics are designed to meet this level of precision regardless of whether they are used in a vertical or horizontal orientation, which affords more flexibility in your test setup.
Dynamic metrology... with confidence: Highest level of performance. Reliable metrology even in extreme vibration and air turbulence.
The new ZYGO DynaFiz® dynamic laser interferometer is a highly optimized optical instrument designed specifically for performing accurate metrology of optics in the presence of air turbulence and extreme vibrations.
The high light efficiency of the DynaFiz® interferometer's optical system, combined with its long life, high power, HeNe laser source, enables operation at high camera shutter speeds that "freeze" vibration. This dynamic capability provides reliable metrology in environments that are too violent for traditional temporal phase shifting techniques.
The low-noise, high resolution camera and optical magnification in the DynaFiz® dynamic interferometer enables clear visualization of the mid-spatial frequency characteristics in the surface of a test artifact.
Optical system testing can also benefit from the unique capabilities of the DynaFiz® interferometer and its ability to capture live data. LivePhase™ acquisition provides real-time Zernike feedback for active monitoring of the alignment of an optical system. This capability is the basis for movie mode which combines numerous dynamic images into a movie clip that provides a history of how an optic or system changes over time.
NEW! QPSI™ vibration-tolerant acquisition is now available standard on the DynaFiz interferometer. Take control of your metrology with any level of vibration. QPSI allows a faster vibration-robust measurement than dynamic acquisition, without the need for calibration or cavity changes.
Get the most from your metrology investment with the unique capabilities and unmatched versatility of the DynaFiz® interferometer. Reliability you can trust, only from ZYGO.
The Verifire™ MST utilizes a wavelength shifting laser and patented data acquisition methods to enable simultaneous measurement of the front and back surface of transparent optics, thickness variation (including wedge) and simple 2-step homogeneity metrology without difficult part preparation or messy coatings.
The Verifire™ MST Multiple Surface Test laser interferometer system provides high precision measurements of surface form and transmitted wavefront of optical components and lens systems. It is the only commercial interferometer system that can measure multiple surfaces – with a single measurement.
Other important capabilities include measurement of optical material homogeneity and total thickness variation (TTV), and measurement of plano glass thinner than 1 mm. The system is available in 1.064 µm, 1.053 µm and 1.55 µm wavelengths, in addition to the standard 633 nm wavelength, for qualification of near-IR and short-wave-IR materials and systems.
The Verifire™ MST interferometer employs innovative and differentiating technology, including ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI) and wavelength-shifting technology. These technologies set it apart from all others, making it well-suited for the most challenging applications, such as the measurement of plane-parallel optical components where multiple reflections often confuse traditional phase-shifting interferometers.
The Verifire MST system's differentiating technology enables you to confidently measure the front and back surfaces of an optic, the internal cavity, and thickness variation – all in a single measurement. No special calibration, part set-up, or surface preparation is needed. All data is automatically collected and analyzed by ZYGO's user-friendly Mx™ software, which provides detailed analysis of any or all of the surfaces measured.
Testing at a system's design wavelength is critical for final alignment and qualification. ZYGO offers a range of Interferometers for testing optical systems and materials at their operating wavelength, from NIR to SWIR, MWIR and LWIR – including optical references and accessories.
Optical imaging applications are broad and varied. Testing at a system's design wavelength is critical for final alignment and qualification, Night vision, IR and thermal imaging systems for aerospace and defense, lithography subsystems, remote sensing telescopes, and exotic material qualification represent broadly-varying wavelength requirements, and all benefit from testing at design wavelength with an infrared interferometer system.
ZYGO, long recognized as the world leader in interferometric testing instruments, has designed and built many specially-equipped interferometer systems, including NIR, SWIR, MWIR and LWIR wavelengths. ZYGO also designs and manufactures an array of reference optics (transmission spheres and transmission flats) for these wavelengths.
In addition to specific wavelength requirements, many optical testing applications must be conducted in difficult environments where vibration and air turbulence are extreme. These environmental effects can make precision metrology difficult or impossible. ZYGO has developed unique acquisition technologies that enable confident metrology in these demanding environments, and are available on all NIR, SWIR and MWIR interferometers.
The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.
The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.
The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
ZYGO's horizontal-axis Large Aperture Systems offer the unique capability to maintain two independent metrology cavities; one of the nominal interferometer aperture (4") and the other a choice of one of four beam expander diameters (12", 18" 24" and 32"). When configured with the proper accessories the Large Aperture Systems can be used to measure both surface form and transmitted wavefront quality.
Large Aperture Systems consist of...
The Large Aperture System components can be purchased separately from the interferometer mainframe. Contact your local ZYGO representative for assistance in configuring the system to meet your metrology needs.
The Verifire™ VTS interferometer system is a stand-alone upward-looking interferometer workstation designed for stable and robust surface form and radius of curvature metrology of spherical optics.
This fully-integrated turnkey system features a motorized Z-axis stage with 1 meter of encoded travel, which simplifies part positioning and enables automated radius of curvature measurements. The system can be configured with a 4-inch Verifire™, or any current 4- or 6-inch Verifire™ HD or Dynafiz® interferometer. The compact footprint requires minimal floor space ideal for the shop floor.
The Verifire™ VTS features a rigorous mechanical design with integrated passive vibration isolation system to provide a stable metrology cell for confidence in your measurement results. Going further, all standard interferometers include ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. Select standard 4-inch Verifire™ or 4-inch / 6-inch Dynafiz mainframes for QPSI to enable true on-axis metrology without degradation to data maps from typical production vibrations.
ZYGO is the technology and application support leader in position metrology and heterodyne displacement interferometry, offering complete solutions and support for your OEM metrology application. ZYGO's technologies and OEM products have been field proven over many years of use in leading-edge production facilities.
ZYGO offers a variety of...
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.
The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables. ZYGO's complimentary ZPS™ software provides a plug-and-play connection between the ZPS system and your computer, allowing you to get up and running with your system quickly and easily.
The ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.
Click on each of the thumbnail images below to see illustrations of sample applications.
With over 30 years of experience, ZYGO's nano-position sensing products have become one of the most trusted, delivering continuous operation with exceptional performance. ZYGO is a market leader in displacement sensors providing feedback for closed loop servo control on an OEM basis. Semiconductor and flat panel manufacturing and process control tools in production today rely on ZYGO sensors to provide the precision and reliability needed for high volume manufacturing environments.
Our ZMI™ displacement measuring interferometer sensors are used to measure relative motion of reticle/mask and wafer stages in these systems to the nanometer level. Our modularized components can be configured to provide all degrees of freedom necessary for your specific application to enable successful nanometer-level motion control. A single ZMI laser head is capable of measuring between 2 and 22 axis of measurement, allowing for a fully synchronous measurement across all axes.
As your partner in motion control, you can expect ZYGO to be there to support your continuous system improvements and provide a path forward towards your next generation requirements.
ZPS™ offers a massively parallel arrangement of up to 64 small-footprint sensors to directly measure the front or rear surface of a mirror or other optic, allowing you to reconstruct the surface deformation for best aberration correction. This enables real-time in situ monitoring of the optic which together with closed loop control can maintain the shape or deform it deterministically.
Mirror shape can be changed unintentionally with thermal loads, actuator drift, or mechanical creep. Certain adaptive optics applications cannot monitor the performance of the optic without interrupting operation or impacting optic system performance. Other possible solutions are either not practical or do not measure fast enough to be effective. Enter ZPS™.
ZPS' high repeatable absolute position means that you are able to store known good deformation states and dynamically drive to these states, enabling rapid adjustment of the optical configuration and avoiding the slow iterative processes typically involved.
If you don't see a standard ZYGO product that fits your specific need, we invite you to consider our Custom Metrology Solutions service.
Our applications engineers will work with your team to develop a metrology solution that is tailored to fit your specific requirements. We can modify our standard systems, design and build special fixturing, customize software applications, or engineer a completely unique system, just for you.
Custom Metrology Solutions can include:
ZYGO non-contact coherence scanning interferometer (CSI) products offer precise, rapid and quantitative surface metrology of form and roughness for improved part quality and manufacturing yields. Our field-proven and innovative solutions enable our customers to control their current machining processes, while providing the insight to analyze and solve manufacturing challenges as they arise.
Today's process engineers require inspection tool flexibility, consisting of abilities to switch to new applications quickly and efficiently, New machining techniques, new materials, low volume/high value... some of the concerns companies need to keep in mind to control the process. ZYGO's 3D Optical Profilers address the critical needs of today's advanced manufacturers.
Surface Form, Waviness, and RoughnessForm, waviness, and roughness measurementsFrom our Optical Profilers to our Large Aperture Laser Interferometers, ZYGO's metrology systems cover a wide range of spatial frequencies, enabling precise, non-contact metrology of surface characteristics from roughness and texture to low spatial frequency form error and deviation.
These metrology systems deliver visual and quantitative 3D (ISO 25178) surface measurements and advanced characterization, including PSD analysis, aspheric form, super-smooth roughness, and more.
Contact ZYGO to discover more about how our suite of metrology solutions can provide you with the capability to control your process and improve quality – from simple R&D tools to automated production systems.
Surface finish measurement, sometimes called surface texture measurement, is the characterizing of a surface's quality or conformance to expectations (for example, to an engineering specification) through measurement of its variations in local height over a given distance. There are several aspects of the surface to be considered in measuring surface finish.
Surface roughness measurement is a quantitative assessment of very closely occurring surface irregularities, and is sometimes used interchangeably with the term surface finish measurement. There is a difference in context, however: while surface roughness is a general term about the amount of surface variation (at a very small scale) on any given surface, whether natural, man-made or found, "surface finish" is a term implying a surface that has been deliberately modified or engineered, with an end in mind.
The Regions Analysis tool, standard equipment in ZYGO's Mx™ software for our optical profilers, allows you to isolate specific regions of a data set for discrete or group analysis. The individual regions of interest can be defined automatically by the software, or manually selected by the user. Mx software's palette of measurement results may be employed for each individual region, or multiple regions may be analyzed as a group, with full statistical data.
Regions Analysis can provide invaluable data for a host of industries, including semiconductor, MEMS, microfluidics, precision machining, micro optics, and consumer electronics. Some examples are:
Tribology has been growing in importance as manufacturers gain a better appreciation of its impact on product performance and lifespan. Engineers involved in tribology applications can benefit greatly from a metrology tool that can measure and quantify how a surface is affected, on a microscopic level, by abrasion, adhesion, scuffing, galling, electro-arcing, fatigue, rolling contact, delamination, spalling, impact, fretting, corrosion, or a combination of these types of wear. The measurement data obtained can be critical to engineers optimizing the design of a component or assembly, a surface finishing process, coating formulation, or method of lubrication.
Zygo® 3D optical surface profilers are frequently selected for macro-, micro- and nano-scale tribology applications in material research, refinement of surface finishing techniques, and lubrication engineering. They can examine surface features with nanometer-scale precision and provide reliable quantitative 3D measurement data quickly and reliably.
Optical profilers are valuable tools for wear analysis, regardless of whether the wear is the result of actual use, or wear testing with a tribometer. Examples of tribology-related surface features that can be quantified with ZYGO optical profilers are: wear tracks, scratches, pitting, microstructural cracks, indentation, and material removed due to actions such as spalling and adhesion.
With the Vision Software Suite for Mx™, users can leverage the power of the NewView™ Series of optical profilers to perform rapid and accurate lateral and vertical metrology from the same data, producing high-fidelity 2D and 3D images. This simultaneous measurement eliminates the possibility that the part can change between lateral and vertical metrology operations.
The Vision Software Suite (VSS) for Mx™ makes this process simple and straightforward by adding the power of Cognex VisionPro to the surface characterization capabilities of ZYGO's Mx™, performing tasks such as pattern matching and dimensional measurement.
Many precision manufacturing processes require step height measurements with a high degree of repeatability and accuracy. ZYGO's NewView™ optical profilers can measure step heights up to 20000 µm with sub-nanometer resolution.
Depending on the model, ZYGO's NewView™ surface profilers can measure a variety of step heights. The height difference between two discontinuous planes, up to 20 mm, is most effectively handled by ZYGO's Coherence Scanning Interferometry (CSI) technology. It is also possible to measure the angle of the surfaces using this technique.
Thin Film Measurement and CharacterizationThin transparent thin films are critical across a variety of markets and applications, including consumer electronics, semiconductors and optics. Precise monitoring and control of thin film processes is achieved by measuring top surface, thickness, and substrate surface characteristics – all of which are enabled by multiple thin film measurement and analysis technologies available on ZYGO's 3D optical profilers.
Advanced Model Based Analysis (MBA) is the most advanced CSI-based thin film measurement technique available from ZYGO, and works by comparing a theoretical model of the sample film stack to an actual measurement signal as seen by the profiler. This patented technology simultaneously measures topography, thickness, and substrate topography for single layer films from 50 – 2000 nm in seconds. In addition to thin film characterization, MBA technology can be used to perform true topography measurements of dissimilar materials by adjusting for the phase change on reflection (PCOR) that occurs in these situations.
Standard Film Analysis (LSQ) is used to measure film thickness and substrates of films from 1 – 150 µm optical thickness, as well as the top surface of films from 0.4 – 150 µm. Thick film metrology works by isolating the interference signals that are created by the multiple material interfaces and require only basic knowledge of the film's index of refraction.
ZYGO offers a comprehensive range of metrology solutions for measuring transmitted wavefront quality and homogeneity of discrete components and assembled lens systems, covering a wide range of operating wavelengths. Click on areas of the chart below to find out more about each of our transmitted wavefront metrology solutions.
ZYGO laser interferometers can be used to accurately determine the radius of curvature of a spherical optic by measuring the distance between "cats-eye" and confocal locations. To simplify the process of measuring this distance, ZYGO offers a linear slide rail to which an optical mount is attached, as well as higher precision stand-alone options.
Radius of curvature slide rails are available in both manual and motorized versions, with either an encoder scale or a distance measuring interferometer (DMI).
For extreme precision measurements, ZYGO offers stand-alone systems, in a vertical downward-looking orientation, that feature a multi-axis DMI interferometer and active isolation.
Radius of curvature calculations are performed by ZYGO's Mx™ analysis software, included with every interferometer system.
An important property of an optical component is the homogeneity of the refractive index of the material from which it is made. Variations in the material's refractive index will affect the wavefront passing through it. ZYGO provides three different options for accurately measuring optical homogeneity.
Oil-on Plates - This traditional method of measuring optical homogeneity requires two glass plates with polished surfaces, and immersion oil with the same index of refraction as the test sample. Two measurements are taken, one with just the two glass plates, and one with the sample sandwiched between them, immersed in the oil. The first measurement is subtracted from the second to calculate the homogeneity of the sample. While potentially messy and time consuming, this method's advantage is that the sample's surfaces do not have to be polished.
Contact ZYGO for details and pricing information.
PHom Application - This MetroPro® application can be used with Verifire™ Series interferometers. As with the oil-on plate technique, the PHom application requires two measurements (with and without the test sample); but has the advantage that the immersion oil is not needed, thus saving time and money, and eliminating exposure to potentially hazardous material. However; the test sample must have wedge in order to differentiate its surfaces from the reference surfaces.
Verifire™ MST - Offers a revolutionary new approach to measuring optical homogeneity. As with the PHom application, no immersion oil is required. However; unlike the PHom technique, the test sample does not need to have wedge. Sophisticated software algorithms accurately differentiate between all four surfaces in the cavity to provide simultaneous measurements of the sample's front and back surfaces, physical and optical thickness variation, nonlinear homogeneity and, for the first time, linear homogeneity.
Displacement Measuring Interferometer systems (DMI) measure relative position of a "target" to a very high degree of precision, making them ideally suited to provide feedback to a motion control system. A typical OEM application for this technology is in photolithography equipment where it measures stage position and sends the data to the precision motion control system, making possible ultra-precise positioning of the stage.
Some processes that benefit from this level of precision are: machine tool calibration, X-Y stage control in semiconductor photolithography, stage control and triggering in memory repair and wafer inspection, machine tool calibration, and diamond turning. Many different interferometer configurations are possible, with each designed to accomplish a specific type of measurement.
Displacement Measurement - Useful for measuring limited distances with extreme precision. At right is a basic single-pass configuration for measuring linear displacement. Since the measurement beam makes only one pass to the target, this design allows for the maximum range of travel. A two-pass configuration has half the range of a single-pass.
Angle Measurement - Measures changes in the angle of the target mirror with extreme precision. Shown is a DPMI configuration (Differential Plane Mirror Interferomter). The angular displacement reference mirror has two holes that are positioned such that the second pass of the beams is directed to the opposite mirror it reflected from on the first pass. The resultant output is an angular displacement whose resolution is based on the separation between the beams on the target mirror (less than 0.1 arc second).