Navigation : EXPO21XX > AUTOMATION 21XX > H27: Motion Actuators > mechOnics
  • Offer Profile
  • The product line of mechOnics AG ranges from these stand-alone simple positioning components for laboratory applications to complete automated and integrated solutions for low temperature-positioning. The product range includes different sizes and travel of the stages for ambient temperature up to low temperature operation.

    The product range is completed by innovative and highly flexible control systems for multiple axes operation.
Product Portfolio
  • Competence in Micropositioning

  • We focus on microsystem technology and mechatronic systems. We offer solutions in the following areas: software for electronic controlling, piezo drives and micropositioner, related devices such as monomode coupler, electronics like motor controllers.
      • MS15 (3.5mm travel)

        • 3.5mm travel with 15 x 15 mm footprint
        • compact design
        • smallest product in our portfolio
      • MS30 - 8mm travel

        • 8 mm travel at 30 x 30 mm footprint
        • for various application fields
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 18mm travel

        • 18 mm travel at 30 x 40 mm footprint
        • many mounting possibilities
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 30mm travel

        • 30 mm travel at 30 x 52 mm footprint
        • for various application fields
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 8mm with measuring

        • 8 mm travel at 45 x 34 mm footprint
        • various mounting possibilities
        • for closed loop operation (resolution up to 50nm)
        • multi axes combinations without adapter plates
      • MS30 - 18mm with measuring

        • 18 mm travel at 45 x 40 mm footprint
        • for closed loop operation (resolution up to 50nm)
        • multi axes combinations without adapter plates
      • MS30 - 30mm with measuring

        • 30 mm travel at 45 x 52 mm footprint
        • for closed loop operation (resolution up to 50nm)
        • multi axes combinations without adapter plates
      • MS38 - 8mm travel

        • 8 mm travel at 38 x 42 mm footprint
        • free aperture of 10 mm for ray passage
        • special design for optical systems
      • DS30 - 8mm travel

        • 8 mm travel at 30 x 30 mm footprint
        • closed housing
        • especially flat housing (10mm height)
      • DS40 - 11mm travel

        • 11 mm travel at 40 x 40 mm footprint
        • closed housing
        • especially flat housing (11mm height)
      • MX25 - 2mm travel

        • 3D stage with 2 mm travel in x, y and z direction
        • very compact design
        • especially for optical devices and samples
      • MX35 - 10mm travel

        • 3D stage with 10 mm travel in x, y and z direction
        • 35 x 45 mm footprint
        • especially for optical devices and samples
      • MK25 FC coupler 0.4

        • very compact triaxial fibre coupler stage
        • NA of 0.4 for FC connector
      • MK25 SMA coupler 0.4

        • for SMA connector with NA of 0.4
        • compact triaxial fibre coupler stage
      • MT25 - Mirror Tilting Stage

        • angular adjustment 6deg (+-3deg) in two axes
        • for mirror with dia. 12.7 mm
        • free opening of 9 mm
      • NDS40 - NOVA Stage with 11mm travel

        • 11 mm travel at 40 x 40 mm footprint
        • for NOVA controller system
        • closed and compact housing
      • NDS70 - NOVA Stage with 15mm travel

        • 15 mm travel at 70 x 70 mm footprint
        • for closed-loop (up to 50 nm resolution)
        • for NOVA controller system
      • DSP50 multi-phase linear stage

        • driving force up to 15 N
        • repeatabilities up to 1 nm
        • 10 mm travel at 50 x 50 mm footprint
        • ultra compact multiphase stage
        • for NOVA controller system
      • MS15 xy-mounted

        • 3.5 mm travel in x and y direction
        • Compact design
        • smallest product in our portfolio
      • MS15 xyz-mounted

        • 3.5 mm travel in x, y and z direction
        • Compact design
        • smallest product in our portfolio
      • MS15 (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • ultra compact design
        • 3.5mm travel
        • xyz – combination possible
      • MS30 - 8mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 8 mm travel at 30 x 30 mm footprint
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 18mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 18 mm travel at 30 x 40 mm footprint
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 30mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • many mounting possibilities
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS38 - 8mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 8 mm travel at 38 x 42 mm footprint
        • free aperture of 10 mm for ray passage
      • DS30 - 8mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 8 mm travel at 30 x 30 mm footprint
        • especially flat housing (10mm height)
      • DS40 - 11mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 11 mm travel at 40 x 40 mm footprint
        • especially flat housing (11mm height)
      • MX25 - 2mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 2 mm travel in x, y and z direction
        • 25 x 35 mm footprint
      • MX35 - 10mm travel (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 10 mm travel in x, y and z direction
        • 35 x 45 mm footprint
      • MK25 FC coupler 0.4 (vacuum edition)

        • for FC connector with NA of 0.4
        • for high vacuum conditions up to 10^(-6) mbar
        • compact triaxial fibre coupler stage
      • MK25 SMA coupler 0.4 (vacuum edition)

        • for SMA connector with NA of 0.4
        • for high vacuum conditions up to 10^(-6) mbar
        • compact triaxial fibre coupler stage
      • MT25 - Mirror Tilting Stage (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • angular adjustment 6deg (+-3deg) in two axes
        • free opening of 9 mm
      • MT25 - Mirror Tilting Stage with mirror adapter (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • angular adjustment 6deg (+-3deg) in two axes
        • with mirror adapter for mirrors larger than dia. 12.7mm
        • free opening of 9mm
      • MS15 xy-mounted (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 3.5 mm travel in x and y direction
        • 15 x 15 mm footprint
      • MS15 xyz-mounted (vacuum edition)

        • for high vacuum conditions up to 10^(-6) mbar
        • 3.5 mm travel in x, y and z direction
        • smallest product in our portfolio
      • MS15 (UHV edition)

        • for ultra-high vacuum conditions up to 10^(-9) mbar
        • ultra compact design
        • 3.5mm travel
        • 15 x 15 mm footprint
      • MS30 - 8mm (UHV edition)

        • for ultra-high vacuum conditions up to 10^(-9) mbar
        • 8 mm travel at 30 x 30 mm footprint
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 18mm (UHV edition)

        • for ultra-high vacuum conditions up to 10^(-9) mbar
        • 18 mm travel at 30 x 40 mm footprint
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS30 - 30mm (UHV edition)

        • for ultra-high vacuum conditions up to 10^(-9) mbar
        • 30 mm travel at 30 x 52 mm footprint
        • our all-rounder
        • multi axes combinations without adapter plates
      • MS38 - 8mm travel (UHV edition)

        • for high vacuum conditions up to 10^(-9) mbar
        • 8 mm travel at 38 x 42 mm footprint
        • free aperture of 10 mm for ray passage
      • DS30 - 8mm travel (UHV edition)

        • for high vacuum conditions up to 10^(-9) mbar
        • 8 mm travel at 30 x 30 mm footprint
        • especially flat housing (10mm height)
      • DS40 - 11mm travel (UHV edition)

        • for high vacuum conditions up to 10^(-9) mbar
        • 11 mm travel at 40 x 40 mm footprint
        • especially flat housing (11mm height)
      • MX25 - 2mm travel (UHV edition)

        • for high vacuum conditions up to 10^(-9) mbar
        • 2 mm travel in x, y and z direction
        • 25 x 35 mm footprint
      • MX35 - 10mm travel (UHV edition)

        • for high vacuum conditions up to 10^(-9) mbar
        • 10 mm travel in x, y and z direction
        • 35 x 45 mm footprint
      • ML17 - 5mm travel (UHV edition)

        • 5 mm travel at 17 x 32 mm footprint
        • for ultra-low temperatures up to 4K
        • for high vacuum conditions up to 10^(-9) mbar
      • MS15 xy-mounted (UHV edition)

        • for ultra-high vacuum conditions up to 10^(-9) mbar
        • 3.5 mm travel in x and y direction
        • smallest product in our portfolio
      • MS15 xyz-mounted (UHV edition)

        • for ultra-high vacuum conditions up to 10^(-9) mbar
        • 3.5 mm travel in x, y and z direction
        • 15 x 15 mm footprint
      • ML17 - 5mm travel

        • 5 mm travel at 17 x 32 mm footprint
        • for ultra-low temperatures up to 4K
        • very compact design
        • for high vacuum conditions up to 10^(-6) mbar
      • MK25 FC coupler 0.38

        • for FC connector with NA of 0.38
        • compact triaxial fibre coupler stage
      • MK25 SMA coupler 0.38

        • for SMA connector with NA of 0.38
        • compact triaxial fibre coupler stage
      • MK25 FC coupler 0.38 (vacuum edition)

        • for FC connector with NA of 0.38
        • for high vacuum conditions up to 10^(-6) mbar
        • compact triaxial fibre coupler stage
      • MK25 SMA coupler 0.38 (vacuum edition)

        • for SMA connector with NA of 0.38
        • for high vacuum conditions up to 10^(-6) mbar
        • compact triaxial fibre coupler stage
      • MT25 - Mirror Tilting Stage with mirror adapter

        • angular adjustment 6deg (+-3deg) in two axes
        • with mirror adapter for mirrors larger than dia. 12.7mm
        • free opening of 9mm
    • Electronics

      • Applications

          • Chemistry

          • Our high precision positioners are used in many experiments in the chemistry. They achieve highest positioning accuracy up to the range of some nanometers as well as extremely uniform movements with the multi-phase drive DSP 50. Optical sensors are detecting optionally the movements and are allowing repeatability in the range of some nanometers.

            Hereby this piezo inertial drives are the ideal components for micro-/nano-indent-applications as well as for experiments in nano tribology.

            For example our smallest positioner MS15 is as an xyz combination used in various indenters.

            Products for the use in chemistry:
            CH30 motor controller
            CU30 motor controller

          • Physics

          • Our high precision positioners and actors are used in many optical, contactless experiments in the physics as well as in applications for the

            nano metrology. They offer for all technological improvement positioning precision in the range of sub nanometers as well as extremely uniform movements with the multi-phase drive DSP50. Optical sensors are detecting optionally the movements and are allowing repeatability in the range of some nanometers.

            Piezo actuators and nano metrology sensors from mechOnics are the ideal positioners for the various experiments in physics.

            For example the precision positioner MS30 in connection with the linear measuring system PS30 are allowing the positioning of optics in delay-lines with highest precision and repeatability.


            Products for the use in physics:

            CH30 controller
            CU30 controller
            Minature Translation Stage MS30

          • Business

          • These piezo inertial drives are used in many fields of industry, in which parts have to positioned in the range of sub µm range.

            For example the micro positionerMS30 is used in many industrial lasers in positioning of optics – even in the cavity of the lasers.

            Integrated metrology systems feature resolution in the nanometer and sub-nanometer range for closed-loop operation with USB-controllers are used in semiconductor industry.

            Furthermore the ultra-compact micro positioners MS15 are used in SEM microscopes both for the movement of the probe and the rough positioning of the probe tip.

          • Biotechnology

          • Recent advances in biotechnology and related sciences have increased the need for high-speed, high precision positioning systems. Please read on for a few examples.

            Our piezo actuators for long travels can be used to precisely focus a microscope objective over up to 30 mm, and they can also help to sort cells rapidly. Drug screening applications demand nanoliter dispensing capabilities, yet another application where the precision and extreme lifetime of mechOnics piezo actuators.

            The scanning optical microscope — one of the cutting-edge tools for DNA research — is not feasible without piezo positioning systems.

            Especially combinations from our micro positioning stage MS30 together with the linear measuring system PS30 offers you the possibility to reach repeatabilities better than 50 nm.

          • Electronics

          • Moore's Law keeps compressing IC line widths and feature-sizes. In order to keep up, nanopositioning mechanisms and precision motion control systems embedded in front-end production and metrology tools must provide 10 to 1000x higher precision than feature size. Conventional positioning systems do not provide the required stability and precision.

            mechOnics offers a wide variety of piezo based solutions: from the very compact miniature positioner MS15 to the ultra-high-performance long-travel nanopositioning piezo stages MS30.

            Other precision motion products include the piezo tilt platform MT25 for beam stabilization / correction.

            Optical nanometrology sensors of the series PS30 measure the motion down to the nanometer range with very high bandwidth.

          • Basic Research

          • Piezo positioning systems are fundamental tools for nanotechnology applications. Their extreme precision makes them vital components in applications such as nanoimprint, nanoassembly, nano-data storage and nanofabrication.

            In addition to micro positioners with long travel ranges mechonics also designs advanced piezo controllers that provide very high bandwidth to drive also multi-phase actuators as the DSP50.

          • Vacuum

          • Piezo actuators of mechOnics provide very long travel ranges and require little to no power in quasistatic applications. This performs these actuators for the work in a vacuum – conditions which can be found in space applications or at many new experiments for physics.

            All our stages are available for vacuum from 10-6 mbar to 10-9 mbar. In collaboration with our customers also positioners were designed to work up to 10-11 mbar.

          • Cryogenics

          • Piezo actuators of mechOnics provide very long travel ranges and require little to no power in quasistatic applications. This performs these actuators for the work

            at very low temperatures – conditions which can be found in space applications.

            Also many new experiments for physics where our micro positioners are used can be done at Helium temperature (4K) to avoid Brownian motion.

          • Optics

          • In optical experiments our piezo inertial drives can be used in the following applications.

            On the one hand you can adjust optical elements with the linear positioning stage MS38 which offers you a free aperture of 10 mm over the complete travel range of 8 mm.

            On the other hand you can use the piezo tilt platform MT25 in an optical path to adjust the beam in two orthogonal axes very accurate. The fee optical aperture of the MT25 offers you the possibility to use transmitting optics.