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  • Offer Profile
  • Your Partner for High Precision
    in Positioning and Metrology.

    SmarAct develops high-performance solutions for handling and positioning in the micro- and nanometer range. The broad product portfolio – from single positioners to complex parallel kinematics, miniaturized robots and easy-to-use control systems – is completed by sophisticated measuring equipment based on powerful laser interferometers.

Product Portfolio
  • Positioning Systems

  • Most applications in academia and industry require more than one degree of freedom when it comes to the precise positioning of samples, tools or equipment.
      • SmarAct Modular System

      • Change is a constant in academic and industrial research. Equipment needs to be adaptable to address new requirements and to reduce pressure on the projects budget. The SmarAct Modular System is a product concept which allows customers to adapt, modify and reconfigure even complex multi-axis positioning systems in the field, based on stringent modularity and intercompatibility between linear, rotation and goniometer stages.
        It allows the combination of compatible stages of the CLS, SLC, SGO, SLS, DLS, MLS and SR Product Series to form complex and reconfigurable positioning setups. Standardized brackets, mounts, adapters and accessories provide the flexibility required to combine SmarAct single axis stages into convertible instruments while guaranteeing highest precision and highest quality of the so created positioning solution.
        Due to the high modularity and large number of components and accessories, the SmarAct Modular System offers almost endless possibilities to build your very own setup. The application scientists are eager to help you with selecting the optimal combination of components to create a perfect match to your requirements.
        The positioning systems we are presenting on the following serve as examples to show the possibilities and on-site reconfigurability of the SmarAct Modular System.
      • Pre-Defined Positioning Systems

      • Within the scope of the SmarAct Modular System, fully pre-built and pre-configured positioning systems are available. These pre-defined positioning systems are customer inspired and present systems and platforms most commonly requested.
        The systems are versatile and easily applicable to a wide field of positioning tasks. On this basis, complex serial positioning systems – combining customized connection elements and stages – can be realized.
        All presented positioning systems are fully compatible – across all product series – to the SmarAct Modular System. Therefore, they can be seen as the perfect starting point for application specific configurations as they can be easily combined with additional linear or rotation stages as well as goniometer stages of SmarAct’s SGO-Series.
        The positioning systems are compatible to all SmarAct control systems and can be commanded with handheld devices, by software or via programming interfaces for LabVIEW and C/C++ which are included in the supplied software development kit.

        If your application requires a special configuration that is not shown in the following, please do not hesitate to contact our application scientists to discuss your requirements.

      • SMARPOD - A Hexapod-like Positioning System

      • Within the scope of the SmarAct Modular System, fully pre-built and pre-configured positioning systems are available. These pre-defined positioning systems are customer inspired and present systems and platforms most commonly requested.
        The systems are versatile and easily applicable to a wide field of positioning tasks. On this basis, complex serial positioning systems – combining customized connection elements and stages – can be realized.
        All presented positioning systems are fully compatible – across all product series – to the SmarAct Modular System. Therefore, they can be seen as the perfect starting point for application specific configurations as they can be easily combined with additional linear or rotation stages as well as goniometer stages of SmarAct’s SGO-Series.
        The positioning systems are compatible to all SmarAct control systems and can be commanded with handheld devices, by software or via programming interfaces for LabVIEW and C/C++ which are included in the supplied software development kit.

        If your application requires a special configuration that is not shown in the following, please do not hesitate to contact our application scientists to discuss your requirements.

      • TRIPOD - A Hexapod-like Positioning System

      • The TRIPOD Product Series is the newest addition to SmarAct’s portfolio of compact and modular multidimensional positioning systems, combining serial and parallel kinematics in a hybrid design. Compared to classic hexapods, which are in some way limited in regard to the rotation around their Z-axis, TRIPODs offer continuous rotation capability and high stiffness over the whole working range.

        Please feel free to browse this section of the product catalog or scroll down to get further information about the working principle and performance of SmarAct TRIPOD's.

      • SMARGON - Microrobot

      • Highest precision, robustness and reliability are the top priority properties when selecting positioning equipment for the use in science and industry. SmarAct has designed a robotic positioning system with six degrees of freedom to be used for various positioning tasks in experiments or micro-assembly setups. Its compact design reduces results in a slim silhouette and allows large rotary angles even in confined spaces. With a smart automated calibration routine, it achieves a sphere of confusion in the single-digit micrometer range for all rotary axis.
        The 
        SMARGON is a positioning system with six degrees of freedom based on a combination of serial and parallel kinematics mounted to a heavy duty rotation stage, defining the ω-axis of the device. This rotation platform can either be a Direct-Drive or a piezo-driven stage. The sophisticated hybrid kinematic approach allows the end effector which can also be a component or another payload up to 50 grams to be positioned in X, Y and Z direction and to be rotated in χ-, φ- and ω-direction.
        The SMARGON control system calculates the partially parallel kinematic transformation, which allows for direct positioning of the end effector which makes the teaching of poses an easy task. The compatibility with the MCS2 Modular Control System guarantees an easy integration into existing control environments and an intuitive way to command the positioning system.
      • Optical Microscopy

      • In life sciences, precise specimen handling and manipulation is the most crucial part of the daily business at a microscopy workplace; therefore equipment being used has to be extremely precise and reliable.

        Microscopy Stages and Manipulators

        To address this requirements, SmarAct has developed microscopy stages that not only allow the specimen to be positioned in two dimensions, but also allow mounting of micromanipulation systems for in situ sample manipulation. The microscopy stage itself is based on compact linear stages and allows long travel ranges with nanometer precision and highest repeatability in closed-loop control mode.

        In addition to the standard universal object slide holder, a unified well-plate holder and petri dish holders are available. For high throughput experiments, a magnetic holder is also available which allows an easy and fast exchange of slides and coverslips.
        Micromanipulation systems are very versatile devices when it comes to handle pipettes, micro-knives, micro-grippers, microinjectors or other mechanical or electrical probes.

        Our portfolio includes several different manipulators with three and four degree-of-freedom for the most common tasks.

        Larger stages support not only one but two or more micromanipulators which gives you even more degrees offreedom to manipulate your specimens. Both manipulators can be moved totally independent of each other and of course can be equipped with different tools and axes configurations.

      • Opto-Mechanics

      • Because of their miniaturization and overall compactness as well as their modularity SmarAct positioning systems are the optimal solution for optical setups and experiments in the field of optics. In addition to multi-axes positioning systems we have also developed a large number of dedicated opto-mechanical components like motorized tip-tilt mirror mounts, iris diaphragms, filter wheels, rectangular apertures and beam shutters. Combined with positioning sensors, they enable closed-loop position control and are perfectly suited for automated or remotely controlled experimental setups.
        To address the high demand of in-vacuum optical setups nearly all components are available as high vacuum variants. For setups where reflections have to be omitted Black anodized versions of the components are available. All presented opto-mechanical components and devices in this catalog section can be highly customized. Our applications scientists are eager to discuss customized solutions to exactly match your requirements.
    • Metrology

    • SmarAct offers a range of measurement solutions that are widely applied in industrial and academic settings.

      Our PICOSCALE products are based on optical methods for the contactless measurement of displacements and vibrations. With high-bandwidth laser interferometry, displacements and vibrations can be tracked at resolutions down to single pm. A variety of options is available to adapt the measurement to your exact requirements.

        • Positioning Stages

        • Miniaturization in all fields of application increases the demand and requirements for compact and high-resolution positioning solutions.
            • Piezo Stick-Slip Stages: Linear Stages

            • Stick-Slip Linear Positioning Stages are available as different Product Series optimized for Compactness, Travel Range and Strength. SmarAct’s product portfolio includes different product lines of linear stages. Each line was designed with your requirements in mind and allows us to deliver the highest performance for your specialized positioning project. Full compatibility between components of different product lines allow you to select stages with special key features to combine them into multi-axis systems.
                • SLC Series

                • Linear stages of the SLC Series are based on linear slides with crossed roller bearings and are characterized by their compactness, high rigidity and straightness.
                  They are available in two different widths and are ideally suited for positioning systems where stability and high accuracy have top priority.
                • CLS-Series

                • Linear stages of the CLS Series were designed as Drop-In-Replacements for SLS Series stages in high availability applications where easy maintenance and servicability together with very low downtime are top priority.

                  Because of their stringent compatibility to SLS Series stages and the SmarAct Modular System they allow for easy integration into multi-axis systems: Their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers.

                • SLS Series

                • Linear stages of the SLS Series were consistently designed to allow for easy integration into multi-axis systems: Their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers. They are the perfect option when modularity and easy configuration are the top level requirements.
                • SL Series

                • Linear stages of the SL Series are ultra-compact and are the perfect match for setups with space constraints or demands for extreme miniaturization. While maintaining their miniature footprint the stages they offer comparably long travel ranges and can be combined to multi-axis systems.
                • SLL Series

                • Linear stages of the SLL Series are based on recirculating ball slides. The slide or carriages in combination with rails of different length make it an optimal solution either for precise long range positioning or large travel ranges within limited space. SLL stages can be operated by any of our control systems for stick-slip drives.
                  It is also possible to put multiple carriages on the same rail and move them independently to create fully motorized optical bench setups. The components of the SLL Series are available for two different rail widths. The rail of the compact SLL12 product line has a width of 12 mm and the compatible carriages a width of 27 mm. The larger versions of the SLL 42 product line include 42 mm wide rails and 60 mm wide carriages. The SLL42 product line is also available in a high-vacuum version. 
                  The slide or carriages in combination with rails of different length make it an optimal solution either for precise long range positioning or large travel ranges within limited space.
              • Piezo Stick-Slip Stages: Rotation Stages

              • Based on the SmarAct piezo drive technology rotation stages and platforms are available. They can be easily combined with each other or with our linear positioning stages to form more complex set- ups like gimbals, rotatable Eulerian cradles, multi-axes or multi-rotation positioning systems. SmarAct rotation stages allow for continuous and mechanically unlimited rotation. They differ by blocking force, velocity and outer dimensions as well as by the available options when it comes to integrated position sensors and vacuum compatibility.
                  • SR-1908 - Rotation Stage

                  • The SR-1908 is our smallest standard rotation stage. The very robust stainless steel bearing together with an aperture of 7 mm enables a broad range of possible applications.

                    The SR-1908 is our most compact and cost efficient rotation stage. With its small outer dimensions the stage is a perfect solution for setups with space constraints.

                  • SR-2013 - Rotation Stage

                  • The SR-2013 is our lightest closed-loop rotation stage. An integrated ceramic precision bearing is the reason for the ultra-high accuracy as well as the extremely low radial run-out.

                    It is also available with different options like ultra-high vacuum compatibility or as a fully non-magnetic version.

                  • SR-2812 - Rotation Stage

                  • The SR-2812 is a small closed-loop rotation stage with an aperture opening of 9 mm.

                    A tailored, backlash-free ceramic bearing leads to a very high accuracy and an extremely low radial runout. This stage is available with different options like ultra-high vacuum compatibility or as a fully non-magnetic version.

                  • SR-3211 - Rotation Stage

                  • The SR-3211 rotation stage is designed to be easily mounted onto linear piezo stages of the CLS-32 or SLS-32 Series.

                    It is also available with different options like ultra-high vacuum compatibility or as a fully non-magnetic version.

                  • SR-4011- Rotation Stage

                  • Due to the high-load stainless steel bearing, the SR-4011 is very robust. Compared to the footprint, the height is relatively low, making this stage an excellent choice for integration into flat positioning systems.

                    The SR-4011 rotation stage has a square base and exhibits a free aperture opening of 9 mm in diameter. It is also available in a high vacuum compatible version.

                  • SR-4513 - Rotation Stage

                  • Due to the high-load stainless steel bearing, the SR-4513 is very robust. Compared to the footprint, the height is relatively low, making this stage an excellent choice for integration into flat positioning systems.

                    The SR-4513 rotation stage has a square base and exhibits a free aperture opening of 8 mm in diameter.

                  • SR-5014 - Rotation Stage

                  • The integration of a microsensor makes the rotation stage SR-5014 the most cost effective closed-loop rotary positioner in our product line.

                    The SR-5014 rotation stage was designed with the compatibility to SmarAct’s CLS and SLS Series in mind allowing them to be easily mounted to linear stages of this Series and to goniometer stages of the SGO Series.

                  • SR-5714 - Rotation Stage

                  • Designed with an aperture of 25 mm, the very robust rotation stage SR-5714 can be used for a broad range of applications.
                  • SR-5714C - Rotation Stage

                  • This robust rotation stage can be used also for applications in harsh environments, down to ultra high vacuum environments.

                    The SR-5714C is equipped with a ceramic bearing while exhibiting the same aperture opening of the SR-5714 of 25 mm. It is available in an ultra-high vacuum compatible and non-magnetic version and is the right solution if robustness and the applicability in harsh environments is top priority.

                  • SR-7012 - Rotation Stage

                  • With its large platform and aperture opening the SR-7012 Rotation Stage is one of the most versatile rotation stages available

                    With its square base, its rotation platform diameter of 60 mm and a free aperture opening of 30 mm the rotation stage SR-7012 is very versatile. Because of its low height of only 12 mm and its overall ruggedness it can be used to carry bigger and heavier positioning setups.

                  • SR-9219 - Rotation Stage

                  • The SR-9219 rotation stage was designed with the compatibility to other SmarAct Product Series in mind allowing it to be easily mounted to linear stages of the CLS-92, SLS-92 and MLS-92 Series
                  • SR-9219C - Rotation Stage

                  • The SR-9219C stage is equipped with a ceramic bearing offering full ultra-high vacuum compatibility

                    Beside the vacuum compatibility, versions made of non-magnetic materials are also possible. Its outer dimensions and its mounting hole pattern allows this rotation stage to be directly mounted onto CLS-92, SLS-92 and MLS-92 Series linear stages.

                  • SR-12012 - Rotation Stage

                  • The SR-12012 rotation stage offers a large aperture and is mostly chosen for applications where an aperture and highest precision is absolutely essential.

                    With its 120 x 120 mm footprint the SR-12012 rotation stage offers an aperture opening of 82 mm while maintaining a low profile with a height of only 12 mm.

                • Piezo Stick-Slip Stages: High Load Stages

                • Linear stages of the SHL Series are specially designed to handle heavy payloads. Their mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation.

                  The stages can be equipped with an additional constant force spring to offset the payload to even higher values. Accordingly, nano-encoded stages which can lift up to 10 kilogramms over several millimeter are possible. While offering high payloads, SmarAct SHL stages remain very compact and are suitable also for set- ups with space contraints.

                    • CHS-5237-1D10N-10 - High Load Stage

                    • A High Load Stage equipped with an Exchangeable Drive-Unit, offering 10 mm of vertical travel and can handle payloads of up to 10 N

                      This high load stage is suitable for high availability applications in science and industry. It is equipped with SmarActs Exchangeable Drive-Unit, which allows the complete piezo-drive to be removed from the stage when required for servicing. As the Drive-Unit is accessible from the side of the stage the device does not need to be removed from the positioning setup during servicing. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation.

                    • SHL-1D20N-10 - High Load Stage

                    • High Load Vertical Stage with a large mounting platform and a travel range of 10 mm

                      Linear stages of the SHL Series are specially designed to handle heavy loads. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation. Stages which are intended for pure vertical motion to lift components or equipment can be equipped with an additional constant force spring to offset the payload to even higher values. Accordingly, nano-encoded stages which can lift up to 10 kilogramms over several millimeter are possible as well as multi-axis systems based on linear stages of the SHL Series which offer high blocking forces in all three dimensions.
                      While offering high payloads, SmarAct SHL stages remain very compact and are suitable also for setups with space contraints.

                    • SHL-1D80N-1 - High Load Stage

                    • High Load Vertical Stage that is able to lift 80 N over a travel range of 1 mm with nanometer precision

                      Linear stages of the SHL Series are specially designed to handle heavy loads. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation. Stages which are intended for pure vertical motion to lift components or equipment can be equipped with an additional constant force spring to offset the payload
                      to even higher values. Accordingly, nano-encoded stages which can lift up to 10 kilogramms over several millimeter are possible as well as multi-axis systems based on linear stages of the SHL Series which offer high blocking forces in all three dimensions.
                      While offering high payloads, SmarAct SHL stages remain very compact and are suitable also for setups with space contraints

                    • SHL-3D5N-5 - High Load Stage

                    • A 3DoF positioning system that can lift high payloads of up to 5 N over a range of 5 mm regardless of its mounting orientation

                      Linear stages of the SHL Series are specially designed to handle heavy loads. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed loop operation. Stages which are intended for pure vertical motion to lift components or equipment can be equipped with an additional constant force spring to offset the payload
                      to even higher values. Accordingly, nano-encoded stages which can lift up to 10 kilogramms over several millimeter are possible as well as multi-axis systems based on linear stages of the SHL Series which offer high blocking forces in all three dimensions.
                      While offering high payloads, SmarAct SHL stages remain very compact and are suitable also for setups with space contraints

                  • Piezo Stick-Slip Stages: Stages with Exchangeable Drive-Units

                  • SmarActs Exchangeable Drive-Units (EDUs) are the solution for all industrial and high availability applications of stick-slip piezo drives.

                    The crucial stick-slip piezo motor is housed in a robust Drive-Unit which can be easily exchanged by customers without the necessity to remove the payload from the stage or the stage itself from the positioning system. Until now, the entire stage had to be removed from the positioning system and sent back for service and repair when the friction element of the drive became worn or the drive showed a malfunction. Previously, this lead to a longer downtime of the positioning system.

                    With SmarAct EDUs service intervals of piezo stick-slip stages can be planned and downtime is reduced to only a few minutes while exchanging the piezo motor of the stage. The unique and patented Drive-Units are available for linear stages in the CLS Product Series and high load tables in the CHS Product Series as well as in complete positioning systems, from serial multi-axis systems up to highly complex parallel kinematics like the hexapod-like the SMARPOD.

                    The Exchangeable Drive-Units have been designed to directly add value for customers in many ways:

                    The Next Generation of Linear Stick-Slip Piezo Stages

                    Stages of the CLS Series were designed as drop-in-replacements of their SLS counterparts guaranteeing that all customers can benefit from this new generation of positioning stages. So far, the SLS Product Series has been the product of choice for customers who demand versitality, robustness and class leading accuracy.

                      • CLS-3232 - Linear Stage with EDU

                      • The smallest of the CLS-32 linear stages offer a footprint of only 32 x 32 mm² and a travel range of 21 mm and is able to handle payloads of up to 30 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-3232 stages are on par with their SLS-3232 counterparts.

                      • CLS-3252 - Linear Stage with EDU

                      • The middle size stage of the CLS-32 Series offer a travel range of 31 mm while maintainig a footprint of only 32 x 52 mm² and is able to handle payloads of up to 30 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-3252 stages are on par with their SLS-3252 counterparts.

                      • CLS-3282 - Linear Stage with EDU

                      • The longest stage of the CLS-32 Series offer a travel range of 51 mm while maintainig a footprint of only 32 x 82 mm² and is able to handle payloads of up to 30 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-3282 stages are on par with their SLS-3282 counterparts.

                      • CLS-5252 - Linear Stage with EDU

                      • The smallest of the CLS-52 linear stages offer a footprint of 52 x 52 mm², a travel range of 31 mm and an aperture of 9 mm in diameter. Furthermore, it is able to handle payloads of up to 20 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-5252 stages are on par with their SLS-5252 counterparts.

                      • CLS-5282 - Linear Stage with EDU

                      • The larger of the CLS-52 linear stages offer a footprint of 52 x 82 mm², a travel range of 51 mm and an aperture of 9 mm in diameter. Furthermore it is able to handle payloads of up to 20 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-5282 stages are on par with their SLS-5282 counterparts.

                      • CLS-92152 - Linear Stage with EDU

                      • The larger SLS-92 linear stage has footprint of 92 x 152 mm² and a travel range of 103 mm. Furthermore it is able to handle payloads of up to 20 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-92152 stages are on par with their SLS-92152 counterparts.

                      • CLS-9292 - Linear Stage with EDU

                      • The smaller one of the CLS-92 linear stages offer a square footprint of 92 x 92 mm² and a travel range of 63 mm. Furthermore it is able to handle payloads of up to 20 N.

                        Linear stages of the CLS-Series have been especially designed for high availability applications in science and industry. They are equipped with SmarActs Exchangeable Drive-Units which guarantees an easy access to the stages core component, the piezo-drive which makes servicing an easy task. The Drive-Unit can be exchanged without the need to remove the complete device from the surrounding positioning setup. They are the perfect option whenever modularity and easy configuration are the top level requirements.

                        From a performance point of view the CLS-9292 stages are on par with their SLS-9292 counterparts.

                      • SMARPOD CLS-32 with Exchangeable Drive-Units

                      • The SMARPOD CLS-32 is equipped with Exchangeable Drive Units and is perfectly suitable for all high availability applications

                        The SMARPOD CLS-32 is a mid-size hexapod-like positioning system. This unit is equipped with SmarAct's Exchangeable Drive Units (EDUs) guaranteeing an easy and fast exchange of the piezo drive without the necessity to fully disassemble the positioning setup and without losing calibration and position data.

                        Like other SmarAct SMARPOD's, the SMARPOD CLS-32 is also available in a high vacuum and ultra-high vacuum version or made out of fully non-magnetic materials.

                    • Piezo Stick-Slip Stages: Goniometer Stages

                    • All piezo-based goniometer stages are based on SmarAct’s piezo drive technology. Goniometer stages are available with different radii. In addition to their compactness, these stages are very rigid and therefore ideally suited for micro- or nano-positioning tasks.
                      Due to the usage of high precision crossed roller bearings their angular accuracy is very high. The goniometer stages offer highest resolution of motion over their whole working range of ±5 °.
                        • SGO-60.5 - Goniometer Stage

                        • The SGO-60.5 goniometer stage can be easily stacked on top of the SGO-77.5 stage to form an Eulerian cradle with a common center of rotation 60.5 mm above the working platform.

                          All piezoelectric goniometer stages are based on SmarAct piezo drive technology. Goniometer stages are available with different radii. In addition to their compactness, these stages are very rigid and therefore ideally suited for micro- or nanopositioning tasks. Due to the usage of high precision crossed roller bearings their angular accuracy is very high. The goniometer stages offer highest resolution of motion and are directly stackable. By combining two stages with appropriate radii it is possible to build a compact Euler goniometer with a common center of rotation. Their mechanical interface perfectly fits to the SLS-52 Series stages. Thus, allowing the creation of multi-axis systems by direct combination of linear, rotation and goniometer stages. The SmarAct goniometer stages can be operated by any of our control units and are also available with integrated positioning sensors. Furthermore, the SGO Series goniometer stages are available for different environmental conditions, such as high vacuum and ultra-high vacuum environments.

                        • SGO-77.5 - Goniometer Stage

                        • The precise and compact goniometer stage SGO-77.5 can be directly mounted on top of SLS-52 linear stages or act as a base for an Eulerian cradle when combined with a SGO-60.5 stage

                          All piezoelectric goniometer stages are based on SmarAct piezo drive technology. Goniometer stages are available with different radii. In addition to their compactness, these stages are very rigid and therefore ideally suited for micro- or nanopositioning tasks. Due to the usage of high precision crossed roller bearings their angular accuracy is very high. The goniometer stages offer highest resolution of motion and are directly stackable. By combining two stages with appropriate radii it is possible to build a compact Euler goniometer with a common center of rotation. Their mechanical interface perfectly fits to the SLS-52 Series stages. Thus, allowing the creation of multi-axis systems by direct combination of linear, rotation and goniometer stages. The SmarAct goniometer stages can be operated by any of our control units and are also available with integrated positioning sensors. Furthermore, the SGO Series goniometer stages are available for different environmental conditions, such as high vacuum and ultra-high vacuum environments.

                        • SGO-93.5 - Goniometer Stage

                        • With its 93.5 mm distance between the top platform and the rotation center the SGO-93.5 offers enough space even for larger components or substages

                          All piezoelectric goniometer stages are based on SmarAct piezo drive technology. Goniometer stages are available with different radii. In addition to their compactness, these stages are very rigid and therefore ideally suited for micro- or nanopositioning tasks. Due to the usage of high precision crossed roller bearings their angular accuracy is very high. The goniometer stages offer highest resolution of motion and are directly stackable. By combining two stages with appropriate radii it is possible to build a compact Euler goniometer with a common center of rotation. Their mechanical interface perfectly fits to the SLS-52 Series stages. Thus, allowing the creation of multi-axis systems by direct combination of linear, rotation and goniometer stages. The SmarAct goniometer stages can be operated by any of our control units and are also available with integrated positioning sensors. Furthermore, the SGO Series goniometer stages are available for different environmental conditions, such as high vacuum and ultra-high vacuum environments.

                        • Combining two stages 

                        • By combining two stages with appropriate radii it is possible to build a compact Euler goniometer with a common center of rotation.
                          Their mechanical interface fits to the SLS-52 Modular System. Thus, allowing the creation of multi-axis systems by direct combination of linear, rotation and goniometer stages. The goniometer stages can be operated by any of our control units and are also available with integrated positioning sensors. Furthermore, the SGO Series is available for different environmental conditions, such as high and ultra-high vacuum environments.
                        • Application Example: Modular Positioning System with 6 DoF

                        • A Modular Positioning System with 6 DoF including three rotational degrees of freedom

                          Stages of the SGO-Series are fully compatible to SmarAct’s Modular System. Thus guaranteeing the possibility to combine goniometers stages with linear and rotation stages to complex positioning systems.
                          In the example shown on the right, two SLS-5252 linear stages form an XY platform which is complemented by an CHS-5237 lifting
                          stage as a Z-axis. Two goniometers, SGO-60.5 and SGO-77.5, and a SR-5014 rotation stage are mounted on top of the XYZ system. Because of matched outer dimensions and mounting hole patterns the three rotation stages have a common center of rotation (indicated by the green sphere).
                          The positioning system is suitable as a sample stage for diffraction experiments as the rotation center can be precisely positioned within a volume of 31 x 31 x 10 mm³.

                        • Application Example: Positioning System with 5 DoF

                        • A Positioning System with 5 DoF for heavy payloads or substages

                          If the intended application scenario requires larger travel ranges in XY and Z, the two SGO-Series goniometers can be also combined
                          with a three axis positioning system especially designed for long travel ranges and heavier payload. In the example on the right, two
                          SLS-9292 linear stages, each with 63 mm of travel, are combined with a SLS-5252 linear stage as the Z-axis. A constant force spring setup supports the Z-axis and extends its lifting force even further. By this sophisticated design the rotation center of the Euler goniometer (green sphere) can be positioned within a large volume 61 x 61 x 31 mm3 with highest precision.

                      • Piezo Stick-Slip Stages: Micro-Grippers

                      • Precise handling of components, parts and tools at automated assembly lines and sample handling and manipulation in life science are most crucial positioning tasks. To address the growing demand to control tweezers, pincers and grippers with very high precision we have complemented our product portfolio with versatile gripping solutions.
                        Modularity is one of the key features of our products. All of our grippers consist of a linear piezo stage and a gripping jaw which can be easily exchanged and customized if required. Several different and specialized designs of gripper jaws are available.
                        When equipped with a position sensor the grippers allow full closed-loop control about the gripping process and the opening of the jaw. In addition, force sensors integrated into our parallel micro-gripper SGP-17F allow to control not only the jaw opening but also the gripping force when handling fragile or highly delicate objects. If your specific application requires a dedicated design, do not hesitate to contact our application specialist to discuss possible solutions or fully customized designs.
                          • SG-06 - Micro-Gripper

                          • The SG-06 micro-gripper is ideal for space constrained setups and applications where miniaturization is the top priority.

                            Gripper jaws for this product line are exchangeable or permanently fixed to the positioner and can be customized to match your specific requirements. The optionally integrated click-in place system supports easy exchange of the gripper jaws and continues SmarAct’s stringent idea of modular and adaptable products. As the SG-06 gripper is available in a vacuum compatible version it is also the ideal solution for in-vacuo sample handling and transferring tasks. In combination with linear stages of the SL-06 and SLC-17 product series it can also be seen as one the most compact pick and place robots available.

                          • SG-1730 - Micro-Gripper

                          • Based on one of SmarAct’s most compact linear stages this gripper system became a very compact and versatile tool for pick and place applications for optics and electronics.

                            The SG-1730 micro-gripper utilizes the SLC-1730 as its core component. It can be equipped with different position sensors allowing to control and monitor the gripping process. Moreover, available vacuum compatible variants extend the field of application to pressure ranges down to ultra-high vacuum. A wide variety of dedicated jaw geometries is available. As the jaws can be easily exchanged the SG-1730 gripping system can be reconfigured on-site to be adapted to different gripping tasks. Most recently, a quick exchange system for gripper jaws – comparable to the click-in place system of the SG-06 Series – was developed and is available upon request. Customization of the jaw geometry to address specific applications is possible. Please do not hesitate to discuss your requirements with our application scientists to create your very own gripper jaw design.

                          • SGP-17F - Micro-Gripper

                          • The SGP-17F micro-gripper is the perfect solution when it comes to applications like the active alignment of optics or sub-components or the parallel gripping of delicate objects with a constant force.

                            Due to the integrated force sensors it doubles as a sensitive force detection system that can be used in a variety of applications as for example in the monitoring of UV-curing processes. The micro-gripper is equipped with one biaxial load cell per jaw, allowing to measure gripping force and orthogonal contact force individually. Gripping force orientation is constant and jaw movement is fully parallel over the whole gripping range. The jaws itself can be easily exchanged, adapted or fully customized to address the requirements of specific applications. As force and position are measured by individual sensors independently the gripping tool is ideal for handling of lightweight and fragile objects without the risk of damage by applying unnecessary high forces. Utilizing the force feedback signals, collision warning and handling can be implemented via software.

                          • Example: Micro-robots

                          • SmarAct's micro gripping systems are able to transform multi-axis stages to micro-robots allowing users to precisely perform manufacturing and assembly tasks with highest precision. For example adding a SG-1730 Micro Gripper to a XYZ-SLC17:30 positioning system yield to a very compact and versatile micro-robot. This robot is the perfect match for simple but very precise pick and place tasks or equipped with one or two rotation stages for more advanced micro-assembly processes.
                        • Environment Specific Stages and Systems: Cryogenic Piezo Stages and Systems

                        • Many applications in industrial and medical research as well as in fundamental research require cryogenic temperatures often well below 10 Kelvin. Additionally, in many cases it is not only necessary to cool samples but also to mechanically manipulate them precisely within the cryostat.
                          SmarAct has developed stick-slip linear and rotation stages with low-heat profiles and ultra-high vacuum compatibility which allow sample manipulation in temperatures down to the millikelvin regime.
                          Resistive cabling (based on phosphor bronze) is optionally available to reduce the heat load on the positioning stages. They can also be used at temperatures of up to 330 K like our standard UHV stages. Furthermore, they are bakeable at temperatures of up to +150 °C. For the use in high magnetic fields at cryogenic temperatures, non-magnetic versions are available.
                          Cryogenic stages can be easily assembled into complete positioning systems including thermalization management and customization to your specific application.
                            • Cryogenic Linear Stages

                            • The linear cryogenic stages are specialized versions of SLC Series stages. They completely retain the compact design of the room
                              temperature versions and are therefore ideally suited for limited spaces typically found in heat shields of cryostats. We use titanium for the base of the stages and solid-state coating as dry lubricants for our high precision bearings.
                              Materials are selected to match the thermal properties to prevent mechanical stress during cooling and heating cycles. This ensures long lifetime in cryogenic and ultra-high vacuum conditions.

                              The cryogenic option is available for many linear stages of the SLC Product Series. Please note that the following changes apply to the specifications given in the product specification tables.

                              • Cryo SLC stages are about 60 % heavier because of the use of titanium as a base material compared to the standard aluminum versions of an SLC stage
                              • Cryo SLC stages have a lower Blocking Force value of 2 N and also a lower Lift Force value of 1 N compared to  3.5 N and 1.5 N of non-cryo versions of SLC stages
                              • Due to an application optimized piezo drive the travel range of the Cryo SLC-1722 is 6 mm.
                            • Cryogenic Rotation Stages

                            • Many applications in industrial and medical research as well as in fundamental research require cryogenic temperatures often well below 10 Kelvin. Additionally, in many cases it is not only necessary to cool samples but also to mechanically manipulate them precisely within the cryostat.
                              SmarAct has developed stick-slip linear and rotation stages with low-heat profiles and ultra-high vacuum compatibility which allow sample manipulation in temperatures down to the millikelvin regime.
                              Resistive cabling (based on phosphor bronze) is optionally available to reduce the heat load on the positioning stages. They can also be used at temperatures of up to 330 K like our standard UHV stages. Furthermore, they are bakeable at temperatures of up to +150 °C. For the use in high magnetic fields at cryogenic temperatures, non-magnetic versions are available.
                              Cryogenic stages can be easily assembled into complete positioning systems including thermalization management and customization to your specific application
                            • Cryogenic Positioning Systems

                            • Many applications in science and industry require more than two axis of lateral motion for sample or component positioning. Even at very low temperatures and in confined spaces the payload has to be moved with highest precision.
                              SmarActs Cryogenic Positioning Systems are modular, precise, customizable and thermally managed to keep your samples as cold as possible during positioning or scanning tasks.

                              The central component of every XYZ positioning system is a linear stage. In this example a SLC-1720-CR. Three stages can be easily mounted onto each other with brackets and adapter plates to form compact multi-axis setups which are normally connected to the cold finger of a cryostat in the customer’s setup.

                              When designing high resolution positioning systems that should be able to precisely work even at cryogenic temperatures one has to ensure that the heat load on the stages are transferred as fast as possible to the cryostat to reduce temperature creep of the positioning system due to thermal expansion of the stages and mounting components.

                              The most crucial task is to transfer the heat from the payload to the mounting base plate to ensure a constant and low temperature at the point of interest.

                              Depending of the application several different designs of thermalization equipment is available to ensure the optimal heat transfer to the cryostat. In the following three different setups are displayed as examples. Other setups and designs are also possible and can be realized on request.

                          • Environment Specific Stages and Systems: Non-Magnetic Piezo Stages and Systems

                                • Non-magnetic Piezo Stages and Systems

                                • For applications in magnetic fields or where else stages made of non-magnetic materials are needed, specialized versions of linear and rotation stages are available. Typical materials used in these types of stages are copper beryllium, titanium, ceramics and copper wires with Teflon or Kapton insulation.
                                  Non-magnetic stages of the SLC-17 and SLC-24 Series include ceramic guideways. Therefore we strongly recommend to also opt for the U-shaped base to increase the overall stiffness of the stage.
                                  Please note that the U-shaped base resembles the same mounting hole pattern but adds 6 mm to the width of the stage itself. As a result the width of a SLC-17 stage enlarges to 23 mm and the width of a SLC-24 stage to 30 mm respectively. Thus, waiving the U-shaped base option is only advisable if compactness is the top most requirement.

                                  Also large parallel kinematic systems like the customized SMARPOD shown in the picture below can be realized as fully non-magnetic versions.

                            • Environment Specific Stages and Systems: Ultra High Vacuum Piezo Stages

                                  • Ultra High Vacuum Piezo Stages

                                  • SmarAct stages are not only the perfect match for applications in ambient conditions but also for more extreme environments like high vacuum (HV, 1E-6 mbar) and ultra-high vacuum (UHV, 1E-11 mbar).

                                    Most of the stages presented on this website are available in versions specially prepared to be able to operate in vacuum conditions.
                                    UHV versions are bakeable at up to 150 °C and are available with two different cable types:

                                    • The cost efficient version utilizes Teflon insulated wires.
                                    • The Kapton® insulated version is a fluorine free solution.
                              • Electromagnetic Direct-Drives

                              • SmarAct’s MLS Product Series consists of electromagnetic linear motors that are directed towards industrial applications, lab automation and compact positioning solutions where high speed, force and nanometer precise motion need to be paired with high duty cycles and durability.
                                The stages are equipped with SmarAct’s contactless linear motors free of wear and open up a field of application where highly dynamic processes require both high speed and nanometer precision simultaneously. The electromagnetic drive allows for speeds up to 1 m/s. In addition, they are durable, almost maintenance-free, and due to their compact size, seamless integration into existing equipment is addressed.

                                Please feel free to browse this section of the product catalog or scroll down for further information and application examples.

                                  • MLS-3252 - Electromagnetic Direct-Drive

                                  • A miniaturized Electromagnetic Direct-Drive with 25 mm travel range.

                                    The MLS-3252 is a miniaturized Electromagnetic Direct-Drive which is compatible to the SLS-32 Modular System. It can be easily combined with SLS-32 linear and rotation stages. The stages can be powered by the reliable MCS2-Controller series.

                                  • MLS-5282 - Electromagnetic Direct-Drive

                                  • An Electromagnetic Direct-Drive with 38 mm travel range.

                                    The MLS-5282 is a mid size Electromagnetic Direct-Drive which is compatible to the SLS-52 Modular System. It can be easily combined with SLS-52 linear, rotation and goniometer stages. The stages can be powered by the reliable MCS2-Controller series.

                                  • MLS-92122 - Electromagnetic Direct-Drive

                                  • A large high performance Electromagnetic Direct-Drive with 65 mm travel range.

                                    The MLS-92122 is a large size Electromagnetic Direct-Drive which is compatible to the SLS-92 Modular System. It can be easily combined with SLS-92 linear, rotation and goniometer stages. The stages can be powered by the reliable MCS2-Controller series.

                                  • Application Example

                                  • Because of their high velocity and acceleration, Direct-Drives are perfectly suited for micro-assembly. In this example several XYZ MLS positioning systems are combined with SLS stages and SLC based gripper systems to perform fast and precise tasks on a micro-assembly line.
                                • Hybrid-Drives

                                • SmarAct’s Hybrid-Drives combine the advantages of stick-slip drives and piezo scanners in a single and compact device. The Hybrid-Drive combines the advantages of both device types by integrating a dedicated piezo scanner into a SmarAct stick-slip stage instead of stacking two dedicated stages on top of each other. This brings the advantage that both stick-slip actuator and scanner can use the same feedback-signal for closed-loop positioning.

                                  Please feel free to browse this section of the product catalog or scroll down for further information and application examples.

                                    • DLS-3232 - Hybrid-Drive

                                    • Miniaturized linear stage based on SmarAct's Hybrid-Drive Technology fully compatible to the SLS-32 Modular System

                                      The Hybrid-Drive stage DLS-3232 is fully compatible to the SLS-32 Modular System including SLS-32 linear and rotation stages as well as all connection elements and adapter plates. Although DLS stages inherit two drive concepts they only acquire one channel of the MCS2. In that way, you can easily extend the functionality of your existing positioning systems by adding stages with SmarAct’s new Hybrid-Drive Technology.

                                    • DLS-5252 - Hybrid-Drive

                                    • Hybrid-Drive Stages combine the advantages of long travel range Stick-Slip Stages and high resolution Piezo Scanners

                                      The Hybrid-Drive stage DLS-5252 is fully compatible to the SLS-52 Modular System including SLS linear, rotation and goniomter stages as well as all connection elements and adapter plates. Although DLS stages inherit two drive concepts they only acquire one channel of the MCS2. In that way, you can easily extend the functionality of your existing positioning systems by adding stages with SmarAct’s new Hybrid-Drive Technology.

                                  • Control Systems and Software

                                  • Every successful positioning solution rests on at least two pillars. The first is defined by the mechanical part of the solution, the second by the electronics and software to control it. Our sophisticated and easy to use control systems together with our intuitive software solutions and software development kits (SDKs) are the basis for a fast and easy integration of our positioning technology into your application. SmarAct’s control system portfolio consists of a wide variety of components optimized for different applications and integration scenarios. From single channel hand held controllers up to rack mountable modules with up to 18 channels, we are able to equip you with the right tools.
                                      • Control Systems

                                      • SmarAct offers several lines of control systems. From simple OEM board level controllers up to highly modular multi-axis controllers with intuitive user interfaces
                                      • Software

                                      • SmarAct’s control systems come bundled with different software tools that supports you during setup, configuration and controlling your positioning systems.
                                      • Displacement Measurements

                                      • For high precision displacement measurements, SmarAct offers the PICOSCALE Interferometer, a powerful sensor with picometer resolution. Based on an extremely compact Michelson interferometer, non-invasive displacement measurements with low restrictions on the target reflectivity can be realized very efficiently.

                                        Sensor heads are available for general purpose or optimized for specific tasks like angular or differential measurements. Furthermore, we provide sensor heads for use in vacuum, cryogenic or other harsh environments. Due to their compactness, they fit into almost every setup. Powerful firmware modules and versatile accessories complement the PICOSCALE portfolio to emphasize its use as a laboratory device for synchronization with other devices, signal generation, real-time calculation and many more applications.

                                      • Vibration Measurements

                                      • The PICOSCALE Vibrometer is a turnkey solution to measure vibrations of micromechanical structures with sizes that range from just a few µm to multiple cm. Applications include the testing of MEMS, sensors, miniature loudspeakers but also bearings and actuators. Because the instrument is equipped with an integrated microscope and can measure up to 1 million pixels, it is excellently suited to visualize vibrational modes at high spatial and temporal resolution.
                                      • Measurement Services

                                      • The nature of some project does not justify the investment in specialized instrumentation and knowledge. To meet this situation SmarAct offers laboratory measurement services, which enable you to add state-of-the-art metrology approaches to your project.

                                        Your Advantages

                                        • Benefit from the latest equipment and expertise
                                        • Get faster approval for engineering services as opposed to an investment in technology
                                        • Evaluate the impact of new measurement capabilities prior to an investment decision
                                        • Simplify your development process by outsourcing specific measurement tasks

                                        Take the next step
                                        Our measurement services can help to optimize your development process but also to solve a one-off problem that limits the performance of your product. The measurement services are mostly performed at our laboratories in Germany but can also be carried out on-site. Please contact us to discuss your requirements and plan a pilot study today.