Sensirion now manufactures CMOSens® microsensors for measuring liquid flows. The innovative design enables measurement in the smallest spaces achievable to date.
The sensors are available with a glass substrate (LPG10) or a plastic substrate (LPP10). Although the glass LPG10 is exceptionally durable, the plastic LPP10 is extremely cost-effective in large quantities and ideally suited for short-term applications. The non-invasive liquid flow microsensor technology is based on thermal MEMS sensor elements and has been patented by Sensirion. Liquid flow sensing solutions for flow rates down to the microfluidic sector and sub-nanoliter resolutions are Sensirion’s unique strength. Samples of the LPG10 and LPP10 series are available now. Sensirion can modify existing products or develop entirely new products.
The innovative design enables Sensirion’s highly sensitive thermal flow sensor microchips to measure non-invasively through the wall of a flow channel inside a planar microfluidic substrate (US Pat. 6813944). The design provides unique sensitivity for liquid flow measurement and bubble detection even in the microliter range. A small digital CMOSens® microchip (2.2 x 3.5 mm) is bonded to the microfluidic channel substrate. In addition to the sensor element, it houses the complete digital intelligence and the memory necessary for signal linearization and temperature compensation. The chip provides a fully digital I²C interface and can operate over a supply voltage of 3.3 to 3.6 V. Fluidic ports on the bottom facilitate easy integration of discrete sensors for manifold systems if necessary. The sensor boasts a short flow sensing response time of about 40 ms and sensor resolutions down to 0.5 nl/min are feasible.
For custom specific designs in general our core competences include:
For more information, please visit http://www.sensirion.com.